High Temperature 1700C Tube Furnace with High Vacuum Turbomolecular Pump System and Multi Channel Mass Flow Controller Gas Mixer

Product Overview

This high-performance thermal processing system is engineered for advanced material science and industrial research applications requiring extreme temperatures and ultra-pure atmospheric conditions. By integrating a 1700C alumina tube furnace with a high-performance turbomolecular vacuum station and a precision mass flow gas delivery module, the equipment provides a turnkey solution for complex chemical vapor deposition (CVD), diffusion, and sintering processes. The robust design ensures that researchers can achieve highly repeatable results while maintaining the integrity of sensitive specimens under a vacuum level as deep as 10^-5 Torr.

Targeted at semiconductor manufacturing, aerospace development, and advanced ceramics engineering, this unit bridges the gap between laboratory experimentation and pilot-scale production. Its versatile architecture allows for the precise control of multiple gas species, making it an essential tool for creating thin films, nanowires, and complex 2D materials. The entire assembly is mounted on a mobile heavy-duty cart, allowing for easy relocation and seamless integration into existing cleanrooms or laboratory workspaces without the need for complex permanent installations.

Reliability is at the core of this furnace's design. Utilizing premium molybdenum disilicide (MoSi2) heating elements and a high-purity alumina refractory chamber, the system is built to withstand the rigorous thermal cycling required for industrial R&D. The inclusion of a double-layer steel casing with integrated fan cooling ensures that external surface temperatures remain safe for operators even during high-temperature operations. This emphasis on safety, combined with high-precision PID control and German-engineered vacuum components, provides the long-term operational consistency that professional procurement teams and principal investigators demand.

Key Features

• Exceptional Thermal Range: This system achieves a maximum heating temperature of 1650°C with a continuous working temperature of 1600°C, powered by eight high-grade MoSi2 heating elements specifically positioned for optimal thermal uniformity.
• Ultra-High Vacuum Integration: Equipped with a genuine Pfeiffer turbomolecular pump, the system reaches an ultimate pressure of <1E-7 mbar, facilitating an oxygen-free environment critical for high-purity material synthesis and contamination-sensitive processes.
• Precision Mass Flow Control: The integrated gas mixing station features 2 to 4 channels of digital mass flow controllers (MFC), allowing for the exact delivery of process gases such as Nitrogen, Helium, or Hydrogen with high repeatability and digital touchscreen oversight.
• Advanced PID Control Logic: The temperature controller utilizes a current-limiting phase angle fired resistor system with 30 programmable segments, maintaining an accuracy of ±1°C across the entire heating ramp.
• Robust Chamber Engineering: The furnace utilizes a 60mm O.D. high-purity alumina processing tube and a high-purity alumina refractory chamber to minimize thermal loss and prevent chemical cross-contamination during high-heat cycles.
• Intelligent Vacuum Management: The high vacuum station features a one-button operation for the diaphragm and turbopump, with system-controlled spinning speeds that automatically adjust based on the vacuum level and leak rates.
• Enhanced Safety Protocols: A built-in self-protection mechanism monitors for overheating and over-current conditions, automatically slowing or stopping the turbine if leak rates exceed safe operating thresholds to prevent pump damage.
• Flexible Interface Options: The system includes an RS485 communication port and is compatible with advanced software kits for PC remote control, LabVIEW integration, and comprehensive data logging for quality assurance audits.

Applications

Technical Specifications

Core Furnace Specifications (TU-83)

High Vacuum Station Specifications

Mass Flow Gas Control (MFC) System

Why Choose This High Temperature System

This integrated solution represents a significant investment in laboratory capability, offering a level of precision and reliability that standalone components cannot match. By housing the furnace, vacuum station, and gas mixing unit in a single, engineered mobile platform, the system eliminates the complex troubleshooting often associated with multi-vendor setups. The use of premium components, such as the German Pfeiffer turbomolecular pump and high-grade MoSi2 elements, ensures that the system maintains operational consistency over years of heavy use in industrial R&D environments.

Furthermore, the system is designed with scalability and customization in mind. Whether you require additional gas channels for complex multi-precursor CVD or upgraded temperature controllers from Eurotherm for LabVIEW compatibility, this architecture adapts to your specific research requirements. The CE-certified design and the option for NRTL/UL/CSA certification provide procurement teams with the confidence that this equipment meets the highest international safety and quality standards. This is not just a furnace, but a complete thermal processing environment designed for the most demanding material science challenges.

Please contact our technical sales team today for a detailed quote or to discuss a customized configuration tailored to your specific research requirements.