Tube Furnace
Three Zone Tube Furnace with 24 Inch Heating Length and Hinged Flange Quartz Tube System
Item Number: TU-35
Shipping: Contact us to get shipping details Enjoy On-time Dispatch Guarantee.
Product Overview


This high-performance three-zone tube furnace represents a pinnacle in thermal processing technology, designed specifically to meet the rigorous demands of material science research and industrial R&D. By utilizing three independently controlled heating zones across a 24-inch span, the equipment provides researchers with unparalleled control over thermal gradients and hot zone stability. The system's core value proposition lies in its ability to facilitate complex chemical vapor deposition (CVD) and annealing processes with extreme repeatability, ensuring that experimental results are consistent and scalable from the laboratory to pilot production.
Primarily utilized in semiconductor manufacturing, metallurgy, and advanced ceramics, this unit is particularly effective for the synthesis of 2D materials, such as tailoring the edge structures of molybdenum disulfide for electrocatalytic applications. Its split-able design and hinged flange mechanism allow for rapid access to the process chamber, significantly reducing downtime during sample loading and unloading. This makes the equipment an ideal choice for high-throughput environments where operational efficiency is as critical as thermal precision.
Engineered for reliability under demanding conditions, the system features a robust double-layer steel housing and advanced air-cooling technology. This construction ensures that while internal temperatures reach up to 1200°C, the exterior remains safe to touch, maintaining a stable laboratory environment. The integration of high-purity fibrous alumina insulation and sophisticated PID microprocessor control underscores our commitment to delivering a tool that performs with industrial-grade durability and scientific-grade accuracy.
Key Features
- Independent Triple-Zone Heating: The 24-inch total heating length is divided into three distinct segments (6"+12"+6"), each controlled by its own dedicated thermocouple and PID controller. This configuration allows for the creation of precise temperature gradients or an ultra-uniform constant temperature zone extending up to 480mm.
- Hinged Flange Rapid Access: The equipment is fitted with specialized hinged stainless steel flanges on both ends. This design eliminates the need for complex disassembly during sample retrieval, allowing operators to swing the flanges open quickly for efficient loading while maintaining a high-vacuum-ready seal when closed.
- Advanced PID Microprocessor Control: Each zone utilizes a microprocessor-based self-tuning PID controller with 30 programmable segments. This ensures zero overshooting during ramp-up and maintains a steady-state accuracy of ±1°C, which is vital for sensitive sintering and diffusion processes.
- High-Vacuum Compatibility: Equipped with a KF25D adapter and a precision digital vacuum gauge, this system is capable of reaching vacuum levels as deep as 10^-2 Torr with a mechanical pump and 10^-5 Torr with a molecular pump, facilitating clean, oxygen-free processing environments.
- Enhanced Thermal Insulation: The interior is lined with energy-saving, high-purity alumina fiber insulation. This material not only reduces power consumption but also minimizes thermal mass, allowing for faster heating rates up to 20°C/min and improved responsiveness to controller adjustments.
- Integrated Safety and Cooling: A double-layer steel case creates an air-cooling gap powered by two high-efficiency fans. This active cooling system prevents heat buildup on the furnace exterior, protecting operators and surrounding sensitive electronics from thermal damage.
- Multi-Atmosphere Versatility: Designed for use with various inert and reducing gases, the furnace includes needle valves and 1/4" pipe connectors. This allows for precise gas flow management during annealing or atmospheric synthesis, provided pressure is maintained below 0.12 MPa.
- Remote Monitoring Capabilities: The system includes an RS485 communications port as standard, with optional LabView-based software modules available. This allows for PC-based data logging, recipe management, and remote operation, ensuring full traceability for quality-controlled industrial processes.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| 2D Material Synthesis | Synthesis of Ta and Nb-doped MoS2 and other transition metal dichalcogenides. | Precise gradient control for optimal crystal growth. |
| Semiconductor Annealing | High-temperature treatment of silicon wafers up to 4 inches in diameter. | Excellent uniformity (±1°C) prevents thermal stress defects. |
| CVD / PECVD | Chemical vapor deposition for thin film and nanotube production. | Stable hot zones for consistent chemical reactions. |
| Battery Material R&D | Sintering of cathode and anode powders under controlled atmospheres. | High purity environment prevents material contamination. |
| Catalyst Testing | Thermal activation of industrial catalysts in flowing gas environments. | Repeatable ramp/dwell cycles for performance benchmarking. |
| Vacuum Metallurgy | Melting and heat treatment of high-purity metal alloys in a vacuum. | Prevents oxidation and ensures material integrity. |
