Atmosphere Furnace
1200C Atmosphere Controlled Automatic Bottom Loading Furnace with 6 Inch Quartz Tube Dual Zone System
Item Number: TU-DZ14
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Product Overview




This high-performance thermal processing system represents the pinnacle of automated laboratory equipment, specifically engineered for advanced material science and industrial R&D applications. By combining a 1200°C maximum operating temperature with a sophisticated bottom-loading mechanism, the equipment provides a stable and repeatable environment for complex heat treatments. The integration of a large-diameter 6-inch fused quartz tube allows for the processing of bulky samples or high-throughput batches while maintaining the highest standards of purity and atmosphere control. This unit is designed for researchers who require precision without compromising on capacity, offering a versatile platform for both vacuum and controlled gas environments.
Targeted at sectors such as semiconductor manufacturing, aerospace material testing, and advanced ceramics, this system facilitates critical processes including sintering, annealing, and chemical vapor deposition. Its vertical orientation and automated stage minimize the risk of sample contamination and thermal shock, ensuring that delicate substrates are handled with extreme care. The robust architecture is built to withstand the rigors of continuous operation, providing industrial-grade reliability in a format suitable for high-end laboratory settings. Whether used for individual experiments or integrated into a larger automated production line, the system delivers consistent, high-fidelity results that meet the stringent requirements of modern engineering.
Confidence in this equipment is backed by its precision-engineered components and autonomous capabilities. The system is designed for 24/7 operation, utilizing high-quality FeCrAlMo heating elements and advanced PID control to maintain thermal uniformity. By reducing the need for manual intervention, the equipment enhances safety and efficiency, allowing laboratory personnel to focus on data analysis rather than hardware management. This unit is not merely a furnace; it is a comprehensive thermal processing solution designed to accelerate the pace of innovation in material development and industrial process optimization.
Key Features
- Automated Bottom Loading Mechanism: The precision motor-driven stage allows for the smooth, vibration-free movement of samples into the heating zone. This vertical loading configuration is ideal for maintaining thermal symmetry and simplifying the handling of large or heavy crucibles without disturbing the internal atmosphere.
- Dual-Zone Temperature Control: Featuring two independent heating zones totaling 350mm in length, the system offers unparalleled flexibility in creating specific thermal gradients or maintaining a wide, ultra-uniform constant temperature zone of 120mm within ±2°C.
- Integrated Atmosphere Management: Equipped with a 1-1000 sccm Mass Flow Controller (MFC) and stainless steel water-cooled flanges, the unit allows for precise gas delivery and pressure regulation, supporting inert, oxidizing, or reducing atmospheres with ease.
- High-Purity Fused Quartz Chamber: The 150mm OD quartz tube provides a chemically inert environment that resists thermal shock and allows for visual monitoring of the process. Its high transparency is essential for researchers tracking physical changes in materials during heat cycles.
- Autonomous Operation Readiness: The system is fully compatible with PC integration and robotic arm control, enabling 24/7 autonomous operation. This allows for high-throughput screening and long-term stability testing without constant human supervision.
- Advanced Touch-Screen Interface: A user-friendly panel integrates all processing parameters, including heating/cooling rates and dwell times. Operators can program 50-segment profiles and execute complex thermal recipes with a single touch.
- Superior Vacuum Performance: The inclusion of high-quality sealing flanges and optional molecular pump upgrades allows the system to reach vacuum levels as deep as 10⁻⁵ Torr, making it suitable for moisture-sensitive or oxygen-sensitive processes.
- Comprehensive Cooling System: A standard 16L/minute recirculating water chiller is included to protect the silicone O-rings and maintain the integrity of the sealing flanges, ensuring long-term durability of the vacuum seals even during sustained high-temperature runs.
