Tube Furnace
Three Zone Split Tube Furnace 36 Inch Heating Length High Temperature 1200C Material Research Furnace with Vacuum Flanges
Item Number: TU-36
Shipping: Contact us to get shipping details Enjoy On-time Dispatch Guarantee.
Product Overview

This high-performance thermal processing system is engineered for advanced material science research and industrial R&D applications requiring precise atmosphere control and exceptional thermal uniformity. By utilizing a split-able chamber design, the equipment allows for rapid sample access and the seamless integration of complex experimental setups without disturbing pre-aligned tube components. This specific unit is designed to operate at temperatures up to 1200°C, making it an essential tool for high-stakes synthesis and annealing processes.
The system is primarily utilized in semiconductor manufacturing, metallurgical laboratories, and nanotechnology centers where controlled thermal gradients are critical. Its three-zone configuration allows for independent temperature management across a substantial heating length, providing researchers with the flexibility to establish specific growth environments or maintain an extended constant temperature zone. This adaptability ensures that the equipment can handle everything from simple sintering to complex chemical vapor deposition (CVD) workflows.
Built for reliability under demanding conditions, this furnace features a double-layer steel case and high-purity fibrous alumina insulation. The inclusion of cooling fans ensures a low surface temperature for operator safety, while the robust heating elements are designed for long-term consistency. Whether operating under a high vacuum or a specific gas atmosphere, the unit delivers the stability and precision required for reproducible scientific results in high-pressure industrial environments.
Key Features
- Independent Multi-Zone Thermal Control: The heating chamber is divided into three distinct 300mm zones, each managed by its own digital controller, allowing for the creation of precise thermal gradients or a significantly elongated 625mm constant temperature zone.
- High-Precision PID Regulation: Three microprocessor-based self-tuning PID controllers provide an accuracy of ±1°C, ensuring stable processing temperatures and preventing overshooting during sensitive ramp cycles.
- Innovative Split-Chamber Architecture: The split-able design facilitates easy cleaning, rapid cooling, and simplified tube replacement, which is particularly beneficial for complex experimental setups that involve delicate sample placement.
- Advanced Atmosphere Integrity: Equipped with SS 304 stainless steel vacuum sealing flanges and double high-temperature silicone O-rings, the system maintains high vacuum levels (up to 10-5 torr with a turbopump) and supports diverse gas environments.
- Premium Heating Elements: Utilizing Fe-Cr-Al alloy heating elements doped with Molybdenum, the furnace provides efficient heat transfer and exceptional durability for continuous operation at temperatures up to 1100°C.
- Robust Safety Engineering: Integrated over-temperature protection and broken thermocouple alarms allow for unattended operation, while the split cover includes interlock protection to ensure power is cut when the furnace is opened.
- Energy-Efficient Insulation: The use of high-purity fibrous alumina insulation minimizes heat loss and reduces power consumption, while the double-layer steel case with cooling fans maintains a safe exterior temperature.
- Sophisticated Programming: Each temperature controller features 30 programmable segments, allowing users to define complex heating, cooling, and dwelling profiles for sophisticated material transformations.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| 2D Materials Synthesis | Synthesis of Ta and Nb-doped MoS2 using specific thermal stages and gas flows. | Precise control over edge structure and doping density. |
| Nanowire Growth | Independent setting of annealing (400°C) and growth (700-860°C) stages for Ga2O3. | Optimizes catalyst alloying and axial growth morphology. |
| Diffusion Annealing | High-temperature homogenization of Fe-Ni-Cu alloys at 1000°C. | Eliminates diffusion rate deviations via thermal uniformity. |
| Sintering Advanced Ceramics | Controlled thermal processing of ceramic precursors under vacuum or inert gas. | Prevents oxidation and ensures high-density material results. |
| CVD / PECVD Processes | Serving as the thermal reactor for chemical vapor deposition of thin films. | Stable temperature field across the entire deposition zone. |
| Metallurgical Research | Phase transformation studies requiring rapid cooling and precise soaking times. | Split design allows for fast quenching and easy sample removal. |
| Semiconductor Doping | Diffusion of dopants into silicon wafers or other substrates under controlled purity. | Clean environment maintained by high-grade quartz and SS flanges. |
Technical Specifications
| Parameter | TU-36-80 | TU-36-101 | TU-36-125 |
|---|---|---|---|
| Quartz Tube Size (OD x ID x L) | 80 x 72 x 1400 mm | 101 x 92 x 1400 mm | 130 x 120 x 1400 mm |
| Max. Heating Temperature | 1200°C | 1200°C | 1200°C |
| Continuous Temperature | 1100°C | 1100°C | 1100°C |
| Max. Temp (Vacuum) | 1000°C | 1000°C | 1000°C |
| Heating Zone Length | 900 mm (300mm x 3) | 900 mm (300mm x 3) | 900 mm (300mm x 3) |
| Constant Temp Zone | 625 mm (25") | 625 mm (25") | 625 mm (25") |
| Temperature Accuracy | ± 1°C | ± 1°C | ± 1°C |
| Heating Rate (Max) | 20°C / min | 20°C / min | 20°C / min |
| Voltage | 208-240V Single Phase | 208-240V Single Phase | 208-240V Single Phase |
| Max. Power | 7.0 KW | 7.0 KW | 7.0 KW |
| Temperature Controller | 3x 30-Segment PID | 3x 30-Segment PID | 3x 30-Segment PID |
| Vacuum Level | 10-2 to 10-5 Torr | 10-2 to 10-5 Torr | 10-2 to 10-5 Torr |
| Flange Material | SS 304 | SS 304 | SS 304 |
| Communications | RS-485 | RS-485 | RS-485 |
| Compliance | CE Certified | CE Certified | CE Certified |
Why Choose Our Three-Zone Split Tube Furnace
- Proven Thermal Uniformity: By utilizing three independently controlled heating zones, this system offers a significantly longer and more stable uniform temperature region compared to single-zone alternatives, ensuring consistent results across larger batches.
