Tube Furnace
Three Zone Split Tube Furnace 36 Inch Heating Length High Temperature 1200C Material Research Furnace with Vacuum Flanges
Item Number: TU-36
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Product Overview
This high-performance thermal processing system is engineered for advanced material science research and industrial R&D applications requiring precise atmosphere control and exceptional thermal uniformity. By utilizing a split-able chamber design, the equipment allows for rapid sample access and the seamless integration of complex experimental setups without disturbing pre-aligned tube components. This specific unit is designed to operate at temperatures up to 1200°C, making it an essential tool for high-stakes synthesis and annealing processes.
The system is primarily utilized in semiconductor manufacturing, metallurgical laboratories, and nanotechnology centers where controlled thermal gradients are critical. Its three-zone configuration allows for independent temperature management across a substantial heating length, providing researchers with the flexibility to establish specific growth environments or maintain an extended constant temperature zone. This adaptability ensures that the equipment can handle everything from simple sintering to complex chemical vapor deposition (CVD) workflows.
Built for reliability under demanding conditions, this furnace features a double-layer steel case and high-purity fibrous alumina insulation. The inclusion of cooling fans ensures a low surface temperature for operator safety, while the robust heating elements are designed for long-term consistency. Whether operating under a high vacuum or a specific gas atmosphere, the unit delivers the stability and precision required for reproducible scientific results in high-pressure industrial environments.
Key Features
- Independent Multi-Zone Thermal Control: The heating chamber is divided into three distinct 300mm zones, each managed by its own digital controller, allowing for the creation of precise thermal gradients or a significantly elongated 625mm constant temperature zone.
- High-Precision PID Regulation: Three microprocessor-based self-tuning PID controllers provide an accuracy of ±1°C, ensuring stable processing temperatures and preventing overshooting during sensitive ramp cycles.
- Innovative Split-Chamber Architecture: The split-able design facilitates easy cleaning, rapid cooling, and simplified tube replacement, which is particularly beneficial for complex experimental setups that involve delicate sample placement.
- Advanced Atmosphere Integrity: Equipped with SS 304 stainless steel vacuum sealing flanges and double high-temperature silicone O-rings, the system maintains high vacuum levels (up to 10-5 torr with a turbopump) and supports diverse gas environments.
- Premium Heating Elements: Utilizing Fe-Cr-Al alloy heating elements doped with Molybdenum, the furnace provides efficient heat transfer and exceptional durability for continuous operation at temperatures up to 1100°C.
- Robust Safety Engineering: Integrated over-temperature protection and broken thermocouple alarms allow for unattended operation, while the split cover includes interlock protection to ensure power is cut when the furnace is opened.
- Energy-Efficient Insulation: The use of high-purity fibrous alumina insulation minimizes heat loss and reduces power consumption, while the double-layer steel case with cooling fans maintains a safe exterior temperature.
- Sophisticated Programming: Each temperature controller features 30 programmable segments, allowing users to define complex heating, cooling, and dwelling profiles for sophisticated material transformations.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| 2D Materials Synthesis | Synthesis of Ta and Nb-doped MoS2 using specific thermal stages and gas flows. | Precise control over edge structure and doping density. |
| Nanowire Growth | Independent setting of annealing (400°C) and growth (700-860°C) stages for Ga2O3. | Optimizes catalyst alloying and axial growth morphology. |
| Diffusion Annealing | High-temperature homogenization of Fe-Ni-Cu alloys at 1000°C. | Eliminates diffusion rate deviations via thermal uniformity. |
| Sintering Advanced Ceramics | Controlled thermal processing of ceramic precursors under vacuum or inert gas. | Prevents oxidation and ensures high-density material results. |
| CVD / PECVD Processes | Serving as the thermal reactor for chemical vapor deposition of thin films. | Stable temperature field across the entire deposition zone. |
| Metallurgical Research | Phase transformation studies requiring rapid cooling and precise soaking times. | Split design allows for fast quenching and easy sample removal. |
| Semiconductor Doping | Diffusion of dopants into silicon wafers or other substrates under controlled purity. | Clean environment maintained by high-grade quartz and SS flanges. |
Technical Specifications
| Parameter | TU-36-80 | TU-36-101 | TU-36-125 |
|---|---|---|---|
| Quartz Tube Size (OD x ID x L) | 80 x 72 x 1400 mm | 101 x 92 x 1400 mm | 130 x 120 x 1400 mm |
| Max. Heating Temperature | 1200°C | 1200°C | 1200°C |
| Continuous Temperature | 1100°C | 1100°C | 1100°C |
| Max. Temp (Vacuum) | 1000°C | 1000°C | 1000°C |
| Heating Zone Length | 900 mm (300mm x 3) | 900 mm (300mm x 3) | 900 mm (300mm x 3) |
| Constant Temp Zone | 625 mm (25") | 625 mm (25") | 625 mm (25") |
| Temperature Accuracy | ± 1°C | ± 1°C | ± 1°C |
| Heating Rate (Max) | 20°C / min | 20°C / min | 20°C / min |
| Voltage | 208-240V Single Phase | 208-240V Single Phase | 208-240V Single Phase |
| Max. Power | 7.0 KW | 7.0 KW | 7.0 KW |
| Temperature Controller | 3x 30-Segment PID | 3x 30-Segment PID | 3x 30-Segment PID |
| Vacuum Level | 10-2 to 10-5 Torr | 10-2 to 10-5 Torr | 10-2 to 10-5 Torr |
| Flange Material | SS 304 | SS 304 | SS 304 |
| Communications | RS-485 | RS-485 | RS-485 |
| Compliance | CE Certified | CE Certified | CE Certified |
Why Choose Our Three-Zone Split Tube Furnace
- Proven Thermal Uniformity: By utilizing three independently controlled heating zones, this system offers a significantly longer and more stable uniform temperature region compared to single-zone alternatives, ensuring consistent results across larger batches.
- Industrial Grade Reliability: Built with premium Fe-Cr-Al elements and a double-walled steel chassis, the unit is designed for 24/7 industrial and research operations, providing a low cost of ownership through long-term durability.
- Precision Engineering: The integration of microprocessor-based self-tuning PID controllers ensures that even the most complex 30-segment thermal profiles are executed with ±1°C accuracy, critical for high-purity synthesis.
- Versatile Integration: With optional upgrades for PC control, Eurotherm controllers, and various vacuum pump configurations, this furnace can be customized to meet the specific requirements of any material science workflow.
- Safety and Compliance: Standard features include over-temperature alarms, thermocouple failure protection, and CE certification, ensuring that the equipment meets international safety standards for laboratory use.
Contact our technical team today for a detailed quote or to discuss a customized thermal solution tailored to your specific research requirements.
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