Tube Furnace
High Temperature 1500C Three Zone Split Tube Furnace with 80mm Alumina Tube and Vacuum Flange
Item Number: TU-65
Shipping: Contact us to get shipping details Enjoy On-time Dispatch Guarantee.
Product Overview



This high-performance thermal processing system is engineered to meet the rigorous demands of advanced material science and industrial R&D. Featuring a sophisticated three-zone heating architecture, the equipment allows for the creation of incredibly stable thermal plateaus or precise temperature gradients. By utilizing high-purity alumina processing tubes and a split-furnace design, this unit provides a versatile platform for high-temperature synthesis, sintering, and annealing up to 1500°C. The core value proposition lies in its ability to deliver repeatable, high-precision results in environments ranging from high vacuum to controlled atmospheres, ensuring that critical research remains consistent and scalable.
Targeting industries such as semiconductor manufacturing, aerospace ceramics, and metallurgical research, this system excels in applications where thermal uniformity is non-negotiable. The equipment is designed for multi-purpose laboratory environments where different processing tubes may need to be exchanged quickly to accommodate varying experimental requirements. Its robust construction and state-of-the-art heating elements make it a reliable workhorse for both academic institutions and industrial laboratories focusing on the next generation of materials.
Reliability is at the heart of this equipment's design. Incorporating a recently updated interlock safety system and high-grade silicon carbide heating elements, the unit is built for longevity and operational safety. Even under continuous high-temperature operation at 1400°C, the system maintains its structural integrity and precision. Industrial buyers can have full confidence in the equipment's performance under demanding duty cycles, supported by comprehensive PID control and redundant overheat protection mechanisms that allow for unattended operations without compromising safety or sample integrity.
Key Features
- Independently Controlled Three-Zone Heating: The system features three distinct 200 mm heating zones (total 600 mm), each managed by its own controller and S-type thermocouple. This allows for a 350 mm constant temperature zone with ±2ºC uniformity or the creation of custom thermal gradients for vapor transport applications.
- Precision PID Temperature Regulation: Equipped with three 30-segment programmable controllers, the equipment delivers advanced micro-processing logic to manage heating rates, cooling rates, and dwell times with an accuracy of ±1°C.
- Ergonomic Split-Chamber Design: The furnace housing is designed to open lengthwise, facilitating easy tube replacement, sample loading, and the integration of complex internal sensor arrays without dismantling the entire vacuum flange assembly.
- Advanced Safety Interlock System: Integrated into the furnace structure, a specialized safety interlock automatically cuts power to the heating elements when the chamber is opened, protecting operators from electrical and thermal exposure during inspection or maintenance.
- High-Performance Silicon Carbide (SiC) Elements: Outfitted with 24 high-grade 1500°C-rated SiC rods (14mm diameter), the system ensures rapid thermal response and uniform radiant heat transfer throughout the ceramic processing tube.
- Versatile Atmospheric Capability: The equipment is supplied with high-purity alumina tubes and precision-machined vacuum flanges, supporting vacuum levels down to 10E-5 torr (with molecular pumps) and low-pressure gas environments.
- Comprehensive Protection Circuitry: Built-in safeguards against overheating and broken thermocouples provide peace of mind during long-duration cycles, including audible and visual alarms that trigger automatically during deviations.
- Expandable Digital Communication: Featuring a standard RS485 port, the unit can be upgraded with PC-based control modules for real-time data logging, remote recipe management, and automated cycle verification via Labview-based software.