- Industrial Grade Reliability: Built with premium Fe-Cr-Al elements and a double-walled steel chassis, the unit is designed for 24/7 industrial and research operations, providing a low cost of ownership through long-term durability.
- Precision Engineering: The integration of microprocessor-based self-tuning PID controllers ensures that even the most complex 30-segment thermal profiles are executed with ±1°C accuracy, critical for high-purity synthesis.
- Versatile Integration: With optional upgrades for PC control, Eurotherm controllers, and various vacuum pump configurations, this furnace can be customized to meet the specific requirements of any material science workflow.
- Safety and Compliance: Standard features include over-temperature alarms, thermocouple failure protection, and CE certification, ensuring that the equipment meets international safety standards for laboratory use.
Contact our technical team today for a detailed quote or to discuss a customized thermal solution tailored to your specific research requirements.
REQUEST A QUOTE
Our professional team will reply to you within one business day. Please feel free to contact us!
Related Products
Three Zone Heating Split Vertical Tube Furnace 1700 High Temperature Vacuum Atmosphere Thermal Process System
Advanced 1700°C three zone heating split vertical tube furnace for industrial R&D and material science applications. This precision system features independent thermal control, high vacuum capabilities, and energy efficient insulation for consistent high temperature processing and rapid sample quenching results.
High Temperature 1500C Three Zone Split Tube Furnace with 80mm Alumina Tube and Vacuum Flange
This engineered 1500C three zone split tube furnace provides an 80mm alumina tube and precise PID controls. It is ideal for advanced material research, CVD processes, and industrial thermal treatments requiring exceptional temperature uniformity and high vacuum stability.
24 Inch Three Zone Split Tube Furnace with Optional Quartz Tube and Vacuum Flange System for High Temperature Material Synthesis
Accelerate your material research with this premium 24 inch three-zone split tube furnace. Featuring independent temperature control, quartz tube compatibility, and vacuum-sealed flanges, it delivers precise thermal processing up to 1200°C for demanding laboratory and industrial R&D applications.
1200°C Three Zone Split Tube Furnace with 18 Inch Heating Length and Vacuum Flanges
Optimize thermal processing with this 1200°C three-zone split tube furnace. Featuring an 18-inch heating length and precise PID control, it provides exceptional temperature uniformity for advanced material research, annealing, sintering, and professional industrial R&D applications across global laboratory facilities.
1100°C Three Zone Tube Furnace with 8.5 to 11 Inch OD Quartz Tube and Vacuum Flanges for Large Wafer Processing
Precision 1100°C three-zone tube furnace featuring massive 8.5 to 11 inch OD quartz tubes and hermetic flanges. Engineered for large-scale wafer processing and advanced material research with superior thermal uniformity and high-vacuum compatibility for industrial R&D projects and production.
High Temperature Split Tube Furnace 1500C for Material Research Vacuum and Atmosphere Thermal Processing
This 1500C high temperature split tube furnace delivers precision thermal processing for advanced material research and industrial sintering applications featuring dual shell construction integrated PID control and vacuum ready stainless steel flanges for reliable performance in demanding labs.
Three Zone Tube Furnace with 24 Inch Heating Length and Hinged Flange Quartz Tube System
This professional three zone tube furnace features a 24 inch heating length and hinged flanges for efficient sample loading. Optimized for 1200°C processing, it delivers precise temperature uniformity and vacuum compatibility for advanced industrial material research.