| Ceramic Sintering | Consolidation of technical ceramic components at temperatures up to 1200°C. | Rapid heating and cooling cycles improve throughput. |
Technical Specifications
| Parameter | Details for Item Number: TU-35 |
|---|---|
| Furnace Structure | Double-layer steel case with cooling fans; Energy-saving high purity fibrous alumina insulation |
| Rated Voltage | AC 208-240V Single Phase, 50/60 Hz (40A breaker required) |
| Max. Power Consumption | 6.0 KW |
| Heating Elements | Fe-Cr-Al Alloy doped by Mo |
| Total Heating Zone Length | 610mm (24") total |
| Zone Configuration | Z1: 152.4mm (6") / Z2: 304.8mm (12") / Z3: 152.4mm (6") |
| Uniform Temp. Zone (±1ºC) | 260 mm |
| Uniform Temp. Zone (±2ºC) | 480 mm |
| Max. Temperature (Flowing Gas) | 1200°C |
| Continuous Temp. (Flowing Gas) | 1100°C |
| Max. Temperature (Vacuum) | 1000°C |
| Max. Heating Rate | 20°C / min |
| Temperature Accuracy | ± 1ºC |
| Temperature Controllers | Three 30-segment programmable PID controllers with self-tuning |
| Thermocouples | Three K-type thermocouples |
| Vacuum Level | 10^-2 Torr (Mechanical Pump); 10^-5 Torr (Molecular Pump) |
| Vacuum Flanges | Hinged type; Left: KF25D with digital gauge; Right: SS needle valve |
| Variant: TU-35-80 | Tube Size: 80mm O.D x 72mm I.D x 1200mm L (Max 2" Wafer) |
| Variant: TU-35-4 | Tube Size: 101mm O.D x 92mm I.D x 1200mm L (Max 3" Wafer) |
| Variant: TU-35-5 | Tube Size: 130mm O.D x 122mm I.D x 1200mm L (Max 4" Wafer) |
| Compliance | CE Certified; NRTL or CSA available upon request |
Why Choose This Three Zone Tube Furnace
- Superior Thermal Management: The triple-zone architecture provides the flexibility to create precise thermal profiles, essential for advanced material synthesis and preventing thermal shock in delicate substrates.
- Engineered for Operational Longevity: Built with high-grade Fe-Cr-Al heating elements doped with Molybdenum and premium fibrous alumina, this unit is designed for continuous industrial use with minimal maintenance requirements.
- Precision and Safety: With UL-standard compliance and built-in protections for overheating and broken thermocouples, the system offers peace of mind for unattended overnight operations and high-stakes research.
- Turnkey Vacuum Integration: Unlike standard furnaces, this unit comes equipped with hinged flanges and digital vacuum monitoring, allowing for immediate integration into vacuum-reliant workflows without additional engineering.
- Scalable Customization: From PC-control modules and LabView compatibility to various tube size options and molecular pump upgrades, the system can be tailored to meet the specific throughput and precision requirements of your laboratory.
For a customized configuration or to request a formal quotation for your facility, please contact our technical sales team today.
REQUEST A QUOTE
Our professional team will reply to you within one business day. Please feel free to contact us!
Related Products
Three Zone Tube Furnace with 11 Inch or 15 Inch Quartz Tube and Hinged Flanges for Vacuum Atmosphere Heat Treatment
Achieve superior thermal uniformity with this three zone tube furnace featuring 11 inch or 15 inch quartz tubes for large scale wafer annealing and material synthesis under precise vacuum control and motorized lid operation for industrial laboratory safety.
1100°C Three Zone Tube Furnace with 8.5 to 11 Inch OD Quartz Tube and Vacuum Flanges for Large Wafer Processing
Precision 1100°C three-zone tube furnace featuring massive 8.5 to 11 inch OD quartz tubes and hermetic flanges. Engineered for large-scale wafer processing and advanced material research with superior thermal uniformity and high-vacuum compatibility for industrial R&D projects and production.
1200C Three Zone Vertical Tube Furnace with 2 Inch Quartz Tube and Vacuum Flanges
Precision 1200°C three zone vertical tube furnace featuring a 2 inch quartz tube and advanced vacuum flanges. Engineered for CVD and PVD applications, this high-performance system delivers exceptional thermal uniformity and rapid quenching capabilities for advanced material research and development.
High Temperature 1500C Three Zone Split Tube Furnace with 80mm Alumina Tube and Vacuum Flange
This engineered 1500C three zone split tube furnace provides an 80mm alumina tube and precise PID controls. It is ideal for advanced material research, CVD processes, and industrial thermal treatments requiring exceptional temperature uniformity and high vacuum stability.
Three Zone Split Tube Furnace 36 Inch Heating Length High Temperature 1200C Material Research Furnace with Vacuum Flanges
Precision engineered three zone split tube furnace for 1200C high temperature processing. Features advanced PID control for atmosphere and vacuum applications in material science R&D, providing exceptional thermal uniformity and reliable performance for industrial laboratory environments and research institutions.
1200°C Three Zone Split Tube Furnace with 18 Inch Heating Length and Vacuum Flanges
Optimize thermal processing with this 1200°C three-zone split tube furnace. Featuring an 18-inch heating length and precise PID control, it provides exceptional temperature uniformity for advanced material research, annealing, sintering, and professional industrial R&D applications across global laboratory facilities.
