Tube Furnace
1600C Three Zone Split Tube Furnace with Alumina Tube and Vacuum Flange
Item Number: TU-71
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Product Overview



This high-temperature thermal processing system is engineered for advanced material research and industrial R&D where precise temperature control and atmospheric flexibility are paramount. By utilizing a three-zone heating architecture, the equipment allows for the creation of sophisticated thermal gradients or a significantly extended constant temperature zone, making it an indispensable tool for complex synthesis processes. The equipment is designed to operate reliably up to 1600°C, providing the thermal energy required for high-purity ceramic sintering, semiconductor doping, and metallic annealing under controlled conditions.
The system features a unique split-able furnace body that facilitates rapid access to the process chamber. This configuration is particularly advantageous for researchers who need to swap processing tubes frequently or monitor the physical state of samples between cycles without dismantling complex flange assemblies. Target industries include aerospace engineering, energy storage development, and advanced semiconductor manufacturing, where the integrity of the thermal environment directly dictates the quality of the final material.
Reliability is central to the design of this unit. Equipped with heavy-duty silicon carbide heating elements and high-accuracy S-type thermocouples, it maintains consistent performance even under demanding continuous operation. Procurement teams can be confident in the structural integrity of the high-purity alumina tube and the efficiency of the vacuum sealing system, which together ensure a pristine environment for sensitive material processing. This system represents a robust investment in long-term operational consistency and high-precision thermal engineering.
Key Features
- Three-Zone Independent Control: This furnace incorporates three distinct heating zones, each managed by its own microprocessor-based PID controller. This allows operators to establish precise thermal gradients or maintain a wide 350mm uniform temperature zone, providing unparalleled flexibility for diverse experimental requirements.
- High-Performance Silicon Carbide Heating: The system is powered by 24 pieces of 1600°grade silicon carbide (SiC) heating elements. These elements are chosen for their exceptional thermal stability and ability to reach 1550°C quickly while maintaining a long operational lifespan in industrial settings.
- Precision PID Temperature Management: Utilizing advanced self-tuning PID control, the system ensures +/- 1°C accuracy with zero overshooting. Each of the three controllers supports 30 programmable segments, allowing for complex ramp, soak, and cool cycles to be automated with high repeatability.
- Split-Body Design for Enhanced Accessibility: The furnace housing is designed to unlock and open lengthwise. This engineering choice simplifies the installation of the alumina tube, placement of thermal blocks, and management of internal samples, significantly reducing downtime between experimental runs.
- Advanced Vacuum Sealing System: Equipped with high-quality stainless steel vacuum sealing flanges and silicone O-rings, the unit can achieve vacuum levels of 10E-2 Torr with standard pumps or 10-5 Torr with molecular systems, ensuring an oxygen-free environment for sensitive materials.
- Durable Alumina Process Tube: The equipment includes a high-purity 80mm OD alumina tube capable of withstanding extreme thermal shock and chemical corrosion. This makes the system ideal for processes involving reactive gases or high-purity powders that require a non-contaminating vessel.
- Integrated Safety and Monitoring: Built-in over-temperature and thermocouple failure alarms provide a critical safety layer for unattended operation. The use of S-type thermocouples ensures highly accurate feedback for the high-temperature ranges targeted by this system.
- Scalable Digital Communication: A standard DB9 PC communication port is integrated, allowing for remote monitoring and data logging. This functionality is essential for industrial R&D teams needing to document thermal history and maintain digital records of heat treatment cycles.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| CVD & PECVD Research | Synthesis of carbon nanotubes, graphene, and thin-film coatings using precursor gases. | Precise three-zone profiling ensures uniform precursor deposition across large areas. |
| Advanced Ceramic Sintering | High-temperature densification of alumina, zirconia, and other technical ceramic materials. | 1600°C capability and vacuum integrity prevent oxidation during the sintering process. |
| Semiconductor Doping | Controlled diffusion of dopants into semiconductor wafers or substrates. | Exceptional +/- 1°C temperature accuracy ensures consistent electronic properties. |
| Atmospheric Annealing | Heat treatment of metallic alloys or glass in inert or reducing atmospheres. | Vacuum-sealed flanges prevent atmospheric contamination, ensuring material purity. |
| Crystal Growth | Gradual thermal cooling from a melt to produce single-crystal structures. | Independent zone control allows for the precise temperature gradients required for slow growth. |
| Catalyst Synthesis | High-temperature activation of catalyst supports and active phases for chemical processing. | Robust SiC elements provide the sustained high temperatures needed for efficient activation. |
| Powder Metallurgy | Sintering of metal powders into high-density components for aerospace or automotive use. | Split furnace design allows for easy loading of multiple high-mass samples. |
| Thermal Cycling Tests | Testing components under repetitive high-temperature stress to evaluate fatigue. | Programmed 30-segment controllers automate complex thermal stress profiles for long-term testing. |
Technical Specifications
| Parameter | Detailed Specification (Unit/Value) |
|---|---|
| Model Identifier | TU-71 |
| Power Input | 9.0 kW |
| Working Voltage | 208-240VAC, 50/60Hz |
| Max. Working Temperature | 1550°C |
| Continuous Working Temperature | 1500°C |
| Recommended Heating Rate | < 10°C / minute |
| Heating Elements | 24 pcs 1600°C grade Silicon Carbide (SiC) (12mm Dia. x 150mm heating x 368mm L) |
| Thermocouples | 3 pcs Built-in S-type thermocouples |
| Processing Tube Material | High-Purity Alumina Tube |
| Processing Tube Dimensions | 80mm O.D x 74mm I.D x 1200mm L |
| Heating Zone Configuration | Three zones: 200mm each (600mm total length) |
| Constant Temp. Zone Length | 350mm (+/- 2°C) |
| Temperature Controller | 3x Microprocessor PID; 30 segments (ramping, cooling, dwelling) |
| Temperature Accuracy | +/- 1°C |
| Vacuum Capability | 10E-2 Torr (Mechanical Pump); 10-5 Torr (Molecular Pump) |
| Communication Interface | Default DB9 PC Port (Optional PC control module available) |
| Flange System | Vacuum-sealed flanges with silicone O-rings included |
| Maximum Internal Pressure | < 0.02 MPa (0.2 bar / 3 PSI) |
| Safety Features | Over-temperature alarm, Thermocouple failure alarm |
| Compliance | CE Certified (NRTL or CSA available at extra cost) |
| Power Cable | 10 feet heavy-duty 10-3 AWG UL-approved (Plug not included) |
Why Choose This Thermal Processing System
- Superior Thermal Accuracy: The three-zone independent control architecture allows for a massive 350mm uniform temperature zone, significantly reducing margin of error for large-batch material processing.
- Industrial-Grade Durability: Constructed with 1600°C grade SiC heating elements and heavy-duty alumina tubing, this furnace is built to withstand the rigors of continuous industrial production and high-temperature research.
- Versatile Atmospheric Control: Whether your process requires a high vacuum or a low-pressure inert gas environment, the advanced flange and sealing system provides the necessary isolation for modern material synthesis.
- Precision Engineering and Safety: With full CE certification and the option for NRTL/CSA upgrades, this system meets the strictest global standards for laboratory and industrial safety, ensuring peace of mind during long-term projects.
- Customizable Control Options: Beyond the standard high-precision PID controllers, the system supports upgrades to Eurotherm controls for even higher accuracy and Labview-based software for comprehensive data management.
Our engineering team is ready to help you configure the ideal thermal environment for your specific application requirements. Contact us today for a technical consultation or a formal quote."
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