Vertical Openable Tube Furnace 0-1700c High Temperature Laboratory System for CVD and Vacuum Heat Treatment

Product Overview

This high-temperature experimental equipment represents the pinnacle of thermal engineering, specifically designed for rigorous material research, development, and process validation. By integrating high-temperature heating, sophisticated vacuum-atmosphere control, and rapid thermal processing capabilities, the equipment serves as a versatile platform for the most demanding laboratory environments. The vertical openable structure is engineered for maximum accessibility and flexibility, allowing researchers to transition seamlessly from basic material sintering to complex chemical vapor deposition (CVD) or vacuum annealing. Built with industrial robustness, this unit provides the precision required by materials scientists in university laboratories, semiconductor R&D centers, and aerospace manufacturing. It reflects a commitment to engineering excellence, ensuring that every thermal cycle is consistent, repeatable, and safe, even when operating at temperatures up to 1700℃ in high-vacuum or specialized gas atmospheres.

Key Features

• Vertical Openable Architecture: The furnace body is designed to separate vertically, providing 180-degree access to the reaction tube for easy loading, maintenance, and the integration of internal monitoring sensors or quenching modules.
• Triple-Zone Precision Heating: Advanced multi-stage programming through independent regulation of three separate temperature zones ensures a wide constant temperature region with optimized thermal compensation for ±1.5℃ uniformity.
• High-Purity Alumina Insulation: The chamber utilizes 1700-grade high-purity alumina polycrystalline fiber, a material selected for its exceptionally low heat capacity and superior resistance to thermal shock, ensuring rapid heat-up and energy efficiency.
• Advanced MoSi2 Heating Elements: Equipped with high-density silicon molybdenum rods, the heating system is capable of sustained operation at extreme temperatures, with optional upgrades available for environments requiring up to 1800℃.
• Integrated Fast-Cooling System: A built-in air-cooling circulation system and optional water-cooling flanges facilitate a high-speed thermal drop, enabling samples to undergo quenching treatment within 10 seconds for phase-change studies.
• Sophisticated Vacuum Sealing: The equipment features a double O-type fluorine rubber sealing system and water-cooled flanges, achieving a vacuum leakage rate of ≤5×10⁻⁴ Pa-m³/s when paired with high-performance molecular pump units.
• Intelligent PID Control Logic: Utilizing premium Japanese Shimaden or European Continental instrumentation, the system supports 50-segment programming, RS485 communication, and the storage of multiple preset process profiles.
• Atmospheric Management Suite: A dual-way mass flow meter system with high-precision solenoid valves and pressure regulators allows for the controlled introduction of inert or reactive gases, including hydrogen.
• Comprehensive Safety Interlocks: The system is protected by multiple safety layers, including over-temperature automatic power-off, broken thermocouple alarms, water pressure monitoring, and emergency pressure relief valves.
• Modular Expansion Compatibility: Designed for versatility, the platform supports external modules such as rotary sample stages, infrared thermometers, and gas analyzers to adapt to evolving research requirements.

Applications

Technical Specifications

Why Choose Us

• Proven Long-Term Reliability: Built with industrial-grade components and a double-layer shell, this furnace is engineered for continuous operation in high-stakes research environments without performance degradation.
• Exceptional Thermal Precision: The three-zone independent compensation technology provides a level of temperature uniformity and stability that is critical for the success of sensitive CVD and sintering processes.
• Unmatched Modular Flexibility: Whether you require high vacuum, specialized gas circuits, or rotary sample stages, this system is designed to grow with your research needs through its modular interface.
• Stringent Safety Standards: From hydrogen gas handling to high-pressure relief, the system incorporates redundant safety mechanisms to protect your laboratory personnel and your high-value materials.
• Precision Manufacturing: Every unit undergoes rigorous calibration and vacuum leak testing to ensure it meets our exacting standards for industrial robustness and technical excellence.

Contact our technical sales team today for a detailed quote or to discuss a customized solution tailored to your specific material processing requirements.