1600C Three Zone Split Tube Furnace with Alumina Tube and Vacuum Flange
This 1600C three zone split tube furnace delivers precise thermal profiling and vacuum capabilities for advanced material synthesis and R&D, ensuring exceptional temperature uniformity across multiple independent heating zones with a robust build for high consistency.
Large Vertical Three Zone Tube Furnace with 8 Inch or 11 Inch Quartz Tube and High Vacuum Flanges 1200C
Our engineered high-capacity vertical three-zone furnace offers independent thermal control and massive 11-inch quartz tube compatibility to deliver superior uniformity plus enhanced vacuum integrity for critical industrial annealing sintering research and advanced material science development within demanding laboratory environments
24 Inch Three Zone Split Tube Furnace with Optional Quartz Tube and Vacuum Flange System for High Temperature Material Synthesis
Accelerate your material research with this premium 24 inch three-zone split tube furnace. Featuring independent temperature control, quartz tube compatibility, and vacuum-sealed flanges, it delivers precise thermal processing up to 1200°C for demanding laboratory and industrial R&D applications.
Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer Vacuum Pump and Anti Corrosive Vacuum Gauge
This high precision 1200C three zone quartz tube furnace system provides integrated three channel gas mixing and anti corrosive vacuum monitoring for professional CVD and material synthesis within demanding laboratory research and industrial R&D process environments.
1200C Three Zone Split Vertical Tube Furnace 4 Inch Quartz Tube Stainless Steel Vacuum Flanges
This 1200C three zone split vertical tube furnace features a 4 inch quartz tube and stainless steel vacuum flanges for high-precision thermal processing. Perfect for material quenching and synthesis, this robust system ensures uniform heating and rapid sample loading access.
1200C Max Three Zone Tube Furnace 6 Inch OD Max with Tube and Flange
Optimize thermal processing with this 1200C three zone tube furnace featuring a 6 inch OD capacity and advanced touch screen control. This high precision system ensures uniform temperature distribution for advanced material research semiconductor annealing and industrial heat treatment applications.
High Temperature Three Zone Tube Furnace 1700C with Alumina Tube and Water Cooled Flanges
This advanced high temperature three zone tube furnace provides precision 1700C thermal processing and atmosphere control. Ideal for semiconductor research, advanced metallurgy, and ceramic sintering, the system delivers superior uniformity via independent PID temperature controllers.
Three Zone Heating Split Vertical Tube Furnace 1700 High Temperature Vacuum Atmosphere Thermal Process System
Advanced 1700°C three zone heating split vertical tube furnace for industrial R&D and material science applications. This precision system features independent thermal control, high vacuum capabilities, and energy efficient insulation for consistent high temperature processing and rapid sample quenching results.
High Temperature 1700C Three Zone Tube Furnace with Alumina Tube 50mm 60mm 80mm OD for Material Research and Industrial Heat Treatment
This high-performance 1700°C three-zone tube furnace features precision Alumina tubes and independent heating control. Engineered for advanced material research, it delivers exceptional thermal uniformity and stability for chemical vapor deposition and complex atmosphere-controlled industrial heat treatment processes.
Three Temperature Zone Rotating Tube Furnace for Material Sintering and Controlled Atmospheric Heat Treatment
Enhance thermal processing with this three-temperature zone rotating tube furnace. Featuring Swedish Kanthal A1 elements and 0-40 degree inclination, it provides superior uniformity for powder sintering and high-purity material research under controlled vacuum or atmospheric conditions for industrial R&D departments.
5 Inch Three Zone Rotary Tube Furnace with Integrated Gas Delivery System and 1200C Capability for Advanced Material CVD Processing
This high-precision 1200C three-zone rotary tube furnace features an integrated four-channel gas delivery system and automated tilting mechanism, providing uniform thermal processing and chemical vapor deposition for advanced battery materials, cathode synthesis, and industrial powder research applications.
High Temperature Three Temperature Zone Tube Furnace for Advanced Material Science Sintering and Chemical Vapor Deposition Applications
Optimize thermal processing with this precision three-zone tube furnace featuring 1700°C maximum temperature and independent PID control for superior uniformity ideal for CVD vacuum annealing and material sintering in advanced research and industrial R&D laboratories or large scale manufacturing facilities
High Temperature Three Zone Split Tube Furnace 1200C Max 35.4 Inch Heating Length 8 Inch ID Tube
This high-performance three-zone split tube furnace features a 35.4-inch heating zone and 8-inch diameter tube for advanced thermal processing. Achieve 1200C peak temperatures with independent zone management for superior uniformity in vacuum or gas atmospheres.
Three Zone Hydrogen Gas Tube Furnace with 82mm Superalloy Tube and Dual Hydrogen Detectors 1200C High Temperature Material Processing System
Optimize high temperature material research with this advanced three zone hydrogen gas tube furnace featuring a nickel based superalloy tube and integrated safety detectors for secure 1200C processing in demanding industrial and laboratory R&D applications ensuring maximum reliability and performance