1200°C Three Zone Split Tube Furnace with 18 Inch Heating Length and Vacuum Flanges

Tube Furnace

1200°C Three Zone Split Tube Furnace with 18 Inch Heating Length and Vacuum Flanges

Item Number: TU-33

Maximum Temperature: 1200°C Heating Zone Configuration: 3-Zone (18" Total Length) Temperature Accuracy: ±1°C (PID Controlled)
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Product Overview

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This industrial-grade three-zone split tube furnace is engineered for high-precision thermal processing in material science and advanced research environments. Designed to facilitate sample annealing, diffusion, and sintering, the equipment offers a versatile platform for multi-atmosphere treatments up to 1200°C. The split-able heating chamber allows for rapid cooling and easy sample loading, making it an indispensable tool for laboratories requiring both high throughput and exacting thermal profiles. Its robust construction ensures long-term operational stability under rigorous duty cycles.

The core value of this system lies in its triple-zone heating configuration, which enables users to establish precise temperature gradients or maintain an exceptionally long uniform heating zone across an 18-inch span. This capability is critical for chemical vapor deposition (CVD) processes, crystal growth, and complex heat treatments where thermal uniformity or specific temperature steps are mandatory. By utilizing a compact footprint without compromising on performance, the unit serves as a high-efficiency solution for semiconductor research, ceramic processing, and metallurgical analysis.

Reliability is foundational to the design of this thermal processing unit. Built with a heavy-duty double-layer steel case and integrated cooling systems, the equipment maintains a low exterior surface temperature even during prolonged high-temperature operation. The integration of high-purity alumina fiber insulation and Mo-doped heating elements provides excellent thermal efficiency and rapid response times. Procurement teams can specify this system with confidence, knowing it is designed to meet the demanding standards of modern industrial R&D while providing consistent, repeatable results year after year.

Key Features

  • Independent Three-Zone Temperature Control: The heating chamber is divided into three distinct zones (6" each), each controlled by its own dedicated microprocessor-based PID controller. This allows for the creation of precise thermal gradients or a highly stable uniform temperature zone of up to 200mm, providing unmatched flexibility for complex atmospheric experiments.
  • Split-able Chamber Architecture: The furnace features a hinged split-cover design that allows for easy access to the process tube. This architecture not only simplifies the installation of thermocouples and sample loading but also permits rapid cooling of the tube after a process is complete, significantly shortening cycle times.
  • Advanced Safety Interlock System: Integrated safety sensors automatically cut power to the heating elements whenever the furnace cover is opened. This protection mechanism prevents accidental exposure to high-voltage components and protects the operator from radiant heat during necessary chamber access.
  • Precision PID Regulation: Each of the three controllers offers 30 programmable segments for sophisticated ramp and soak profiles. The self-tuning PID function ensures temperature accuracy within ±1°C, eliminating overshooting and providing the thermal stability required for sensitive material synthesis.
  • High-Performance Heating Elements: Utilizing Fe-Cr-Al alloy doped with Molybdenum, the heating elements are designed for longevity and rapid thermal response. These elements are strategically positioned to provide maximum radiant heat transfer to the process tube while resisting oxidation at temperatures up to 1200°C.
  • Dual-Layer Forced Air Cooling: The furnace housing is constructed with a double-layer steel case. Integrated cooling fans circulate air between the layers, ensuring that the outer shell remains safe to touch and protecting the internal electronics from heat-induced degradation.
  • Versatile Vacuum and Gas Handling: The system comes standard with stainless steel 304 vacuum flanges featuring double high-temperature silicone O-rings. These flanges support vacuum levels as low as 10E-5 torr (with turbo pump) and include integrated needle valves and pressure gauges for precise atmosphere control.
  • Premium Thermal Insulation: High-purity fibrous alumina insulation lines the interior of the furnace. This material is chosen for its low thermal mass and exceptional insulating properties, which significantly reduce power consumption and allow for faster heating rates up to 20°C/min.
  • Digital Communication and PC Integration: Each unit is equipped with an RS485 communication port, allowing for remote monitoring and data logging. Optional software packages enable users to manage heat-treatment recipes and record real-time data from a central computer workstation.
  • Customizable Tube Diameters: To accommodate various sample sizes and throughput requirements, the system is compatible with 60mm, 80mm, and 100mm O.D. quartz tubes. Each configuration includes matching ceramic tube blocks to minimize heat radiation and protect the flange seals.

