1200C Max Sliding Tube Furnace with 80mm OD Quartz Tube and Vacuum Flanges for Rapid Thermal Processing Fast Heating and Cooling

RTP Furnace

1200C Max Sliding Tube Furnace with 80mm OD Quartz Tube and Vacuum Flanges for Rapid Thermal Processing Fast Heating and Cooling

Item Number: TU-KT08

Maximum Operating Temperature: 1200°C Heating and Cooling Rate: Up to 100°C/min (via sliding mechanism) Processing Tube Dimensions: 80mm OD x 75mm ID x 1400mm L
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Product Overview

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This high-performance thermal processing system is engineered for laboratories and industrial facilities requiring rapid heating and cooling cycles. By integrating a specialized sliding mechanism with a precision-controlled heating chamber, this equipment enables researchers to achieve thermal gradients and quenching rates that are impossible with stationary furnaces. The core value proposition lies in its ability to facilitate Rapid Thermal Processing (RTP) at a fraction of the cost of traditional dedicated RTP systems, making it an essential tool for material science innovation and high-throughput sample testing.

The system is primarily designed for advanced material research, semiconductor processing, and phase transformation studies. Its ability to manually move the heating zone along a fixed processing tube allows for the pre-heating of the furnace independent of the sample position, enabling instantaneous exposure to high temperatures. This unit is frequently utilized in semiconductor wafer annealing, thin-film deposition, and the synthesis of low-dimensional nanomaterials where precise control over thermal history is critical for achieving desired material properties.

Built for the rigors of demanding R&D environments, the equipment features a robust double-layer steel structure and integrated dual cooling fans. This engineering approach ensures the exterior remains safe to touch while the internal components operate at peak efficiency. Reliability is further bolstered by high-purity quartz components and advanced Mo-doped alloy heating elements, providing a consistent thermal environment even under repetitive high-speed sliding operations. This system represents a durable investment for institutions focused on cutting-edge thermal processing and metallurgical analysis.

Key Features

  • High-Velocity Sliding Mechanism: The equipment is mounted on a pair of precision-engineered Cr-plated steel sliding rails, allowing for a total travel distance of 600 mm. This manual sliding capability enables the operator to move the pre-heated furnace over the sample or away from it, achieving heating and cooling rates up to 100°C/min or even 15°C/sec under specific atmosphere conditions.
  • Advanced PID Thermal Control: The system utilizes a sophisticated PID automatic controller featuring 30 programmable segments. With a control accuracy of ±1°C, this unit ensures repeatable thermal profiles. It includes built-in over-temperature alarms and automated protection protocols, allowing for unattended operation during long-duration cycles.
  • Dual Thermocouple Monitoring: To ensure the highest levels of data integrity, the system includes two K-type thermocouples. One is dedicated to furnace control, while the second is inserted directly into the tube to monitor the real-time temperature profile of the sample. This configuration is essential for documenting the exact thermal exposure during rapid sliding maneuvers.
  • Premium Quartz Processing Tube: The furnace utilizes a high-purity fused quartz tube with an 80mm outside diameter and a length of 1400mm. This material provides excellent thermal shock resistance and chemical purity, making it ideal for processes involving sensitive materials or specialized gas environments.
  • Superior Vacuum and Atmosphere Control: Equipped with stainless steel vacuum flanges and a digital vacuum gauge, this system is ready for immediate vacuum or inert gas use. The flanges are supported by heavy-duty mounts to ensure stability during the sliding process, and the integrated needle valve allows for precise atmosphere management.
  • Enhanced Heating Element Chemistry: The heating elements are constructed from Fe-Cr-Al alloy doped with Molybdenum (Mo). This advanced doping enhances the elements' structural integrity at high temperatures, preventing sagging and ensuring a long service life even when subjected to frequent rapid heating cycles.
  • Data Logging and PC Connectivity: Every unit comes with a NIST-certified thermometer and a PC control module. The RS485 interface and included Windows software allow researchers to record, analyze, and export temperature profiles, ensuring full traceability for sensitive experimental data.
  • Dual-Layer Safety Construction: The furnace body features a double-shell steel structure with integrated dual air cooling fans. This design facilitates faster heat dissipation from the electronics and ensures the outer surface remains at a safe temperature for operators, even during continuous operation at 1100°C.

