Vacuum Furnace
Vertical Vacuum Furnace 1100C High Temperature 8 Inch Quartz Chamber Water Cold Flange System
Item Number: TU-QF02
Shipping: Contact us to get shipping details Enjoy On-time Dispatch Guarantee.
Product Overview
This high-temperature vertical vacuum-sealed system represents the pinnacle of thermal processing for material science and semiconductor research. Engineered to facilitate precise annealing and calcination processes, this unit features a specialized vertical orientation that optimizes space while providing a uniform thermal environment for larger substrates. The equipment is built around a heavy-duty quartz chamber capable of reaching operating temperatures up to 1100°C under ambient pressure, making it an essential tool for laboratories focused on high-purity material development and advanced electronic components.
The system is specifically designed to accommodate semiconductor wafers up to 8 inches in diameter, offering a versatile platform for both vacuum-environment processing and controlled gas atmosphere experiments. By integrating a sophisticated stainless steel sealing flange with integrated water cooling, the system maintains structural integrity and seal longevity even during prolonged high-heat cycles. This equipment is the preferred choice for industrial R&D centers and academic institutions requiring a reliable, repeatable, and high-capacity thermal processing solution for delicate substrates.
Built for reliability under demanding industrial conditions, this thermal processing unit utilizes high-quality resistance wire and advanced refractory materials to ensure consistent performance. Every component, from the NRTL-certified digital controller to the dual-silicone O-ring sealing mechanism, is selected to provide procurement teams and lead engineers with confidence in the system’s long-term operational stability. This unit delivers the robustness required for 24/7 research environments where precision and uptime are critical metrics for success.
Key Features
- High-Capacity Quartz Chamber: The system features a large-diameter GE214 quartz tube with an 8-inch outer diameter, specifically dimensioned to process semiconductor wafers and large-batch material samples with unparalleled clarity and purity.
- Advanced Water-Cooled Sealing Flange: A built-in water-cooling jacket protects the vacuum sealing assembly from thermal degradation, allowing the stainless steel flange to maintain a hermetic seal at temperatures exceeding 1100°C without melting the silicone O-rings.
- Precision PID Temperature Control: The NRTL-certified digital controller offers 30 programmable segments for ramping, cooling, and dwelling, ensuring ±1°C accuracy for sensitive thermal profiles required in semiconductor fabrication.
- Superior Vacuum Performance: Engineered to work seamlessly with high-vacuum pump stations, this unit can achieve vacuum levels as deep as 10^-5 Torr when utilizing a turbopump, essential for oxygen-sensitive calcining and annealing tasks.
- Robust Heating Element Design: Utilizing high-grade Ni-Cr-Al resistance wire, the system provides rapid heating rates up to 20°C per minute while maintaining excellent durability across repetitive thermal cycles.
- Integrated Safety and Alarms: The equipment includes built-in over-temperature and thermocouple failure alarms, providing automated protection for both the furnace and the valuable materials being processed inside.
- Flexible Atmosphere Management: Equipped with high-precision needle valves and multiple gas inlet/outlet ports, the system allows for the precise introduction of inert or reactive gases during the heating process.
- Scalable Monitoring Options: The unit includes a mechanical vacuum gauge as standard, with options for gas-independent digital vacuum gauges and PC communication ports for real-time data logging and remote monitoring.
- Heavy-Loading Capability: Designed to support up to 40kg of material weight, the vertical chamber architecture is reinforced to handle industrial-grade sample loads without compromising structural integrity.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| Semiconductor Wafer Annealing | Processing of wafers up to 8 inches to repair lattice damage after ion implantation. | Precise ±1°C control ensures uniform electrical characteristics across the wafer surface. |
| Aerospace Material Calcining | High-temperature oxidation and calcination of ceramic matrix composites under vacuum. | Maintains high purity via oxygen-free environments, preventing contamination of critical alloys. |
| Thin Film Deposition Research | Preparation of substrates and post-deposition heat treatment for advanced solar cells. | Large 190mm ID chamber accommodates multiple substrates simultaneously for high-throughput testing. |
| Solid-State Battery R&D | Sintering of ceramic electrolytes and anode materials in controlled gas atmospheres. | Reliable gas inlet/outlet systems allow for exact chemical composition control during sintering. |
| Electronic Component Aging | Stress testing of sensors and high-power electronic modules under extreme thermal conditions. | Vertical orientation allows for specialized jigging and fixture setups that minimize component deformation. |
| Vacuum Degassing | Removal of trapped gases from specialty glasses or metal powders prior to casting. | High vacuum capability (10^-5 Torr) ensures complete removal of volatiles for superior material density. |