Applications

Application Description Key Benefit
Semiconductor Diffusion Doping of silicon wafers and other semiconductor substrates at controlled temperatures. Precise 3-zone control ensures uniform dopant distribution across the sample.
CVD / PECVD Growing thin films and nanostructures such as carbon nanotubes or graphene. Exceptional gradient control allows for specific precursor cracking and deposition temperatures.
Material Annealing Relieving internal stresses in metals and alloys through controlled heating and cooling cycles. Split-chamber design allows for rapid cooling rates required for specific microstructure formation.
Sintering of Ceramics Consolidating ceramic powder compacts into dense, functional components. High temperature accuracy of ±1°C prevents grain growth and ensures consistent density.
Atmosphere Research Testing material reactions under vacuum or specific inert/reducing gas environments. High-integrity vacuum flanges and integrated gauges allow for repeatable atmospheric conditions.
Tube Calibration Using the three zones to calibrate thermal sensors or thermocouples against a known gradient. Wide temperature range and localized zone control provide a stable environment for calibration.
Battery Material R&D Thermal processing of cathode and anode powders in inert environments. Maintains purity and prevents oxidation during critical calcination steps.

Technical Specifications

System Configuration & Electrical

Parameter Specification (Model TU-33)
Item Number TU-33
Rated Voltage AC 208-240V Single Phase, 50/60 Hz
Max. Power Consumption 4.0 KW
Heating Elements Fe-Cr-Al Alloy doped by Mo
Thermocouple Type K-Type (3 units, one per zone)
Compliance CE Certified (UL Ready / NRTL available upon request)

Thermal Performance

Parameter Specification
Max. Heating Temperature 1200°C (Flowing Gas)
Continuous Heating Temperature 1100°C (Flowing Gas)
Max. Temperature (Vacuum) 1000°C
Heating Zone Total Length 450 mm (18")
Individual Zone Lengths Zone 1: 152.4mm / Zone 2: 152.4mm / Zone 3: 152.4mm
Constant Temp. Zone (±1ºC) 200 mm
Max. Temperature Gradient ~100 ºC/cm at central 1200°C
Max. Heating Rate 20°C / min
Temperature Accuracy ±1°C

Tube and Flange Variants

Feature TU-33-60 TU-33-80 TU-33-100
Tube Material Fused Quartz Fused Quartz Fused Quartz
Tube Dimensions (O.D x L) 60 mm x 1000 mm 80 mm x 1000 mm 100 mm x 1000 mm
Internal Diameter (I.D) 55 mm 72 mm 92 mm
Flange Type SS304 Vacuum Flange SS304 Vacuum Flange SS304 Vacuum Flange
Vacuum Port KF25 KF25 KF25
Thermal Blocks Included 2x Alumina Fiber 2x Alumina Fiber 2x Alumina Fiber

Control Systems & Interface

Parameter Standard Controller Optional Eurotherm Upgrade
Segments 30 Programmable Segments 8 or 24 Segments (Recipe Based)
PID Auto-Tune Included Included
Accuracy ±1.0ºC ±0.1ºC
Communication RS485 RS485
Alarms Over-temp & Broken T/C Multi-stage Relay (Form A/C)
Software Compatibility MTS02 Labview Based PC Recipe Management Tools

Why Choose Us

Investing in this three-zone split tube furnace ensures your laboratory is equipped with a high-performance thermal system designed for precision and durability. Unlike standard single-zone furnaces, this system provides the modularity required to conduct complex atmospheric experiments and gradient-based synthesis with extreme accuracy. The split-cover design significantly enhances lab productivity by allowing for rapid cooling and easy maintenance of the quartz process tube.

  • Superior Thermal Engineering: The use of high-purity fibrous alumina and specialized Mo-doped heating elements ensures rapid thermal cycling without compromising the structural integrity of the furnace.
  • Safety-First Design: With UL-ready components, CE certification, and integrated interlock protection, this unit meets the stringent safety requirements of industrial and academic research facilities.
  • Precision Atmosphere Control: The included SS304 vacuum flanges and the ability to operate under flowing gas or high vacuum make this a truly versatile platform for diverse material research applications.
  • Long-Term Reliability: Every system is tested for temperature stability and vacuum integrity before shipping, ensuring that your equipment arrives ready for immediate, heavy-duty service.
  • Customizable for Your Workflow: From digital molecular pump upgrades to PC-based remote control and data logging software, this system can be tailored to meet your specific research or production needs.

For more information on the TU-33 series or to request a customized quote for your specific laboratory requirements, please contact our technical sales team today.

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