- Durable Mullite/Alumina Tube Options: The system supports various tube materials including standard alumina (80mm OD) and optional mullite (82mm OD), allowing users to optimize the chemical compatibility and thermal shock resistance based on specific process requirements.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| CVD / PECVD | Chemical Vapor Deposition for thin film growth and carbon nanotubes. | Precise gradient control enables uniform film deposition across large substrates. |
| Technical Ceramic Sintering | High-temperature densification of advanced oxide and non-oxide ceramics. | 1500°C peak capability allows for the synthesis of high-melting-point technical ceramics. |
| Semiconductor Annealing | Controlled thermal treatment of silicon wafers or compound semiconductor materials. | Three-zone control ensures identical thermal history across the entire process tube length. |
| Crystal Growth | Vapor transport and directional solidification techniques for single crystal synthesis. | Independent zone programming allows for the fine-tuning of the liquid-solid interface movement. |
| Vacuum Degassing | Removal of volatile impurities and gases from specialized metallurgical alloys. | High-vacuum flange design maintains structural integrity under deep vacuum at high temperatures. |
| Battery Material Research | Calcination and thermal cycling of anode/cathode precursors in inert or oxidizing atmospheres. | Robust S-type thermocouples provide the long-term stability required for multi-day cycling tests. |
Technical Specifications
| Parameter | Specification Details for TU-65 |
|---|---|
| Model Number | TU-65 |
| Max. Temperature | 1500°C (< 1 hour) |
| Continuous Working Temp. | 1400°C |
| Heating Rate | Recommended 5°C/min |
| Power Rating | 9KW |
| Input Voltage | AC220V Single-phase, 50/60Hz (Requires 50A Breaker) |
| Heating Zone Configuration | Three zones: 200 mm per zone (600 mm total length) |
| Uniform Temp. Zone | 350 mm (± 2ºC) when all zones are set to the same setpoint |
| Temperature Accuracy | ± 1ºC accuracy with PID 30-segment programmable control |
| Processing Tube (Standard) | Alumina Tube: 80 mm O.D × 74 mm I.D × 1200 mm L |
| Processing Tube (Optional) | Mullite Tube: 82 mm O.D × 73 mm I.D × 1200 mm L |
| Heating Elements | 24 pcs Silicon Carbide Rods (14mm Dia x 150mm Heat x 413mm L) |
| Thermocouples | 3 pcs S-Type (one for each heating zone) |
| Vacuum Capability | 10E-2 torr (mechanical pump) / 10E-5 torr (molecular pump) |
| Gas Flow Limitation | < 200 SCCM (200 ml/min) using two-stage regulator (< 3 PSI) |
| Max Operating Pressure | < 0.02 Mpa (for mullite tube applications) |
| Communication Interface | RS485 (Optional MTS-02 PC Control Module available) |
| Compliance | CE Certified; NRTL (UL61010) or CSA available upon request |
| Safety Features | Integrated interlock system (Active since June 2015); Alarm for overheat/broken TC |
Why Choose TU-65
- Superior Thermal Uniformity: The TU-65 architecture utilizes a triple-zone independent control system that eliminates the cold-end effects common in single-zone furnaces, providing a significantly larger usable processing window.
- Precision Engineering and Build Quality: Constructed with high-grade refractive materials and a heavy-duty split housing, this unit is designed for industrial-level durability and ease of maintenance in high-throughput labs.
- Enhanced Operator Safety: Unlike older models, the TU-65 features a modern hardware interlock system that minimizes the risk of accidental thermal or electrical exposure, meeting modern laboratory safety standards.
- Versatile Atmospheric Control: Whether your process requires a high vacuum or ultra-pure gas flow, the specialized flange design and thermal block placement ensure consistent results and protect the furnace internals.
- Proven Reliability and Support: With standard CE certification and optional NRTL/CSA compliance, this system is a globally recognized platform for material synthesis, backed by comprehensive technical support and available replacement consumables.
For more information on the TU-65 or to request a customized heating zone configuration for your specific R&D requirements, please contact our technical sales team for a formal quotation today.
REQUEST A QUOTE
Our professional team will reply to you within one business day. Please feel free to contact us!
Related Products
High Temperature Split Tube Furnace 1500C for Material Research Vacuum and Atmosphere Thermal Processing
This 1500C high temperature split tube furnace delivers precision thermal processing for advanced material research and industrial sintering applications featuring dual shell construction integrated PID control and vacuum ready stainless steel flanges for reliable performance in demanding labs.
Three Zone Heating Split Vertical Tube Furnace 1700 High Temperature Vacuum Atmosphere Thermal Process System
Advanced 1700°C three zone heating split vertical tube furnace for industrial R&D and material science applications. This precision system features independent thermal control, high vacuum capabilities, and energy efficient insulation for consistent high temperature processing and rapid sample quenching results.
High Temperature 1700C Three Zone Tube Furnace with Alumina Tube 50mm 60mm 80mm OD for Material Research and Industrial Heat Treatment
This high-performance 1700°C three-zone tube furnace features precision Alumina tubes and independent heating control. Engineered for advanced material research, it delivers exceptional thermal uniformity and stability for chemical vapor deposition and complex atmosphere-controlled industrial heat treatment processes.
Three Zone Tube Furnace with 24 Inch Heating Length and Hinged Flange Quartz Tube System
This professional three zone tube furnace features a 24 inch heating length and hinged flanges for efficient sample loading. Optimized for 1200°C processing, it delivers precise temperature uniformity and vacuum compatibility for advanced industrial material research.
High Temperature Three Temperature Zone Tube Furnace for Advanced Material Science Sintering and Chemical Vapor Deposition Applications
Optimize thermal processing with this precision three-zone tube furnace featuring 1700°C maximum temperature and independent PID control for superior uniformity ideal for CVD vacuum annealing and material sintering in advanced research and industrial R&D laboratories or large scale manufacturing facilities
24 Inch Three Zone Split Tube Furnace with Optional Quartz Tube and Vacuum Flange System for High Temperature Material Synthesis
Accelerate your material research with this premium 24 inch three-zone split tube furnace. Featuring independent temperature control, quartz tube compatibility, and vacuum-sealed flanges, it delivers precise thermal processing up to 1200°C for demanding laboratory and industrial R&D applications.