Technical Specifications
| Specification | Details for TU-QF02 |
|---|---|
| Voltage | Single-phase 208 - 240 VAC / 50/60Hz |
| Maximum Power | 3 KW (25 A breaker installed) |
| Max. Working Temperature (Ambient) | < 1100°C |
| Max. Working Temperature (Vacuum) | < 1000°C |
| Optional Max Temperature | 1150°C (with upgraded GE214 quartz tube) |
| Heating Rate | Recommended: 10°C/ min; Max: < 20°C/ min |
| Heating Elements | Ni-Cr-Al resistance wire |
| Quartz Tube Dimensions | Ø200 × Ø190 × H425 mm |
| Maximum Loading Capacity | 40 Kg |
| Effective Heating Area | Ø240 × H245 mm |
| Flange Assembly | Stainless steel with dual high-temperature silicone O-rings and water cooling jacket |
| Gas Management | One 1/4" gas inlet and one outlet with needle valves |
| Vacuum Port | Built-in KF25 port for pump connection |
| Vacuum Level (Mechanical Pump) | 10^-2 Torr within 30 minutes (without thermal block) |
| Vacuum Level (Turbopump) | 10^-5 Torr within 30 minutes (at 900°C with Quartz Thermal Block) |
| Temperature Controller | 30-segment PID digital controller, NRTL-certified |
| Temperature Accuracy | ± 1 ºC (Standard); ± 0.1 ºC (Eurotherm Option) |
| Vacuum Gauge | Mechanical Gauge (-0.1 to 0.15 Mpa); Digital Pressure Gauge optional |
| Standards Compliance | CE Certified (NRTL/CSA available on request) |
| Cooling Requirement | 16 L/min water flow for flange protection |
| Communication | Default DB9 PC communication port included |
Why Choose TU-QF02
- Precision Engineered for Scale: Unlike standard laboratory furnaces, this system provides a massive 8-inch diameter processing zone, enabling direct transition from small-sample R&D to pilot-scale production without changing thermal parameters.
- Superior Thermal Management: The integration of a water-cooled flange system ensures that even at maximum temperatures, the sealing integrity remains uncompromised, extending the life of consumables and reducing maintenance costs significantly.
- Adaptable Vacuum Architecture: Whether you require basic mechanical vacuum levels or ultra-high vacuum environments via turbomolecular pumps, the system's flexible KF25 interface and high-grade stainless steel valves support your specific process needs.
- Certified Safety and Reliability: With NRTL-certified controllers and CE compliance, this equipment meets the stringent safety and quality standards required by modern industrial manufacturing and high-stakes research facilities.
- Customizable Control Options: From Eurotherm high-precision controllers to digital gas mixing stations, we provide the hardware modularity necessary to tailor the system to specialized material processing protocols.
Our technical team is ready to assist you with a custom configuration or a formal quotation for your facility. Contact us now to discuss how this vertical vacuum system can enhance your thermal processing capabilities.
REQUEST A QUOTE
Our professional team will reply to you within one business day. Please feel free to contact us!
Related Products
High Temperature 1100C Compact Top Loading Vertical Vacuum Tube Furnace for High Vacuum Noble Metal Melting and Material Research
This 1100C compact top-loading vertical vacuum tube furnace provides high-vacuum environments for noble metal melting and material research. It features precise PID control and heavy-duty heating elements for reliable, consistent performance in demanding laboratory R&D and industrial thermal applications.
Vertical 1700C Vacuum and Atmosphere Tube Furnace with 80mm Alumina Tube
This high-precision vertical tube furnace delivers exceptional thermal uniformity up to 1700C for material synthesis. Featuring an 80mm alumina tube and advanced vacuum sealing flanges, it provides a stable atmosphere for demanding industrial R&D and specialized heat treatment processes.
500C Vacuum Vertical Tube Furnace 84mm OD Sample Rotation Lifting System
This superior vacuum vertical tube furnace features high temperature capabilities and an 84mm OD mullite tube with sample rotation and manual lifting systems to ensure uniform sintering for advanced material research and industrial heat treatment processes. Engineering excellence delivers reliability.
High Temperature Vertical Atmosphere Controlled Furnace 1700C Automatic Bottom Loading 13 Liter Vacuum Thermal System
Achieve superior thermal processing with this 1700°C vertical atmosphere furnace featuring automatic bottom loading, precise Eurotherm controls, and high vacuum capabilities for advanced material research and demanding industrial R&D applications today delivering exceptional results always.
Three Zone Heating Split Vertical Tube Furnace 1700 High Temperature Vacuum Atmosphere Thermal Process System
Advanced 1700°C three zone heating split vertical tube furnace for industrial R&D and material science applications. This precision system features independent thermal control, high vacuum capabilities, and energy efficient insulation for consistent high temperature processing and rapid sample quenching results.
Compact Vertical Split Quartz Tube Furnace with Stainless Steel Vacuum Flanges for Rapid Thermal Quenching and Controlled Atmosphere Material Processing
Engineered for high-precision research, this compact vertical split quartz tube furnace provides rapid heating up to 1100°C. Featuring stainless steel vacuum flanges and 30-segment programmable control, it is the essential tool for material science and industrial quenching applications. Reliable performance.
