Double Temperature Zone Double Cover Tube Furnace for High Temperature CVD and Vacuum Annealing

Product Overview

This high-performance double temperature zone tube furnace is engineered to meet the rigorous demands of material science research and industrial production. By combining two independent heating zones within a single, streamlined unit, this system provides researchers with the flexibility to create complex thermal gradients or maintain highly stable temperature profiles over an extended heating length. The dual-cover design enhances accessibility while optimizing thermal management, making the equipment an essential tool for sophisticated heat treatments where precision and consistency are paramount.

Designed for versatility, the equipment excels in high-temperature sintering, reducing atmosphere processes, and chemical vapor deposition (CVD). It is widely utilized across aerospace, semiconductor, and advanced ceramics industries to perform vacuum annealing and controlled atmosphere tests. The robust construction and integrated safety features ensure that the unit operates reliably under continuous-duty conditions, providing laboratory personnel with the confidence to conduct long-duration experiments without oversight.

Built with a focus on durability and performance, this system incorporates premium heating elements and advanced insulation materials. The integration of high-grade resistance wires and vacuum-formed alumina fiber ensures rapid heating rates and exceptional energy efficiency. Whether for basic research in universities or high-stakes material development in industrial labs, this equipment delivers the thermal stability and atmospheric control required for the most sensitive technical processes.

Key Features

• Premium Swedish Kanthal A1 Heating Elements: The unit utilizes imported Kanthal A1 resistance wire, capable of reaching surface temperatures up to 1420°C. These elements are chosen for their balanced resistance and slag-free operation, ensuring a clean thermal environment and a service life that significantly outlasts standard alloy wires.
• Advanced Dual-Zone Control: Featuring two independent temperature zones, the system allows for the creation of precise thermal gradients. This is critical for processes like physical vapor transport or complex CVD applications where precursor vaporization and substrate deposition require distinct, simultaneous temperatures.
• High-Purity Alumina Fiber Chamber: The furnace chamber is constructed using high-quality polycrystalline alumina fiber, formed through vacuum suction and filter molding based on advanced Japanese technology. This results in a low thermal mass, high insulation efficiency, and superior resistance to thermal shock.
• Sophisticated PID Temperature Regulation: Equipped with a 30-segment intelligent PID controller, the system maintains a control precision of ±1°C. It features over-temperature protection, thermocouple failure alerts, and a power-off recovery function that resumes the program from the point of interruption.
• Double-Shell Forced Air Cooling: To ensure operator safety and structural longevity, the furnace features a double-shell construction. An integrated cooling fan circulates air between the inner and outer layers, maintaining an external surface temperature of less than 45°C even during maximum temperature operation.
• Comprehensive Safety Interlocks: The unit includes an automatic open-cover protection system. If the furnace lid is opened during operation, a relay immediately disconnects the main power supply to protect the user from electrical hazards and high-temperature exposure.
• Digital Communication and Monitoring: Standard RS485 interfaces allow the equipment to connect directly to a computer. Users can control parameters, view real-time PV (Process Value) and SV (Set Value) curves, and log temperature data for historical analysis and quality assurance reporting.
• Vacuum and Atmosphere Versatility: The equipment is designed to interface with various gas supply and vacuum systems. From simple inert gas purging to high-vacuum environments reaching 10-3 Pa, the system accommodates diverse atmospheric requirements for sensitive material processing.

Applications

Technical Specifications

Why Choose This Furnace

• Unmatched Thermal Engineering: By utilizing Swedish Kanthal A1 wire and Japanese-inspired chamber geometry, this system offers thermal stability that is significantly superior to standard laboratory furnaces. The balanced resistance ensures a uniform temperature field, which is critical for high-fidelity research.
• Proven Long-Term Reliability: The choice of high-quality components, such as Semikron thyristors and vacuum-suctioned alumina fiber, ensures that the unit can withstand the stresses of high-temperature operation over many years of service.
• Versatile Expansion Options: This equipment can be customized with various vacuum systems (from single-stage pumps to high-vacuum molecular units) and gas supply systems (mass flow meters, bubblers, or evaporators) to meet specific process requirements.
• Enhanced Operator Safety: With integrated leakage protectors, open-cover power cut-offs, and double-shell cooling, this system meets the highest safety standards required for modern industrial and academic laboratories.
• Data-Driven Control: The ability to monitor and control the furnace via computer, combined with detailed curve drawing and data storage, provides the documentation necessary for strictly controlled R&D and quality audit environments.

This system represents a premium investment in thermal processing technology, combining precision, safety, and durability to support your most critical research and production goals. Contact us today for a technical consultation or a customized quote for your specific laboratory requirements.