1200°C 5 Inch Vertical Quartz Tube Furnace with Stainless Steel Vacuum Flanges

Tube Furnace

1200°C 5 Inch Vertical Quartz Tube Furnace with Stainless Steel Vacuum Flanges

Item Number: TU-C08

Maximum Temperature: 1200°C Tube Dimensions: 130mm O.D. x 750mm L Heating Zone: 300mm Single Zone
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Product Overview

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This vertical thermal processing system is engineered for high-precision material research and industrial heat treatment. By utilizing a vertical orientation, the equipment facilitates specialized processes such as quenching tests and vapor phase deposition that require gravity-assisted sample positioning or specific convective flow patterns. This unit provides a robust solution for laboratories needing rapid heating and cooling capabilities within a strictly controlled vacuum or gas-purged environment, ensuring high-purity results for sensitive material synthesis.

The system is particularly well-suited for advanced material science applications, including the development of thin films, powder coatings, and basic chemical vapor deposition (CVD) processes. Its workspace is designed to accommodate a large 5-inch diameter quartz tube, providing ample volume for diverse experimental setups. Target industries range from semiconductor research and aerospace component testing to metallurgy and ceramic engineering, where precision and repeatability are non-negotiable requirements for successful R&D outcomes.

Built with a focus on long-term operational reliability, the furnace features a double-layer steel casing and high-purity alumina fiber insulation. This construction ensures maximum energy efficiency and exceptional temperature uniformity while maintaining a cool exterior surface for operator safety. The integration of advanced PID control technology allows for complex thermal profiles, giving researchers the confidence to execute demanding heating protocols with consistent, documented performance across every cycle.

Key Features

  • Vertical Processing Innovation: The vertical configuration of this system is optimized for quenching and deposition processes where sample orientation is critical. The design allows for easy suspension of samples within the hot zone, facilitating uniform exposure to heat and reactive gases.
  • High-Capacity Quartz Chamber: Equipped with a 130mm O.D. fused quartz tube, this furnace accommodates larger samples or multiple crucibles simultaneously. The vacuum-grade quartz ensures chemical inertness and allows for visual monitoring of internal processes during heat treatment.
  • Integrated Split Door Design: The furnace casing features a split-body architecture supported by a robust aluminum frame. This design allows for rapid installation and removal of the processing tube, as well as easy access for maintenance or experimental adjustments without needing to disassemble the entire exhaust system.
  • Precision Atmosphere Control: Two heavy-duty stainless steel flanges provide a hermetic seal for vacuum or inert gas operations. Integrated needle valves, vacuum gauges, and barbed fittings enable precise regulation of the internal environment, supporting pressures down to 10-5 Torr with appropriate pumping systems.
  • Sophisticated Thermal Management: Powered by a 30-segment programmable PID controller, the system offers ±1°C accuracy. This allows for meticulous control over heating rates, dwell times, and cooling stages, featuring built-in auto-tune functions and comprehensive over-temperature protection.
  • Durable Heating Elements: The unit utilizes specialized Fe-Cr-Al alloy heating elements doped with Molybdenum. These elements are designed to withstand the rigors of high-temperature cycling while maintaining stable resistance and long service life in demanding industrial environments.
  • Advanced Safety Engineering: A double-layer steel structure with active air cooling minimizes exterior heat radiation. Included safety alarms and automatic shutdown protocols for overheating or thermocouple failure ensure the system remains protected during unattended operation.
  • Modular Expansion Capability: The equipment is designed for versatility. It can be readily modified into a fluidized bed system for powder coating or a complete CVD/PVD deposition furnace, providing a future-proof platform for evolving research requirements.

Applications

Application Description Key Benefit
Quenching Research Vertical orientation allows for the rapid drop-release of samples into cooling media located beneath the furnace. Minimal heat loss during transfer ensures accurate phase transformation data.
CVD / PVD Coating Synthesis of high-purity thin films on various substrates using vaporized precursors in a controlled atmosphere. High-diameter tube allows for larger substrate processing and uniform film thickness.
Powder Metallurgy Sintering and heat treatment of metal powders under vacuum to prevent oxidation and ensure material integrity. Precise atmosphere control preserves the purity of reactive metallic compositions.
Vapor Phase Polymerization Specialized chemical synthesis processes involving the transformation of monomers into polymer films. Consistent temperature zones across 300mm ensure uniform polymerization rates.
Ceramic Sintering High-temperature firing of ceramic components to achieve high density and specific mechanical properties. ±1°C accuracy prevents thermal shock and ensures structural consistency.
Molten Salt Studies Monitoring the behavior of salts at high temperatures through the transparent quartz wall. Safe observation of corrosive materials without risking chamber contamination.
Material Aging Tests Long-duration thermal cycling to simulate industrial life cycles of aerospace or energy sector components. 30-segment programming allows for complex, automated long-term testing protocols.
Fluidized Bed Processing Modification for powder coating using an ALD delivery system for uniform surface modification. High-volume 5-inch chamber provides space for efficient powder suspension.

Technical Specifications

Parameter Specifications for TU-C08
Item Number TU-C08
Nominal Power 3.0 KW
Operating Voltage 208 - 240VAC, Single Phase, 50/60 Hz
Maximum Temperature 1200°C (Short term < 1 hour)
Continuous Operating Temp. 1100°C
Maximum Heating Rate ≤ 15°C / min
Tube Material High-purity Fused Quartz
Tube Dimensions Φ130 OD x Φ120 ID x 750 L (mm)
Heating Zone Length 300 mm (Single Zone)
Constant Temperature Zone 100 mm (±2°C)
Temperature Controller 30 programmable segments; PID Auto-Tune; Overheat/Broken Thermocouple protection
Temperature Accuracy ± 1°C (Optional Eurotherm for ± 0.1°C)
Heating Elements Fe-Cr-Al Alloy doped by Mo
Vacuum Sealing Dual Stainless Steel Flanges with hook ring for hanging samples
Vacuum Level 10-2 Torr (Mechanical Pump) / 10-5 Torr (Turbo Pump)
Fitting Ports Standard 1/4" Barbed fittings with needle valves (Customizable to Swagelok or KF25)
Furnace Casing Double-layer steel with air cooling; Split door design
Insulation High purity Al2O3 fibrous insulation
Frame Construction Heavy-duty Aluminum frame for vertical stability

Why Choose TU-C08

  • Premium Engineering Standards: This system is manufactured using industrial-grade materials, from the Molybdenum-doped heating elements to the high-purity Al2O3 fibrous insulation, ensuring superior thermal efficiency and long-term durability.
  • Precision and Stability: With a 30-segment PID controller and the option for ultra-precise Eurotherm integration, this equipment provides the level of control required for sensitive material synthesis where even slight deviations can compromise results.
  • Versatile Operational Range: Whether operating under high vacuum (up to 10-5 Torr) or a flowing gas atmosphere, the dual-flange sealing system ensures a leak-rate-tested environment for diverse chemical and physical processes.
  • Safety-First Design: The double-layered, air-cooled steel structure drastically reduces surface temperatures, while the integrated safety alarms for over-temperature and sensor failure provide peace of mind in busy laboratory environments.
  • Scalable Research Platform: Beyond its core functions, the ability to modify this unit into a CVD system, PVD furnace, or fluidized bed makes it a high-value investment that grows with your research needs.

For technical consultations or to request a formal quotation tailored to your specific vacuum and atmosphere requirements, please contact our engineering team today.

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