High Vacuum Compact Tube Furnace 1200C with Integrated Turbo Pump System and 8 Inch Heating Zone

Tube Furnace

High Vacuum Compact Tube Furnace 1200C with Integrated Turbo Pump System and 8 Inch Heating Zone

Item Number: TU-41

Maximum Temperature: 1200°C Ultimate Vacuum Level: 10^-5 torr Heating Zone Length: 8 inches (200mm)
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Product Overview

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This high-performance thermal processing system represents a complete, integrated solution for researchers and industrial engineers requiring precise temperature control under high-vacuum conditions. Designed as a compact, benchtop-friendly unit, the equipment combines a high-temperature tube furnace with a sophisticated turbomolecular vacuum system. This integration allows users to achieve vacuum levels as deep as 10^-5 torr, providing a pristine environment for oxygen-sensitive materials, thin-film research, and advanced chemical vapor deposition (CVD) processes. By eliminating the complexity of external pump arrays, this unit provides a streamlined workflow for material scientists across both academia and industry.

Primarily utilized in materials science R&D and semiconductor laboratory environments, the equipment serves as a cornerstone for synthesizing new nanomaterials, performing solid-state reactions, and sintering delicate components. The single heating zone is optimized for uniformity, ensuring that samples placed within the 60mm quartz tube experience consistent thermal energy distribution. Whether the requirement is for high-purity annealing or complex atmosphere-controlled heat treatments, this system delivers the stability and reproducibility necessary for modern industrial standards.

Reliability is engineered into every component of this thermal processing unit. From the dual-layer steel structure that remains cool to the touch even at maximum operation, to the alumina-fibrous insulation coated for extended service life, every detail is focused on durability. This equipment is built to withstand the rigorous demands of 24/7 industrial research cycles, maintaining high vacuum integrity and temperature accuracy over thousands of operating hours. This focus on engineering excellence ensures that technical teams can focus on their results rather than their equipment.

Key Features

  • Integrated High Vacuum Turbo Pump System: This equipment features a built-in, German-engineered turbomolecular pump system that achieves ultimate vacuum levels of up to 1 x 10^-5 torr, ensuring an ultra-pure environment for sensitive thermal processes.
  • Precision PID Temperature Control: An advanced micro-processor controller utilizes Proportional-Integral-Derivative logic and an auto-tune function to maintain ±1°C accuracy, allowing for 30 programmable segments of ramping, dwelling, and cooling.
  • Advanced Dual-Layer Thermal Protection: The furnace is constructed with a double-layered steel shell and integrated cooling fans, maintaining the exterior surface temperature below 70°C even when the internal chamber reaches 1200°C.
  • Alumina Fibrous Insulation with High-Durability Coating: The heating chamber is lined with high-efficiency alumina fibrous thermal insulation, which is further treated with an alumina coating to prevent degradation and extend the lifespan of the refractory materials.
  • Precision Heating Elements: The unit utilizes Fe-Cr-Al alloy elements doped with Molybdenum, specifically selected for their high-temperature stability and resistance to oxidation, ensuring consistent heating performance across the 8-inch zone.
  • Airtight Vacuum Sealing and Flanges: Equipped with a complete 60mm O.D. vacuum flange set featuring 1/4" barb fittings, needle valves, and a quick-connect thermocouple feedthrough, the system ensures effortless gas management and a reliable vacuum seal.
  • Comprehensive Safety Protocols: Built-in safeguards including over-temperature protection and thermocouple failure protection automatically shut down the heating elements to prevent damage and ensure operator safety during unattended runs.
  • Enhanced Data Management Capabilties: The controller includes a DB9 PC communication port, supporting optional LabVIEW-based software (MTS01) that allows for remote profile editing, data logging, and real-time Heat-treatment recipe management.
  • Modular Heating Performance: The interchangeable design of the heating module allows for flexible maintenance and potential future upgrades, providing a cost-effective path for long-term laboratory operation.
  • Optimized Thermal Blocks: The system includes a pair of fibrous ceramic thermal blocks designed to limit heat dissipation from the active heating area, protecting the cooling flanges and improving overall energy efficiency.

