1200C High Temperature 5 Inch Sliding Tube Furnace for Rapid Thermal Processing RTP and Wafer Annealing

Product Overview

This high-performance thermal processing system is engineered to meet the rigorous demands of modern material science and semiconductor research. By utilizing a sophisticated sliding mechanism, the equipment enables rapid heating and cooling cycles that are unattainable in stationary tube furnaces. This capability is essential for researchers performing Rapid Thermal Processing (RTP), where precise control over thermal kinetics determines the crystalline structure and electrical properties of the specimen. The unit’s core value lies in its ability to transition samples between temperature zones instantaneously, providing a versatile platform for high-throughput experimentation and advanced thin-film development.

Designed for versatility and precision, this system is a cornerstone for laboratories specializing in semiconductor wafer annealing, chemical vapor deposition (CVD), and metallurgical phase transformation studies. The integration of a large-diameter quartz tube allows for the processing of wafers up to 4 inches in diameter, making it an ideal choice for both fundamental academic research and industrial R&D. The robust construction ensures that the unit can withstand repeated rapid thermal cycling without compromising structural integrity or temperature uniformity, providing researchers with the consistency required for reproducible results in demanding industrial environments.

Reliability is at the heart of this equipment’s design. Featuring a double-layered steel casing and integrated air-cooling technology, the system maintains a safe exterior temperature even during prolonged operation at 1200°C. The separated control unit allows for remote operation, protecting sensitive electronics from heat and providing a safer working environment for laboratory personnel. Whether utilized for annealing reactive metals or sintering high-density ceramics, this system delivers the performance, durability, and safety features necessary for high-stakes laboratory and industrial heat treatment processes.

Key Features

• Rapid Thermal Kinetic Management: The integrated electric sliding motor allows the furnace to move across the quartz tube at variable speeds, enabling heating rates up to 2°C/s and quenching/cooling rates up to 4°C/s by moving the heated zone away from the sample.
• Advanced Dual PID Control System: Equipped with two independent PID automatic controllers featuring 30 programmable segments, the unit provides meticulous control over heating rates, dwell times, and cooling curves with an accuracy of ±1°C.
• High-Capacity Processing Environment: The 5-inch high-purity quartz tube accommodates samples and wafers up to 100mm (4 inches) in diameter, supported by a specialized quartz boat for stable material positioning during transit.
• Robust Vacuum and Atmosphere Architecture: Stainless steel vacuum flanges with double silicone O-rings and digital gauges facilitate high-vacuum environments down to 10^-5 torr, supporting processes requiring inert, reducing, or vacuum atmospheres.
• Superior Thermal Insulation and Safety: A double-layer steel casing with active fan cooling ensures the external shell remains below 60°C, while built-in overheating and thermocouple-break protection systems safeguard the equipment and the operator.
• Precision Heating Elements: Resistance heating elements are strategically positioned to provide a 300mm heating zone with a 100mm constant temperature zone, ensuring uniform thermal distribution across the workpiece.
• Digital Connectivity and Remote Monitoring: An included MTS-02 control module and RS485 port allow for full PC-based operation, enabling researchers to log data, monitor cycles in real-time, and automate complex thermal profiles.
• Industrial Grade Sliding Rails: The unit travels on heavy-duty chromium-plated steel rails, ensuring smooth, vibration-free movement that protects delicate samples during rapid transition phases.

Applications

Technical Specifications

Why Choose This Sliding Tube Furnace

• Unmatched Thermal Agility: Unlike standard furnaces, this unit offers industry-leading heating and cooling rates through its precision-engineered sliding mechanism, significantly reducing cycle times and enabling unique material properties.
• Research-Grade Precision: With dual PID controllers and PC-based data acquisition, researchers can maintain total command over every thermal variable, ensuring that experimental conditions are exactly repeatable across hundreds of runs.
• Industrial Build Quality: From the chromium-plated sliding rails to the double-layer steel casing, every component is selected for its ability to perform in high-duty cycle environments without degradation.
• Comprehensive Vacuum Integration: The inclusion of high-quality stainless steel flanges and digital vacuum gauges ensures that the system is ready for sensitive atmosphere-controlled processes right out of the box.
• Adaptable for the Future: With optional automatic sliding drives and custom software configurations, this equipment is designed to evolve alongside your research requirements, representing a sound long-term investment.

Contact our technical engineering team today to discuss your specific process requirements or to request a customized quotation for your laboratory setup.