Tube Furnace
1200C Dual Zone Split Tube Furnace with Fused Quartz Tube and Vacuum Flanges Available in 60mm 80mm and 100mm Diameters
Item Number: TU-30
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Product Overview




This high-performance split-tube thermal processing system represents a pinnacle of engineering for material science and industrial R&D laboratories. By integrating a dual-zone heating configuration with a split-hinge chassis, the equipment allows researchers to achieve rapid heating rates up to 1200°C while maintaining the flexibility to create precise thermal gradients. The primary value proposition of this unit lies in its ability to manage independent temperature profiles across two distinct zones, which is critical for complex chemical vapor deposition (CVD) processes and high-purity material synthesis. Whether used for the growth of nanowires or the calcination of advanced ceramics, this system delivers the stability and control required for repeatable scientific results.
The equipment is specifically engineered for versatile applications in semiconductor research, metallurgy, and nanotechnology. By utilizing a high-purity fused quartz process tube and a sophisticated vacuum sealing assembly, the system provides a pristine environment for heat treatment under controlled atmospheres or vacuum conditions. The target audience includes academic researchers and industrial engineers who demand a reliable, easy-to-load furnace that does not compromise on thermal uniformity. The industrial-grade build quality ensures that this unit can operate continuously at 1100°C, making it a dependable workhorse for demanding laboratory environments where uptime and precision are paramount.
Confidence in this system is backed by advanced microprocessor-based control systems and a robust structural design. The combination of dual-layer steel casing and high-purity fibrous alumina insulation ensures that energy efficiency is maximized while the exterior surface remains safe to touch. Every component, from the Fe-Cr-Al alloy heating elements doped with Molybdenum to the precision-machined stainless steel flanges, is selected for its ability to withstand the rigors of high-temperature cycling. This unit is not merely a furnace but a comprehensive thermal solution designed to support the next generation of material breakthroughs with consistent, high-precision performance.
Key Features
- Dual-Zone Independent Temperature Control: The system features two independently controlled heating zones, each equipped with its own dedicated thermocouple and PID controller. This allows for the creation of steep thermal gradients or an extended constant temperature zone by synchronizing the setpoints, providing unmatched flexibility for CVD and vapor phase transport experiments.
- Precision Microprocessor-Based PID Regulation: Two digital controllers manage the heating process with 30 programmable segments each. This allows for meticulous control over heating rates, cooling rates, and dwell times, utilizing a self-tuning function to prevent temperature overshooting and ensure a stability of ±1°C.
- Optimized Split-Chassis Engineering: The furnace body is designed with a hinged split-opening mechanism, allowing for rapid access to the quartz tube and sample area. This design facilitates easy tube installation, sample loading, and faster cooling periods compared to traditional solid-body tube furnaces.
- Advanced Vacuum Sealing Assembly: Each unit comes standard with a pair of 304 stainless steel vacuum flanges featuring double high-temperature silicone O-rings. The assembly includes a needle valve, pressure gauge, and KF25 port, capable of reaching vacuum levels of 10^-2 torr with mechanical pumps and 10^-5 torr with molecular systems.
- High-Efficiency Thermal Insulation: Utilizing energy-saving high-purity fibrous alumina liners and a specialized Al2O3 coating, the equipment minimizes heat loss and extends the service life of the internal components. This insulation ensures rapid ramp-up times and superior thermal retention during long dwell cycles.
- Enhanced Safety and Cooling Systems: A double-layer steel case design integrates two high-velocity cooling fans to maintain low surface temperatures. Integrated safety protocols include over-temperature protection, thermocouple break protection, and audible alarms for unattended operation.
- Versatile Process Tube Options: The system supports fused quartz tubes in 60mm, 80mm, or 100mm outside diameters. This versatility allows labs to scale their throughput or accommodate different sample sizes without needing to invest in entirely separate furnace systems.
- High-Performance Heating Elements: The heating elements are constructed from a specialized Fe-Cr-Al alloy doped with Mo, specifically chosen for their resistance to oxidation and their ability to maintain mechanical integrity at temperatures approaching 1200°C.
- Digital Connectivity and Data Logging: An RS485 communication port is standard, enabling the system to be operated via PC. With optional software modules, users can edit profiles, record real-time data, and manage heat-treatment recipes remotely for better audit trails and research documentation.
