Tube Furnace
High Temperature Dual Zone Vacuum Tube Furnace for Material Research and CVD Processing
Item Number: TU-GS03
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Product Overview

This high-temperature dual-zone vacuum tube furnace represents a pinnacle in thermal engineering, designed to facilitate sophisticated material science research and industrial R&D. By integrating two distinct heating zones within a single horizontal tube, the system allows for the creation of complex temperature gradients or the maintenance of two separate thermal environments simultaneously. This dual-capability is essential for chemical vapor deposition (CVD), controlled atmosphere sintering, and complex annealing cycles where precision and flexibility are paramount. The equipment is built with a focus on delivering high-thermal efficiency and an equilibrium temperature field, ensuring that every specimen undergoes consistent and repeatable processing.
Designed for demanding laboratory environments, the unit utilizes a combination of advanced heating elements, specifically silicon molybdenum (MoSi2) and silicon carbide (SiC) rods, to reach high temperatures with exceptional stability. The double-shell structure minimizes heat loss to the external environment, maintaining a low surface temperature for operator safety while enhancing energy efficiency. Target industries include semiconductor manufacturing, advanced ceramics, aerospace metallurgy, and university research institutes. This system is engineered to provide reliable service under continuous high-temperature operation, giving researchers the confidence to execute long-duration experiments without hardware failure.
This equipment is not merely a furnace but a complete thermal processing solution. With integrated software control, sophisticated vacuum management, and multi-layered safety features, it provides a robust platform for modern material synthesis. Whether performing vacuum annealing or high-temperature reduction processes, the unit maintains strict adherence to set thermal profiles. The integration of high-purity alumina polycrystalline fiber insulation ensures a rapid thermal response and resistance to thermal shock, positioning this furnace as a critical asset for labs that require high-throughput and uncompromising accuracy in their heat treatment protocols.
Key Features
- Independent Dual-Zone Control: This system features two separate heating zones that can be controlled independently. This allows users to set distinct temperatures in each zone, facilitating complex thermal gradient experiments or providing a larger, more stable constant temperature zone when synchronized.
- Advanced Hybrid Heating Elements: The first zone utilizes premium 1800-grade silicon molybdenum (MoSi2) rods, while the second zone incorporates robust silicon carbide (SiC) rods. This hybrid approach optimizes the heating profile and longevity of the furnace across a wide temperature spectrum.
- Precision PID Temperature Management: Equipped with advanced digital instruments, the furnace offers 30-segment programmable control. It features intelligent PID adjustment with an accuracy of ±1°C, ensuring that even the most sensitive industrial processes remain within strict tolerances.
- High-Performance Vacuum Sealing: The furnace tube is secured with stainless steel flanges featuring double-layer silicone O-rings. This retractable and easy-to-remove design ensures exceptional air tightness, capable of maintaining vacuum levels for 12 hours without measurable pressure loss.
- Superior Insulation Technology: The chamber is constructed from high-quality alumina polycrystalline fiber. This material is chosen for its high reflectivity, low thermal conductivity, and resistance to powdering, which results in a balanced temperature field and significantly reduced power consumption.
- Comprehensive Software Integration: A built-in 485 communication interface allows for remote operation via a computer. The included software enables real-time monitoring of PV (Process Value) and SV (Set Value), data logging, and the generation of thermal curves for meticulous documentation of experimental parameters.
- Multi-Level Safety Protection: The unit includes an open-cover protection system that automatically cuts power when the furnace is opened, alongside leakage protection and over-temperature alarms that disconnect the main circuit if the temperature exceeds 1200°C or a thermocouple failure is detected.
- Customizable Gas Supply Interface: The stainless steel flanges are equipped with precision needle valves and pressure gauges. Users can easily integrate float flowmeters or digital mass flow controllers for precise atmosphere control during sintering or reduction tests.
- Robust Flange Support System: A dedicated flanged bracket supports the assembly, effectively eliminating mechanical stress on the corundum tube. This engineering detail significantly extends the service life of the tube by preventing fractures caused by heavy flange weights.