Vertical Openable Tube Furnace 0-1700c High Temperature Laboratory System for CVD and Vacuum Heat Treatment
Engineered for advanced material research, this 1700c vertical openable tube furnace features precise three-zone heating and rapid quenching capabilities. Ideal for CVD processes and vacuum annealing, it provides industrial-grade reliability, atmospheric control, and modular flexibility for demanding R&D environments.
Large Vertical Three Zone Tube Furnace with 8 Inch or 11 Inch Quartz Tube and High Vacuum Flanges 1200C
Our engineered high-capacity vertical three-zone furnace offers independent thermal control and massive 11-inch quartz tube compatibility to deliver superior uniformity plus enhanced vacuum integrity for critical industrial annealing sintering research and advanced material science development within demanding laboratory environments
Split Vertical Tube Furnace with 1200C Quartz Tube and Stainless Steel Vacuum Flanges for Rapid Thermal Processing
Maximize research efficiency with this 1200°C split vertical tube furnace featuring a 5-inch quartz tube and precision PID control for rapid quenching, vacuum processing, and advanced material synthesis in high-demand industrial laboratory environments.
1100°C Split Vertical Tube Furnace with 80mm Quartz Tube and Stainless Steel Vacuum Flanges
This high-performance 1100°C split vertical tube furnace features an 80mm quartz tube, stainless steel vacuum flanges, and precise 30-segment PID control. Engineered for material R&D, rapid quenching, and atmosphere-controlled thermal processing in professional industrial laboratories.
1200°C 5 Inch Vertical Quartz Tube Furnace with Stainless Steel Vacuum Flanges
High-performance 1200°C vertical quartz tube furnace featuring a 5-inch diameter chamber and stainless steel vacuum flanges. Precision 30-segment PID control ensures accurate thermal processing for material science R&D, CVD, and specialized quenching applications under controlled atmospheres.
Five Zone Split Vertical Tube Furnace 1200C Max with 4 Inch Quartz Tube and Stainless Steel Vacuum Flanges
This high-performance 1200C five zone split vertical tube furnace features five independent heating zones and a four inch quartz tube, providing exceptional temperature uniformity and rapid quenching capabilities for advanced material research and industrial thermal processing.
High Temperature 1700C Vertical Tube Furnace for Powder Spherification and Material Sintering
This 1700C vertical tube furnace system optimizes powder spherification for battery electrodes and 3D printing. Featuring an automatic feeder and dual-zone control, the unit ensures high-purity processing under vacuum or controlled atmospheres for superior industrial material research applications.
High Temperature Vertical Atmosphere Controlled Furnace with Automatic Bottom Loading and 1700°C Capacity for Advanced Material Research
Advanced 1700°C vertical atmosphere furnace featuring automatic motorized bottom loading and vacuum capability. Engineered for precision sintering and annealing, this high-purity system includes water-cooled chambers and Eurotherm PID control for demanding industrial research and development.
1200C Three Zone Split Vertical Tube Furnace 4 Inch Quartz Tube Stainless Steel Vacuum Flanges
This 1200C three zone split vertical tube furnace features a 4 inch quartz tube and stainless steel vacuum flanges for high-precision thermal processing. Perfect for material quenching and synthesis, this robust system ensures uniform heating and rapid sample loading access.
1100C High Temperature Vacuum Crucible Furnace with Quartz Chamber for Thermal Processing and Sintering
This 1100C vacuum crucible furnace features a quartz chamber for precision thermal processing. Designed for sintering and heat treatment under vacuum or inert atmosphere, it delivers consistent results for material science research, industrial engineering, and professional R&D lab quality applications.
High Temperature Cold Wall High Vacuum Chamber Furnace 1400C for Advanced Material Processing
Optimize your research with this 1400°C cold wall high vacuum chamber furnace. It features a water-cooled stainless steel vessel and metal insulation for ultra-clean processing, achieving 1e-6 torr vacuum levels for high-purity thermal treatment and advanced material development.
High Temperature Cold Wall Vacuum Furnace for Advanced Material Sintering and Annealing 1600C Heating Area 200x200x300mm
This high-temperature cold wall vacuum furnace delivers 1600C thermal processing within a clean metallic heating zone. Featuring an integrated water chiller and precision Eurotherm control, it ensures contamination-free environments for advanced metallurgy and material science research.
Compact High Vacuum Box Furnace 1050C Max 6.2L Ceramic Chamber Stainless Steel Shell Programmable Temperature Controller for Material Science Research
Optimize your laboratory thermal processing with this 1050C vacuum box furnace featuring a 6.2L ceramic chamber and 10-4 torr capability. Perfect for sintering, annealing, and heat treatment under controlled atmospheres or precision vacuum environments for high-level industrial research applications.
High Vacuum Compact Tube Furnace 1200C with Integrated Turbo Pump System and 8 Inch Heating Zone
This 1200C high vacuum compact tube furnace features an integrated turbo pump system achieving 10^-5 torr. Ideal for material science R&D, it offers precise PID control, an 8 inch heating zone, and robust quartz tube construction for processing.