Applications

Application Description Key Benefit
Rapid Thermal Processing (RTP) Utilizing the sliding mechanism to move the furnace over a sample at a pre-set temperature. Minimizes thermal budget and prevents unwanted diffusion in semiconductor samples.
Phase Transformation Studies Rapidly cooling samples from high temperatures to room temperature by sliding the heating zone away. Captures metastable phases and allows for the study of quenching kinetics in metallurgy.
Chemical Vapor Deposition (CVD) Precise control of thermal zones and gas flow for growing thin films or nanostructures. High-purity quartz and vacuum sealing ensure high-quality, uncontaminated growth environments.
Semiconductor Annealing High-speed thermal cycling of silicon wafers or compound semiconductors to activate dopants. Increases throughput and ensures uniform thermal distribution across the constant temperature zone.
Catalyst Testing Exposing catalyst materials to rapid thermal shocks and varied gas environments. Enables high-stress testing of material durability and performance under extreme conditions.
Carbon Nanotube Synthesis Growing CNTs using controlled gas flow and rapid temperature spikes. The 80mm tube diameter supports multiple substrates or bulk powder processing in a single run.
Thin Film Crystallization Fast heating of amorphous films to induce crystallization without substrate degradation. Achieves high heating rates (15°C/sec) that protect delicate substrate materials.

Technical Specifications

Specification Category Parameter Details (Model: TU-KT08)
Model Number TU-KT08
Furnace Structure Double-layer steel with dual air cooling fans; Manually moveable on 1200mm sliding rails
Sliding Distance 600 mm effective travel
Max. Temperature 1200°C (< 1 hour)
Continuous Temperature 1100°C
Heating Zone Length 440 mm (Single zone)
Constant Temp Zone 150 mm (±3°C @ 1000°C)
Power / Voltage 2.5 KW; AC 208-240V Single Phase, 50/60 Hz
Heating Elements Fe-Cr-Al Alloy doped by Mo
Processing Tube High purity fused quartz; O.D.: 80 mm; I.D.: 75 mm; Length: 1400 mm
Temperature Controller PID automatic control, 30 programmable segments, ±1°C accuracy
Thermocouples Dual K-type (one for furnace control, one for sample monitoring)
Data Interface RS485 Interface with Windows Software and NIST certified thermometer
Vacuum Flanges Stainless steel with heavy-duty support; includes needle valve and digital vacuum gauge
Max Heating Rates 15°C/sec (RT-150°C); 10°C/sec (150-250°C); 7°C/sec (250-350°C); 4°C/sec (350-500°C)
Max Cooling Rates 15°C/sec (1000-950°C); 10°C/sec (950-900°C); 7°C/sec (900-850°C); 4°C/sec (850-750°C)
Vacuum Level 10E-4 torr (Molecular pump); 10E-2 torr (Mechanical pump)
Atmosphere Safety < 0.2 bars / 3 psi / 0.02 MPa (Gas flow < 200 SCCM recommended)

Why Choose This Furnace

  • Unmatched Thermal Agility: This system provides researchers with the flexibility to perform both standard long-duration heat treatments and ultra-fast rapid thermal processing, thanks to its precision manual sliding mechanism and high-output heating elements.
  • Comprehensive Documentation Capability: Unlike standard lab furnaces, this unit includes dual thermocouple monitoring and NIST-certified data logging, ensuring that every thermal cycle is documented for publication or industrial quality control requirements.
  • Robust Engineering and Safety: From the double-layered steel shell that maintains low surface temperatures to the heavy-duty flange supports that protect the quartz tube during sliding, every component is designed for industrial-grade durability and operator safety.
  • Integrated Vacuum Ready Solution: The inclusion of high-quality stainless steel flanges, a digital vacuum gauge, and all necessary fittings means the equipment is ready for high-vacuum and inert gas experiments immediately upon installation.
  • Versatile and Scalable Design: With an 80mm OD tube, the system accommodates a wide variety of sample sizes and boat configurations, making it suitable for diverse research paths ranging from metallurgy to semiconductor thin films.

Our engineering team is ready to assist you in selecting the ideal thermal configuration for your specific material research needs. Contact us today for a technical consultation or a formal quotation on this high-performance sliding furnace system.

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