High Temperature Three Zone Tube Furnace 1700C with Alumina Tube and Water Cooled Flanges
This advanced high temperature three zone tube furnace provides precision 1700C thermal processing and atmosphere control. Ideal for semiconductor research, advanced metallurgy, and ceramic sintering, the system delivers superior uniformity via independent PID temperature controllers.
1100°C Three Zone Tube Furnace with 8.5 to 11 Inch OD Quartz Tube and Vacuum Flanges for Large Wafer Processing
Precision 1100°C three-zone tube furnace featuring massive 8.5 to 11 inch OD quartz tubes and hermetic flanges. Engineered for large-scale wafer processing and advanced material research with superior thermal uniformity and high-vacuum compatibility for industrial R&D projects and production.
Three Zone Split Tube Furnace 36 Inch Heating Length High Temperature 1200C Material Research Furnace with Vacuum Flanges
Precision engineered three zone split tube furnace for 1200C high temperature processing. Features advanced PID control for atmosphere and vacuum applications in material science R&D, providing exceptional thermal uniformity and reliable performance for industrial laboratory environments and research institutions.
High Temperature Three Zone Split Tube Furnace 1200C Max 35.4 Inch Heating Length 8 Inch ID Tube
This high-performance three-zone split tube furnace features a 35.4-inch heating zone and 8-inch diameter tube for advanced thermal processing. Achieve 1200C peak temperatures with independent zone management for superior uniformity in vacuum or gas atmospheres.
1200°C Three Zone Split Tube Furnace with 18 Inch Heating Length and Vacuum Flanges
Optimize thermal processing with this 1200°C three-zone split tube furnace. Featuring an 18-inch heating length and precise PID control, it provides exceptional temperature uniformity for advanced material research, annealing, sintering, and professional industrial R&D applications across global laboratory facilities.
1200C Max Three Zone Tube Furnace 6 Inch OD Max with Tube and Flange
Optimize thermal processing with this 1200C three zone tube furnace featuring a 6 inch OD capacity and advanced touch screen control. This high precision system ensures uniform temperature distribution for advanced material research semiconductor annealing and industrial heat treatment applications.
Large Vertical Three Zone Tube Furnace with 8 Inch or 11 Inch Quartz Tube and High Vacuum Flanges 1200C
Our engineered high-capacity vertical three-zone furnace offers independent thermal control and massive 11-inch quartz tube compatibility to deliver superior uniformity plus enhanced vacuum integrity for critical industrial annealing sintering research and advanced material science development within demanding laboratory environments
Three Zone Hydrogen Gas Tube Furnace with 82mm Superalloy Tube and Dual Hydrogen Detectors 1200C High Temperature Material Processing System
Optimize high temperature material research with this advanced three zone hydrogen gas tube furnace featuring a nickel based superalloy tube and integrated safety detectors for secure 1200C processing in demanding industrial and laboratory R&D applications ensuring maximum reliability and performance
Six Zone Split Tube Furnace with Alumina Tube and Vacuum Flanges for 1500C High Temperature Thermal Processing and CVD
This 1500C six zone split tube furnace offers exceptional thermal control for professional laboratory research and high temperature CVD applications. Featuring an 1800mm alumina tube and precise 30 segment PID controllers for consistent material processing and annealing results.
Large Three Temperature Zone Rotating Tube Furnace for High Uniformity Material Sintering
Achieve precise thermal processing with our large three-temperature zone rotating tube furnace. Featuring Swedish Kanthal A1 elements and variable rotation, this system ensures uniform sintering and atmospheric control for all advanced material science and high-end industrial R&D.
1600C Three Zone Split Tube Furnace with Alumina Tube and Vacuum Flange
This 1600C three zone split tube furnace delivers precise thermal profiling and vacuum capabilities for advanced material synthesis and R&D, ensuring exceptional temperature uniformity across multiple independent heating zones with a robust build for high consistency.
Three Zone Tube Furnace with 11 Inch or 15 Inch Quartz Tube and Hinged Flanges for Vacuum Atmosphere Heat Treatment
Achieve superior thermal uniformity with this three zone tube furnace featuring 11 inch or 15 inch quartz tubes for large scale wafer annealing and material synthesis under precise vacuum control and motorized lid operation for industrial laboratory safety.
High Temperature 1600C Split Tube Furnace Vacuum Flanges Valves Optional 60mm 80mm Alumina Tube
High-performance 1600°C split tube furnace featuring vacuum flanges, valves, and precision PID control. This industrial unit supports 60mm or 80mm alumina tubes for atmosphere-controlled heat treatment and high-vacuum processing environments for advanced material R&D applications.
High Temperature 1700C Six Zone Split Tube Furnace with Alumina Tube and Water Cooled Flanges
Precision 1700C six zone split tube furnace engineered for material research and industrial vapor deposition applications. This versatile system provides independent temperature zone control and vacuum ready flanges for consistent thermal processing and advanced material development requirements ensuring maximum performance.