15KW Induction Heating System with 5 Inch Quartz Tube and 2200C Temperature Controller

Product Overview

This high-frequency induction heating system represents a pinnacle in thermal processing technology, specifically engineered for advanced material science and industrial R&D. By combining a powerful 15KW induction heater with a sophisticated quartz chamber, this equipment enables researchers to achieve temperatures up to 2200ºC with exceptional speed and precision. The system is designed as a turnkey solution, integrating high-vacuum capabilities, a recirculating water cooling unit, and a high-purity graphite crucible assembly to provide a comprehensive platform for the melting and sintering of new metallic alloys and high-temperature ceramics.

Primary use cases for this equipment include Physical Vapor Transportation (PVT) for SiC crystal growth, melt infiltration, and the rapid heat treatment of semiconductor wafers. It is widely utilized in aerospace, energy, and electronics sectors where material purity and thermal consistency are paramount. The modular design allows for modifications to meet specific process requirements, making it a versatile asset for laboratories transitioning from basic research to pilot-scale production.

Built with industrial-grade components and a heavy-duty mobile frame, this unit offers uncompromising reliability under demanding conditions. Every component, from the anti-corrosive capacitance diaphragm gauge to the 100% duty cycle induction heater, is selected to ensure long-term operational stability. Users can operate with confidence knowing the system includes automated protection protocols for water pressure, over-temperature, and power fluctuations, ensuring both operator safety and equipment longevity in high-stakes research environments.

Key Features

• High-Efficiency 15KW Induction Power: Utilizing an advanced solid-state induction generator, this system delivers up to 15KW of power with a 100% duty cycle. The 30 - 80 kHz frequency range ensures deep thermal penetration and efficient energy transfer to the graphite susceptor, allowing for rapid heating rates that traditional resistive furnaces cannot match.
• Precision PID Temperature Regulation: The integrated digital controller features 30 programmable segments, allowing for complex thermal profiles including precise ramp-up, soak, and cooling phases. Automatic PID tuning maintains a temperature accuracy of ±3ºC, ensuring repeatable results across sensitive experimental batches.
• Superior Thermal Insulation and Refractory Design: A specialized three-layer refractory assembly made of high-purity alumina surrounds the crucible. This design is engineered to withstand the extreme 2200ºC operating environment while minimizing heat loss to the external quartz chamber, protecting the structural integrity of the system.
• High-Vacuum and Controlled Atmosphere Capabilities: Equipped with a 156 L/min double-stage rotary vane pump and KF-25 vacuum ports, the system can achieve vacuum levels down to 10E-2 torr (or 10E-5 torr with optional turbo-pumping). Stainless steel flanges with needle valves and an anti-corrosive diaphragm gauge allow for precise atmospheric control using inert gases.
• Robust Safety and Monitoring Protocols: The equipment is outfitted with an automatic pressure relief valve set at 0.02 MPa and a protective shield made of phenolic or polycarbonate sheets. These features, combined with automated sensors for water flow and over-power conditions, mitigate risks during high-temperature operations.
• Integrated Cooling and Gas Management: A 58 L/min recirculating water chiller is included to maintain optimal temperatures within the induction coil and power supply. A compact direct-read flow meter allows for the fine-tuning of gas flow rates between 100-1000 cc/min, supporting precise atmospheric processing.
• Engineered Quartz Processing Chamber: The 130mm O.D. quartz tube provides a clean, non-reactive environment for thermal processing. The hinged top flange simplifies loading and unloading, while the feedthrough for the C-type thermocouple ensures direct and accurate monitoring of the crucible temperature.
• Mobile and Modular Infrastructure: The entire system is mounted on a heavy-duty steel mobile cart, providing a stable 600mm x 800mm workspace. This design facilitates easy relocation within the lab and efficient organization of the vacuum pump, chiller, and heating units.

Applications

Technical Specifications

System Overview: TU-RL05

Why Choose Us

• Engineered for Extreme Thermal Performance: Unlike standard laboratory furnaces, this system is optimized for temperatures up to 2200ºC, utilizing high-frequency induction to achieve rapid thermal cycling that drastically reduces process times.
• Comprehensive Turnkey Solution: This unit is delivered as a complete integrated system, including the induction generator, vacuum pump, water chiller, and all necessary refractory components, ensuring immediate operational readiness upon installation.
• Precision and Repeatability: The combination of a high-accuracy C-type thermocouple and a 30-segment PID controller allows for the precise replication of complex heating curves, critical for consistent metallurgical and semiconductor research.
• Robust Industrial Build Quality: From the stainless steel vacuum flanges to the heavy-duty mobile cart, every component is built for durability in rigorous industrial and academic environments, ensuring a high return on investment and minimal maintenance.
• Safety-First Engineering: Integrated automatic protections for over-temperature and water pressure, coupled with a physical protective shield and pressure relief valves, provide multiple layers of security for high-pressure and high-heat operations.

Our engineering team is ready to assist you in configuring this system for your specific research needs or discussing custom crucible and chamber modifications. Contact us today for a technical consultation or a formal quotation.