1600°C Cold Wall High Vacuum Chamber Furnace with Molybdenum Heating and 400mm Cube Work Zone

Vacuum Furnace

1600°C Cold Wall High Vacuum Chamber Furnace with Molybdenum Heating and 400mm Cube Work Zone

Item Number: TU-ZK04

Maximum Temperature: 1600°C Ultimate Vacuum: <1e-6 Torr Heating Zone Volume: 64 Liters (400x400x400mm)
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Product Overview

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This high-performance thermal processing system is engineered for the most demanding research and industrial applications where a contamination-free, ultra-clean environment is paramount. By utilizing a water-cooled cold-wall design, the equipment maintains a low exterior temperature even while the internal hot zone reaches sustained temperatures of up to 1600°C. The system is specifically optimized for high-vacuum heat treatment of small to medium-sized samples, providing an ideal platform for materials that are sensitive to oxidation or interstitial contamination. Its robust architecture ensures that the vacuum integrity is maintained throughout the entire thermal cycle, making it an indispensable tool for advanced material science and high-end manufacturing.

Primarily utilized in metallurgy, semiconductor development, and advanced ceramics, the unit serves as a versatile workhorse for processes such as degassing, vacuum brazing, and sintering. The large 64-liter effective heating volume provides ample space for complex geometries or batch processing of specialized components. Whether employed in corporate R&D laboratories or specialized industrial production lines, this system delivers the precision required for high-entropy silicides development and other sophisticated material synthesis protocols. Its design focuses on the critical balance between thermal power and vacuum stability, ensuring that every cycle meets the stringent requirements of high-tech industries.

Built with premium industrial-grade components, this system offers unparalleled reliability and performance under continuous operating conditions. The combination of an electropolished 304 stainless steel vacuum chamber and an all-metal hot zone ensures that no outgassing from insulation fibers occurs, which is essential for maintaining an ultimate vacuum of less than 1e-6 torr. B2B buyers can rely on this equipment for consistent repeatability, knowing that the structural integrity of the water-cooled jacket and the precision of the all-metal thermal reflection sheaths will protect the system and the surrounding environment while delivering the thermal uniformity necessary for complex phase transformations.

Key Features

  • Cold-Wall Vacuum Technology: The chamber is constructed from electropolished 304 stainless steel with a dedicated water-cooled jacket, ensuring that the exterior remains safe to touch and dimensionally stable while the internal temperature reaches extreme levels.
  • All-Metal Thermal Insulation: Utilizing a 6-layer metallic reflection sheath system rather than ceramic fiber insulation, this unit eliminates the risk of fiber-based contamination and significantly reduces outgassing, which is critical for achieving and maintaining ultra-high vacuum levels.
  • Advanced Molybdenum Heating Elements: The heating system features high-purity molybdenum coils designed specifically for vacuum environments. These elements provide rapid thermal response and long-term durability at temperatures up to 1600°C.
  • Ultra-High Vacuum Performance: Equipped with a standard DN100CF port and compatible with high-capacity turbomolecular pumps, the system can achieve an ultimate vacuum level of better than 1e-6 torr, providing a pristine atmosphere for sensitive materials.
  • Precision Eurotherm Control: The system integrates a Eurotherm EPC 3000 series controller, offering 28-segment programmable profiles and PID automatic control loops for exceptional temperature accuracy of ±1°C.
  • Multi-Gas Atmosphere Flexibility: While optimized for vacuum, the furnace is fully compatible with inert and reducing gases such as Argon (Ar), Nitrogen (N2), and Hydrogen (H2), allowing for diverse atmospheric processing within a single system.
  • Optimized Thermal Uniformity: The internal molybdenum sample stage and carefully positioned heating coils achieve a temperature uniformity of ±8°C, ensuring that large batch loads or complex components undergo even thermal distribution.
  • Robust Load-Lock Door: The water-cooled front door features high-integrity sealing and specialized cooling to prevent O-ring degradation, ensuring a reliable vacuum seal over hundreds of cycles.