Applications

Application Description Key Benefit
CVD / PECVD Chemical Vapor Deposition of specialized thin films and coatings on substrates. High-vacuum integrity ensures deposit purity and crystalline quality.
Semiconductor R&D Processing of silicon wafers, compound semiconductors, and electronic components. Rapid thermal processing with precise control over oxygen concentration.
Carbon Nanotube Synthesis High-temperature growth of CNTs and other carbon-based nanomaterials. Excellent temperature uniformity results in consistent fiber diameter and yields.
Vacuum Annealing Stress-relieving heat treatment for metals and ceramics in an oxygen-free environment. Prevents surface oxidation and scaling, maintaining material surface integrity.
Thin Film Deposition Evaporation or thermal processing of functional thin films in high vacuum. Integrated turbo pump provides the necessary low-pressure environment without contamination.
Solid-State Synthesis Mixing and reacting solid precursors at high temperatures to form new compounds. 30-segment programmable control allows for complex, multi-stage reaction cycles.
Battery Material Research Thermal treatment of cathode and anode materials for high-energy density batteries. Controlled environment prevents unwanted chemical reactions during synthesis.
Ceramic Sintering High-purity sintering of advanced ceramic oxides and non-oxides. Precision PID control avoids thermal shock and promotes uniform grain growth.

Technical Specifications

Parameter Group Feature Value for TU-41
Power Supply Voltage Options 120VAC (20A) or 208 - 240VAC (10A)
Frequency 50/60 Hz, Single Phase
Total Power Consumption 1.2 KW
Temperature Performance Maximum Temperature ≤1200°C (< 1 hour duration)
Continuous Working Temp ≤1100°C
Vacuum Surface Temperature ≤1000°C (Under high vacuum)
Maximum Heating Rate ≤ 20 °C/min
Heating Zone Specs Heating Zone Length 8" (200mm), Single Zone
Constant Temp. Zone 2.3" (60mm) (±2°C) @ 600 °C
Heating Elements Fe-Cr-Al Alloy doped by Mo
Vacuum System Integrated Pump Type Turbomolecular Pump System (German Made)
Ultimate Vacuum Level 10^-6 torr (tube) / 7.5 x 10^-5 hPa (pump unit)
Connection Fitting KF40 Clamp on right flange
Monitoring Mechanical Vacuum Gauge on flange
Tube & Chamber Tube Material High-Purity Quartz
Tube Dimensions 60mm OD x 55mm ID x 600mm L
Insulation Material Alumina Fibrous with protective coating
Control System Controller Type Digital PID with 30-segment programming
Accuracy ± 1 °C
Thermocouple Type K (TCK8S3B)
Data Communication DB9 PC Port (MTS01 Software optional)
Hardware & Flanges Gas Inlets/Outlets 1/4" barb fittings with Needle Valve
Sealing High-temp O-rings on 60mm OD Flange set
Feedthrough 1/4" quick-connect for thermocouple
Compliance Certification CE Certified (NRTL/CSA available on request)

Why Choose TU-41

  • Superior Integrated Design: Unlike systems requiring separate external pumps, this unit integrates the vacuum and thermal systems into a single, high-efficiency footprint, saving laboratory space and reducing setup complexity.
  • Industrial-Grade Vacuum Performance: Utilizing a German-made turbomolecular pump allows this system to achieve vacuum levels 100x deeper than standard mechanical pumps, making it suitable for high-purity material research.
  • Precision-Engineered Reliability: From the Mo-doped heating elements to the liquid-alumina coated insulation, every component is selected for maximum uptime and consistent performance in demanding R&D cycles.
  • Flexible Thermal Profiling: The 30-segment PID controller provides the granularity required for complex materials synthesis, ensuring that cooling and heating rates are precisely managed to prevent material failure.
  • Comprehensive Support and Quality: As a CE-certified product with available NRTL upgrades, this equipment meets the highest international standards for safety and operational excellence, backed by THERMUNITS' expert technical support.

Our engineering team is ready to assist you with a custom configuration or a formal quote for this high-performance vacuum system; please contact us today to discuss your specific thermal processing requirements.

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