- Robust Atmosphere Control: The inclusion of ceramic thermal blocks and high-quality sealing components allows the furnace to operate under vacuum or low-pressure (<0.2 bar) inert gas environments, such as Nitrogen or Argon, ensuring high-purity processing.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| CVD Nanomaterial Synthesis | Preparation of carbon nanotubes, graphene, and other 2D materials via chemical vapor deposition. | Precise thermal gradient control for efficient precursor transport and deposition. |
| Semiconductor Annealing | Heat treatment of silicon wafers and compound semiconductor materials to modify electrical properties. | Highly uniform temperature distribution and rapid cooling capability. |
| Thin Film Deposition | Growing high-purity thin films through vapor phase transport or evaporation techniques. | Controlled vacuum environment prevents oxidation and contamination during growth. |
| Ceramic Sintering | High-temperature processing of technical ceramics and piezoelectric materials to achieve density. | Programmable ramp/soak segments allow for specific sintering profiles to prevent cracking. |
| Thermal Gradient Testing | Subjecting material samples to temperature differences to observe phase changes or stability. | Dual-zone independent control allows for repeatable and stable thermal gradients. |
| Calcination Processes | Thermal decomposition of materials to remove volatile components or induce chemical changes. | Excellent atmosphere control and energy-efficient operation for long dwell times. |
| Metallurgy R&D | Testing of alloy samples under various thermal conditions to study grain growth and mechanical properties. | Robust heating elements and durable quartz tubes withstand aggressive cycling. |
| Battery Material Research | Synthesis and testing of anode/cathode materials for lithium-ion and solid-state batteries. | High purity alumina lining ensures no metallic contamination during thermal processing. |
Technical Specifications
| Feature | TU-30-60 | TU-30-80 | TU-30-100 |
|---|---|---|---|
| Max. Temperature | 1200°C (< 1 hr) | 1200°C (< 1 hr) | 1200°C (< 1 hr) |
| Continuous Working Temp. | 100°C ~ 1100°C | 100°C ~ 1100°C | 100°C ~ 1100°C |
| Heating Zone Length | Dual: 196mm/zone (Total 432mm) | Dual: 196mm/zone (Total 432mm) | Dual: 196mm/zone (Total 432mm) |
| Constant Temp. Zone | 150mm (±1°C) per zone | 150mm (±1°C) per zone | 150mm (±1°C) per zone |
| Quartz Tube Dimensions | 60mm O.D. x 1000mm L | 80mm O.D. x 1000mm L | 100mm O.D. x 1000mm L |
| Max. Heating Rate | ≤ 20°C / min | ≤ 20°C / min | ≤ 20°C / min |
| Temperature Accuracy | ±1°C | ±1°C | ±1°C |
| Heating Elements | Fe-Cr-Al Alloy doped by Mo | Fe-Cr-Al Alloy doped by Mo | Fe-Cr-Al Alloy doped by Mo |
| Power | 3 KW | 3 KW | 3 KW |
| Voltage | AC 208-240V, Single Phase | AC 208-240V, Single Phase | AC 208-240V, Single Phase |
| Flange Type | SS 304 Vacuum Flange (60mm) | SS 304 Vacuum Flange (80mm) | SS 304 Vacuum Flange (100mm) |
| Vacuum Level | 10^-2 torr (Mech) / 10^-5 (Mol) | 10^-2 torr (Mech) / 10^-5 (Mol) | 10^-2 torr (Mech) / 10^-5 (Mol) |
| Thermocouple | Two K-type (TCK8S3B) | Two K-type (TCK8S3B) | Two K-type (TCK8S3B) |
| Temperature Controller | Dual 30-segment programmable | Dual 30-segment programmable | Dual 30-segment programmable |
| Compliance | CE Certified | CE Certified | CE Certified |
| Dimensions (LxWxH) | Standard Benchtop | Standard Benchtop | Standard Benchtop |
Why Choose 1200C Dual Zone Split Tube Furnace
- Proven Long-Term Reliability: Built with premium components like Mo-doped alloy heating elements and high-purity fibrous alumina, this system is designed for years of consistent use in rigorous R&D environments.
- Superior Thermal Precision: The dual-zone configuration allows for highly specific thermal profiling, providing researchers with the exact conditions required for sensitive material synthesis and CVD processes.
- Precision Manufacturing: From the vacuum-sealed stainless steel flanges to the microprocessor-based PID control, every aspect of this furnace is manufactured to exacting industrial standards for maximum operational consistency.
- Flexible and Scalable Design: With multiple tube diameter options and a split-opening chassis, this equipment adapts to varying project requirements, making it a versatile and future-proof investment for any laboratory.
- Comprehensive Safety Compliance: Featuring CE certification and optional NRTL/CSA upgrades, our systems prioritize operator safety through advanced cooling architectures and integrated fault protection mechanisms.
Our technical team is ready to assist you in selecting the ideal configuration or designing a custom solution for your specific thermal processing needs. Contact us today for a detailed quote or to discuss your application requirements with our engineering specialists.
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