Applications

Application Description Key Benefit
High-Entropy Silicides Phase transformation and homogenization of advanced silicide compounds at 1600°C. Prevents oxidative decomposition and ensures single-phase tetragonal structures.
Refractory Metal Sintering Consolidation of molybdenum, tungsten, or niobium powders into dense components. Achieves high density without atmospheric contamination or oxidation.
Vacuum Brazing Joining of specialized metal components using high-temperature filler metals in a flux-free environment. Produces clean, oxide-free joints with superior mechanical strength.
Stress Relieving Post-processing of 3D-printed or machined components to eliminate internal stresses. Prevents cracking and warping while maintaining surface finish integrity.
Semiconductor Annealing High-temperature treatment of wafers or substrate materials to repair crystal defects. Provides an ultra-clean environment that prevents dopant migration or contamination.
Ceramic Co-Firing Sintering of advanced technical ceramics that require precisely controlled vacuum levels. Maintains the stoichiometry of the material by preventing atmospheric reactions.
Diffusion Bonding Joining of similar or dissimilar materials through solid-state diffusion under heat and vacuum. Creates seamless, high-strength bonds without the need for additional adhesives or fillers.

Technical Specifications

Feature Specification Details (Model: TU-QF17)
Power Supply 460 VAC, 3-phase, 50/60Hz
Total Power Rating 100 kW
Effective Heating Zone L 400 x W 400 x Depth 400 mm (64 Liters)
Maximum Working Temperature 1600°C
Temperature Accuracy ±1°C
Temperature Uniformity ±8°C
Maximum Heating Rate <10°C/min
Vacuum Chamber Material Electropolished water-cooled Stainless Steel 304
Thermal Insulation 6-layer all-metal thermal reflection sheaths
Heating Elements Molybdenum heating coils
Sample Stage Molybdenum construction
Ultimate Vacuum Level <1.0e-6 Torr (using 300L/s turbopump)
Maximum Working Pressure <1.5 bar
Temperature Controller Eurotherm EPC 3000 series (PID, 28-segment)
Thermocouple Type Type B
Communication Ports RS485, MODBUS RTU for remote monitoring
Vacuum Ports DN100CF (Generation), DN40KF (Ionization), DN16KF (Convection)
Gas Inlet/Outlet Two 1/4" bellow-sealed needle valves (VCR)
Standard Compliance CE Certified (NRTL/CSA available upon request)
Optional Vacuum Gauges InstruTech IGM402 hot cathode ion gauge & convection gauge
Optional Water Chiller 3.5KW cooling capacity, 40L tank, 75L/min flow rate
Optional Pump Options 260L/s Turbomolecular pump, Dry scroll or Rotary vane backing pumps

Why Choose Us

  • Superior Vacuum Integrity: Our all-metal hot zone and electropolished chamber surfaces are designed to minimize outgassing, allowing your processes to reach ultra-high vacuum levels faster and more reliably than traditional ceramic-lined systems.
  • Precision Engineering: By utilizing the Eurotherm EPC 3000 series controller and Type B thermocouples, this unit provides the exact thermal control required for sensitive material science research, ensuring repeatable results across every batch.
  • Industrial Durability: The combination of water-cooled stainless steel and high-purity molybdenum ensures that the structural integrity of the furnace is maintained for years, even when operating at the maximum rated temperature of 1600°C.
  • Scalable and Customizable: From the selection of vacuum pumps (turbomolecular vs. dry scroll) to the addition of high-capacity water chillers, this system can be tailored to meet specific laboratory or industrial throughput requirements.
  • Comprehensive Compliance: Every unit is CE certified and can be upgraded to NRTL or CSA standards, providing procurement teams with the confidence that the equipment meets international safety and quality benchmarks.

Our technical team is ready to assist you in configuring the ideal thermal solution for your specific application requirements. Contact us today for a detailed technical consultation or to request a formal quotation.

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