- Rapid Thermal Cycling: With a heating rate of up to 20°C per minute (10°C/min recommended), the equipment allows for fast startup and cooling, increasing lab productivity and enabling rapid exploration of material thermal properties.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| Chemical Vapor Deposition (CVD) | Used for the growth of high-quality thin films and nanotubes under controlled gas flow and vacuum. | High-purity environment and dual-zone temperature control ensure uniform film deposition. |
| Vacuum Annealing | Stress-relieving metals and alloys in a vacuum to prevent oxidation and improve mechanical properties. | Superior sealing preserves material integrity and prevents surface contamination. |
| Atmosphere Sintering | High-temperature consolidation of ceramic or metal powders in inert or reducing gases. | Equilibrium temperature fields lead to higher density and more uniform microstructure. |
| Material Synthesis | Discovery of new compounds through precise thermal cycling and reaction management. | 30-segment programming allows for complex, multi-stage reaction protocols. |
| Degassing Processes | Removing volatile components or trapped gases from materials under high heat and vacuum. | High vacuum capability (10-3 Pa) ensures thorough removal of impurities. |
| Reduction Testing | Testing materials in a hydrogen or carbon monoxide environment to observe chemical changes. | Integrated safety valves and mass flow interfaces allow for safe and precise gas management. |
| Aerospace R&D | Testing high-temperature resistant coatings and components for aerospace hardware. | Reliable performance at temperatures up to 1700°C simulates extreme flight conditions. |
Technical Specifications
| Parameter | TU-GS03-60 | TU-GS03-80 |
|---|---|---|
| Chamber Size (OD x Length) | Dia 60mm x 1200mm | Dia 80mm x 1200mm |
| Power Rating | 7 KW | 7 KW |
| Input Voltage | 220V, Single Phase | 220V, Single Phase |
| Max. Operating Temperature | Zone 1: 1700°C / Zone 2: 1400°C | Zone 1: 1700°C / Zone 2: 1400°C |
| Rated Constant Temp. | Zone 1: 1650°C / Zone 2: 1350°C | Zone 1: 1650°C / Zone 2: 1350°C |
| Heating Length (Z1/Z2) | 210mm / 210mm | 210mm / 210mm |
| Constant Temp. Zone | 80mm / 80mm | 80mm / 80mm |
| Heating Elements | Z1: 1800 MoSi2 Rod / Z2: SiC Rod | Z1: 1800 MoSi2 Rod / Z2: SiC Rod |
| Temperature Accuracy | ± 1 ℃ | ± 1 ℃ |
| Heating Rate | ≤20 ℃/Min (Recommended 10 ℃) | ≤20 ℃/Min (Recommended 10 ℃) |
| Thermocouple Type | Zone 1: Type B / Zone 2: Type S | Zone 1: Type B / Zone 2: Type S |
| Chamber Material | Alumina Polycrystalline Fiber | Alumina Polycrystalline Fiber |
| Control Instrument | Yu Electric 30-Segment PID | Yu Electric 30-Segment PID |
| Vacuum Options | Standard: TW-1.5A / High: 2XZ-2 | Standard: TW-1.5A / High: 2XZ-2 |
| Ultimate Vacuum Level | 10-1 Pa to 10-3 Pa (System Dependent) | 10-1 Pa to 10-3 Pa (System Dependent) |
| Trigger Type | Phase-shifted Trigger | Phase-shifted Trigger |
| Thyristor Control | 106/16E SEMIKRON | 106/16E SEMIKRON |
| Surface Temperature | ≤ 45°C | ≤ 45°C |
| Connectivity | RS-485 Interface (Standard) | RS-485 Interface (Standard) |
Why Choose This Dual-Zone System
- Unmatched Thermal Versatility: By combining high-temp 1700°C and 1400°C zones, this furnace allows for dual-stage reactions and gradient sintering that single-zone furnaces cannot achieve, providing a significant advantage in advanced material research.
- Industrial-Grade Reliability: From the SEMIKRON thyristors to the high-purity polycrystalline insulation, every component is selected for its ability to withstand continuous duty cycles in professional laboratory settings.
- Precision Engineered Vacuum Integrity: Our proprietary double-ring seal technology and stainless steel flange brackets ensure a vacuum-tight environment that protects your samples and ensures the purity of your atmosphere-sensitive processes.
- Advanced Safety and Monitoring: With integrated software for real-time tracking and multiple automatic shutdown protocols, your laboratory can operate with the peace of mind that both users and experiments are protected.
- Proven Performance Excellence: Our systems are trusted by leading global universities and industrial research facilities for their consistency, energy efficiency, and long-term durability.
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