High Temperature 1700C Three Zone Tube Furnace with Alumina Tube 50mm 60mm 80mm OD for Material Research and Industrial Heat Treatment
This high-performance 1700°C three-zone tube furnace features precision Alumina tubes and independent heating control. Engineered for advanced material research, it delivers exceptional thermal uniformity and stability for chemical vapor deposition and complex atmosphere-controlled industrial heat treatment processes.
High Temperature Three Zone Tube Furnace 1700C with Alumina Tube and Water Cooled Flanges
This advanced high temperature three zone tube furnace provides precision 1700C thermal processing and atmosphere control. Ideal for semiconductor research, advanced metallurgy, and ceramic sintering, the system delivers superior uniformity via independent PID temperature controllers.
1600C Three Zone Split Tube Furnace with Alumina Tube and Vacuum Flange
This 1600C three zone split tube furnace delivers precise thermal profiling and vacuum capabilities for advanced material synthesis and R&D, ensuring exceptional temperature uniformity across multiple independent heating zones with a robust build for high consistency.
High Temperature Three Zone Split Tube Furnace 1200C Max 35.4 Inch Heating Length 8 Inch ID Tube
This high-performance three-zone split tube furnace features a 35.4-inch heating zone and 8-inch diameter tube for advanced thermal processing. Achieve 1200C peak temperatures with independent zone management for superior uniformity in vacuum or gas atmospheres.
Large Vertical Three Zone Tube Furnace with 8 Inch or 11 Inch Quartz Tube and High Vacuum Flanges 1200C
Our engineered high-capacity vertical three-zone furnace offers independent thermal control and massive 11-inch quartz tube compatibility to deliver superior uniformity plus enhanced vacuum integrity for critical industrial annealing sintering research and advanced material science development within demanding laboratory environments
High Temperature Three Temperature Zone Tube Furnace for Advanced Material Science Sintering and Chemical Vapor Deposition Applications
Optimize thermal processing with this precision three-zone tube furnace featuring 1700°C maximum temperature and independent PID control for superior uniformity ideal for CVD vacuum annealing and material sintering in advanced research and industrial R&D laboratories or large scale manufacturing facilities
1200C Three Zone Split Vertical Tube Furnace 4 Inch Quartz Tube Stainless Steel Vacuum Flanges
This 1200C three zone split vertical tube furnace features a 4 inch quartz tube and stainless steel vacuum flanges for high-precision thermal processing. Perfect for material quenching and synthesis, this robust system ensures uniform heating and rapid sample loading access.
High Temperature 1600C Split Tube Furnace Vacuum Flanges Valves Optional 60mm 80mm Alumina Tube
High-performance 1600°C split tube furnace featuring vacuum flanges, valves, and precision PID control. This industrial unit supports 60mm or 80mm alumina tubes for atmosphere-controlled heat treatment and high-vacuum processing environments for advanced material R&D applications.
Three Zone Tube Furnace with 11 Inch or 15 Inch Quartz Tube and Hinged Flanges for Vacuum Atmosphere Heat Treatment
Achieve superior thermal uniformity with this three zone tube furnace featuring 11 inch or 15 inch quartz tubes for large scale wafer annealing and material synthesis under precise vacuum control and motorized lid operation for industrial laboratory safety.
1200C Max Three Zone Tube Furnace 6 Inch OD Max with Tube and Flange
Optimize thermal processing with this 1200C three zone tube furnace featuring a 6 inch OD capacity and advanced touch screen control. This high precision system ensures uniform temperature distribution for advanced material research semiconductor annealing and industrial heat treatment applications.
1200C High Temperature 5 Inch Split Vacuum Tube Furnace with 12 Inch Heating Zone and Separated PID Controller
Achieve precision thermal processing with this high-performance 1200°C split vacuum tube furnace. Featuring a large 5-inch quartz tube, 12-inch heating zone, and separated PID controller, this NRTL-certified system ensures reliable results for advanced material research and industrial R&D applications.
Three Zone Quartz Tube Furnace with 3 Channel Gas Mixer Vacuum Pump and Anti Corrosive Vacuum Gauge
This high precision 1200C three zone quartz tube furnace system provides integrated three channel gas mixing and anti corrosive vacuum monitoring for professional CVD and material synthesis within demanding laboratory research and industrial R&D process environments.
Split Vertical Tube Furnace with 1200C Quartz Tube and Stainless Steel Vacuum Flanges for Rapid Thermal Processing
Maximize research efficiency with this 1200°C split vertical tube furnace featuring a 5-inch quartz tube and precision PID control for rapid quenching, vacuum processing, and advanced material synthesis in high-demand industrial laboratory environments.