- Hydrogen Safety Upgrades: For specialized metallurgy, the unit can be upgraded with an automatic hydrogen gas burner, leak detector, and delivery unit, transforming it into a high-safety hydrogen-capable furnace.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| Semiconductor Annealing | Precise thermal treatment of silicon or compound semiconductor wafers under controlled gas flows. | Minimizes defects and improves carrier mobility through ultra-stable temperature zones. |
| Technical Ceramic Sintering | High-temperature consolidation of advanced ceramic powders into dense, high-strength components. | Automated loading prevents mechanical shock to fragile green-state parts. |
| Thin Film Deposition | Utilizing the dual-zone configuration for vapor transport or CVD processes on various substrates. | Excellent uniformity across the large 6-inch diameter ensures consistent film thickness. |
| High-Throughput Screening | Running continuous, automated batch cycles for material discovery using robotic integration. | Reduces labor costs and accelerates R&D timelines via 24/7 autonomous operation. |
| Battery Material Synthesis | Calcination and synthesis of cathode/anode materials in specific inert or reactive atmospheres. | Prevents oxidation and ensures chemical purity through high-vacuum and MFC control. |
| Hydrogen Brazing | Joining of specialized metal components in a reducing hydrogen environment to prevent oxidation. | Integrated safety burners and leak detection provide a secure environment for hazardous gases. |
| Crystal Growth | Controlled cooling and temperature gradients for the growth of high-purity single crystals. | Dual-zone PID control allows for the exact thermal slope needed for high-quality crystallization. |
Technical Specifications
| Parameter Category | Specification Details for TU-DZ14 |
|---|---|
| Model Number | TU-DZ14 |
| Power Supply | 220VAC +/- 10%, 50/60Hz, Single-Phase |
| Maximum Power | 6.0 kW Max |
| Max. Working Temp | 1200℃ (≤ 30 minutes duration) |
| Continuous Temp | 1100℃ (Long-term operation) |
| Heating Elements | High-grade FeCrAlMo resistance wire |
| Heating Zone Configuration | Dual Zones: 175mm (Zone 1) + 175mm (Zone 2) |
| Total Heating Length | 350 mm |
| Uniform Temp. Zone | 120 mm (maintained within ±2°C) |
| Heating Rate | Suggested 10°C / minute |
| Control Interface | Integrated Touch Screen Panel with PLC logic |
| Temperature Controllers | Dual 50-segment programmable controllers |
| Accuracy | Standard ±1°C (Optional Eurotherm upgrade to ±0.1°C) |
| Thermocouples | Dual K-Type high-precision probes |
| Remote Connectivity | Default DB9 PC port with included software for remote monitoring |
| Process Tube Dimensions | Fused Quartz: 150 mm OD x 144 mm ID x 600 mm Length |
| Flange Assembly | Water-cooled SS304; Upper: vacuum/gas ports; Lower: Sample stage |
| Gas Handling | 1x Mass Flow Controller (MFC), Range: 1 - 1000 sccm |
| Sample Stage | 130 mm diameter quartz plate (Customizable for high throughput) |
| Cooling System | 16L/min Recirculating Water Chiller included |
| Vacuum Capability | Mechanical: 10⁻² Torr; Molecular (Optional): 10⁻⁵ Torr |
| Certifications | Optional NRTL certified 240 L/m Heavy Duty Vacuum Pump available |
Why Choose Us
- Unmatched Precision and Stability: The dual-zone heating architecture of the system ensures that your samples experience the exact thermal profile required for repeatable material characteristics, backed by high-accuracy K-type sensors and PID logic.
- Scalable Automation: Designed for the future of laboratory work, this equipment transitions seamlessly from manual research to fully autonomous, robotic-assisted operation, significantly increasing your lab's output and ROI.
- Robust Construction for Industrial Use: From the water-cooled SS304 flanges to the heavy-duty quartz chamber, every component is selected for its ability to withstand continuous thermal cycling and demanding chemical environments.
- Flexible Atmosphere Management: Whether your process requires high vacuum, inert gas purging, or reactive hydrogen atmospheres, this unit provides the modularity and safety features to handle diverse experimental needs within a single platform.
- Comprehensive Support and Customization: THERMUNITS provides deep technical expertise to customize sample stages, crucibles, and gas delivery systems, ensuring the equipment arrives ready to integrate into your specific workflow.
Invest in a thermal processing solution that combines industrial power with laboratory precision. Contact our technical sales team today for a detailed quote or to discuss a custom configuration tailored to your specific research requirements.
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