Tube Furnace
High Temperature 1500C Three Zone Split Tube Furnace with 80mm Alumina Tube and Vacuum Flange
Item Number: TU-65
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Product Overview



This high-performance thermal processing system is engineered to meet the rigorous demands of advanced material science and industrial R&D. Featuring a sophisticated three-zone heating architecture, the equipment allows for the creation of incredibly stable thermal plateaus or precise temperature gradients. By utilizing high-purity alumina processing tubes and a split-furnace design, this unit provides a versatile platform for high-temperature synthesis, sintering, and annealing up to 1500°C. The core value proposition lies in its ability to deliver repeatable, high-precision results in environments ranging from high vacuum to controlled atmospheres, ensuring that critical research remains consistent and scalable.
Targeting industries such as semiconductor manufacturing, aerospace ceramics, and metallurgical research, this system excels in applications where thermal uniformity is non-negotiable. The equipment is designed for multi-purpose laboratory environments where different processing tubes may need to be exchanged quickly to accommodate varying experimental requirements. Its robust construction and state-of-the-art heating elements make it a reliable workhorse for both academic institutions and industrial laboratories focusing on the next generation of materials.
Reliability is at the heart of this equipment's design. Incorporating a recently updated interlock safety system and high-grade silicon carbide heating elements, the unit is built for longevity and operational safety. Even under continuous high-temperature operation at 1400°C, the system maintains its structural integrity and precision. Industrial buyers can have full confidence in the equipment's performance under demanding duty cycles, supported by comprehensive PID control and redundant overheat protection mechanisms that allow for unattended operations without compromising safety or sample integrity.
Key Features
- Independently Controlled Three-Zone Heating: The system features three distinct 200 mm heating zones (total 600 mm), each managed by its own controller and S-type thermocouple. This allows for a 350 mm constant temperature zone with ±2ºC uniformity or the creation of custom thermal gradients for vapor transport applications.
- Precision PID Temperature Regulation: Equipped with three 30-segment programmable controllers, the equipment delivers advanced micro-processing logic to manage heating rates, cooling rates, and dwell times with an accuracy of ±1°C.
- Ergonomic Split-Chamber Design: The furnace housing is designed to open lengthwise, facilitating easy tube replacement, sample loading, and the integration of complex internal sensor arrays without dismantling the entire vacuum flange assembly.
- Advanced Safety Interlock System: Integrated into the furnace structure, a specialized safety interlock automatically cuts power to the heating elements when the chamber is opened, protecting operators from electrical and thermal exposure during inspection or maintenance.
- High-Performance Silicon Carbide (SiC) Elements: Outfitted with 24 high-grade 1500°C-rated SiC rods (14mm diameter), the system ensures rapid thermal response and uniform radiant heat transfer throughout the ceramic processing tube.
- Versatile Atmospheric Capability: The equipment is supplied with high-purity alumina tubes and precision-machined vacuum flanges, supporting vacuum levels down to 10E-5 torr (with molecular pumps) and low-pressure gas environments.
- Comprehensive Protection Circuitry: Built-in safeguards against overheating and broken thermocouples provide peace of mind during long-duration cycles, including audible and visual alarms that trigger automatically during deviations.
- Expandable Digital Communication: Featuring a standard RS485 port, the unit can be upgraded with PC-based control modules for real-time data logging, remote recipe management, and automated cycle verification via Labview-based software.
- Durable Mullite/Alumina Tube Options: The system supports various tube materials including standard alumina (80mm OD) and optional mullite (82mm OD), allowing users to optimize the chemical compatibility and thermal shock resistance based on specific process requirements.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| CVD / PECVD | Chemical Vapor Deposition for thin film growth and carbon nanotubes. | Precise gradient control enables uniform film deposition across large substrates. |
| Technical Ceramic Sintering | High-temperature densification of advanced oxide and non-oxide ceramics. | 1500°C peak capability allows for the synthesis of high-melting-point technical ceramics. |
| Semiconductor Annealing | Controlled thermal treatment of silicon wafers or compound semiconductor materials. | Three-zone control ensures identical thermal history across the entire process tube length. |
| Crystal Growth | Vapor transport and directional solidification techniques for single crystal synthesis. | Independent zone programming allows for the fine-tuning of the liquid-solid interface movement. |
| Vacuum Degassing | Removal of volatile impurities and gases from specialized metallurgical alloys. | High-vacuum flange design maintains structural integrity under deep vacuum at high temperatures. |
| Battery Material Research | Calcination and thermal cycling of anode/cathode precursors in inert or oxidizing atmospheres. | Robust S-type thermocouples provide the long-term stability required for multi-day cycling tests. |
Technical Specifications
| Parameter | Specification Details for TU-65 |
|---|---|
| Model Number | TU-65 |
| Max. Temperature | 1500°C (< 1 hour) |
| Continuous Working Temp. | 1400°C |
| Heating Rate | Recommended 5°C/min |
| Power Rating | 9KW |
| Input Voltage | AC220V Single-phase, 50/60Hz (Requires 50A Breaker) |
| Heating Zone Configuration | Three zones: 200 mm per zone (600 mm total length) |
| Uniform Temp. Zone | 350 mm (± 2ºC) when all zones are set to the same setpoint |
| Temperature Accuracy | ± 1ºC accuracy with PID 30-segment programmable control |
| Processing Tube (Standard) | Alumina Tube: 80 mm O.D × 74 mm I.D × 1200 mm L |
| Processing Tube (Optional) | Mullite Tube: 82 mm O.D × 73 mm I.D × 1200 mm L |
| Heating Elements | 24 pcs Silicon Carbide Rods (14mm Dia x 150mm Heat x 413mm L) |
| Thermocouples | 3 pcs S-Type (one for each heating zone) |
| Vacuum Capability | 10E-2 torr (mechanical pump) / 10E-5 torr (molecular pump) |
| Gas Flow Limitation | < 200 SCCM (200 ml/min) using two-stage regulator (< 3 PSI) |
| Max Operating Pressure | < 0.02 Mpa (for mullite tube applications) |
| Communication Interface | RS485 (Optional MTS-02 PC Control Module available) |
| Compliance | CE Certified; NRTL (UL61010) or CSA available upon request |
| Safety Features | Integrated interlock system (Active since June 2015); Alarm for overheat/broken TC |
Why Choose TU-65
- Superior Thermal Uniformity: The TU-65 architecture utilizes a triple-zone independent control system that eliminates the cold-end effects common in single-zone furnaces, providing a significantly larger usable processing window.
- Precision Engineering and Build Quality: Constructed with high-grade refractive materials and a heavy-duty split housing, this unit is designed for industrial-level durability and ease of maintenance in high-throughput labs.
- Enhanced Operator Safety: Unlike older models, the TU-65 features a modern hardware interlock system that minimizes the risk of accidental thermal or electrical exposure, meeting modern laboratory safety standards.
- Versatile Atmospheric Control: Whether your process requires a high vacuum or ultra-pure gas flow, the specialized flange design and thermal block placement ensure consistent results and protect the furnace internals.
- Proven Reliability and Support: With standard CE certification and optional NRTL/CSA compliance, this system is a globally recognized platform for material synthesis, backed by comprehensive technical support and available replacement consumables.
For more information on the TU-65 or to request a customized heating zone configuration for your specific R&D requirements, please contact our technical sales team for a formal quotation today.
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