RTP Furnace
High Temperature Tube Furnace 1500C with Sliding Flanges and 50mm OD for Rapid Thermal Processing Fast Heating and Cooling
Item Number: TU-RT03
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Product Overview

This high-temperature thermal processing system is specifically engineered to bridge the gap between traditional tube furnaces and rapid thermal processing (RTP) units. By integrating a manual sliding rail mechanism with a high-performance 1500°C heating chamber, the equipment allows researchers to move processing tubes into and out of the hot zone instantaneously. This capability is critical for material science applications where microstructure control depends on precise heating and cooling rates that exceed the capabilities of static thermal systems. The value proposition lies in its ability to achieve extreme thermal gradients at a fraction of the cost of automated RTP systems, providing a versatile tool for advanced material synthesis.
Primary use cases for this equipment include the development of solid-state electrolytes, semiconductor annealing, and the study of phase transformations in advanced ceramics. Target industries range from aerospace and energy storage to microelectronics and industrial R&D laboratories. The unit's design prioritizes flexibility, supporting both Mullite and Quartz tubes to accommodate different atmosphere and temperature requirements. By enabling rapid insertion into a pre-heated chamber or immediate extraction for forced air cooling, this system provides the operational agility required for iterative experimental workflows.
Confidence in this equipment is backed by its robust construction and high-grade components. Utilizing 1500°C grade Silicon Carbide (SiC) heating elements and dual S-type thermocouples, the unit ensures consistent performance under demanding thermal cycles. The inclusion of a double-sliding rail made of chromium-plated steel guarantees smooth, reliable movement over long-term operation. Whether operating under high vacuum or inert gas environments, this furnace delivers the precision and reliability necessary for high-stakes industrial research and quality-sensitive material production.
Key Features
- Rapid Thermal Processing Capability: The integrated sliding rail allows the processing tube to be manually moved into a pre-heated furnace for near-instantaneous heating or retracted for accelerated cooling, significantly reducing cycle times.
- Dual-Controller Temperature Management: Two independent digital temperature controllers with 30 programmable segments manage the furnace temperature and monitor the sample's real-time profile, ensuring maximum process transparency.
- Precision SiC Heating Elements: Equipped with four high-grade 1500°C Silicon Carbide rods, the furnace provides reliable and stable thermal energy for continuous operations up to 1400°C and intermittent use at 1500°C.
- Advanced Vacuum Sealing Technology: Featuring stainless steel vacuum flanges with built-in digital gauges, the system can achieve vacuum levels as low as 10E-5 torr when paired with a molecular pump, making it ideal for oxygen-sensitive processes.
- Interchangeable Processing Tubes: The equipment includes both USA-made Mullite and high-purity Quartz tubes, allowing users to select the optimal material for their specific temperature and chemical compatibility needs.
- Real-Time Thermal Feedback: An internal S-type thermocouple is complemented by a secondary probe inserted directly into the tube, providing an accurate 1:1 reading of the sample's actual thermal environment.
- Industrial-Grade Sliding Rail: The 350mm chromium-plated steel double rail system provides a stable and smooth mechanical interface for the manual translation of the tube during high-speed thermal transitions.
- Computerized Control Interface: An integrated RS485 port allows for full system integration with lab software, enabling automated data logging and remote management of complex thermal recipes.
- Enhanced Safety Architecture: Built-in over-temperature alarms and automatic protection circuits allow the system to operate safely without constant supervision, protecting both the equipment and the sample.
- Optimized Constant Temperature Zone: The engineering of the heating zone provides a 100mm stable region within ±1°C, ensuring uniform heat distribution across the entire sample length.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| Solid-State Electrolytes | Preparation of LPS solid-state electrolyte powder using rapid cooling techniques. | Enhances ionic conductivity by controlling crystallization phases during cooling. |
| Semiconductor Annealing | Rapid thermal annealing of silicon or compound semiconductor wafers under controlled atmospheres. | Minimizes dopant diffusion while activating ion-implanted species efficiently. |
| Ceramic Sintering | Fast-cycle sintering of advanced technical ceramics to limit grain growth. | Produces high-density ceramic components with superior mechanical properties. |
| Phase Transformation | Studying the effects of rapid quenching on metallic and alloy microstructures. | Allows for the capture of metastable phases through high cooling rates. |
| CVD / PECVD Research | Serving as the thermal base for chemical vapor deposition experiments. | Provides a stable, high-vacuum environment for precise thin-film growth. |
| Nanomaterial Growth | Synthesis of carbon nanotubes or nanowires requiring precise temperature ramp-ups. | High ramp rates facilitate better control over nucleation and growth kinetics. |
| Catalyst Testing | Testing the thermal stability and activity of catalysts under high-speed cycling. | Accelerates aging tests by shortening the time between thermal stages. |
Technical Specifications
| Feature | Specification Details for TU-RT03 |
|---|---|
| Model Number | TU-RT03 |
| Furnace Structure | Single sliding flange on right side; manual rail for tube translation; integrated digital vacuum gauge |
| Vacuum Performance | 10E-5 torr (turbopump); 10E-2 torr (mechanical pump) |
| Power Rating | 2.5 KW (Requires 20A Breaker) |
| Input Voltage | Single Phase AC 208-240V, 50/60 Hz |
| Maximum Temperature | 1500°C |
| Continuous Working Temp | 1400°C (with Mullite tube) |
| Temperature Accuracy | ± 1°C |
| Heating Zone Length | 6" (152 mm) |
| Constant Temp Zone | 100 mm (±1°C) within 800 - 1500°C range |
| Heating Elements | 4 pieces of 1500°C grade SiC rods |
| Thermocouples | Dual S-type (one for furnace control, one for sample monitoring) |
| Temp Controllers | Dual 30-segment programmable digital controllers with RS485 port |
| Mullite Tube Specs | 50mm OD x 44mm ID x 304.8mm L; Max 1500°C (Air) / 1300°C (Vacuum) |
| Quartz Tube Specs | 50mm OD x 44mm ID x 304.8mm L; Max 1200°C (Air) / 1000°C (Vacuum) |
| Sliding Rail Type | Chromium-plated steel double rail; 350mm sliding length |
| Heating Rate (Mullite) | 10°C/sec (RT-800°C); 7°C/sec (800-1000°C); 1.5°C/sec (1200-1300°C) |
| Cooling Rate (Mullite) | 14°C/sec (1350-1000°C); 7°C/sec (1000-800°C); 2.5°C/sec (500-400°C) |
| Heating Rate (Quartz) | 30°C/sec (RT-500°C); 12°C/sec (500-800°C); 1°C/sec (1000-1100°C) |
| Cooling Rate (Quartz) | 16°C/sec (1100-800°C); 9°C/sec (800-600°C); 2.5°C/sec (400-300°C) |
| Compliance | CE Certified; NRTL/CSA available upon request |
Why Choose Us
- Unmatched Thermal Agility: The manual sliding design offers a cost-effective alternative to expensive automated RTP systems, providing cooling rates up to 16°C/sec and heating up to 30°C/sec for rapid material screening.
- Precision Engineering and Monitoring: With dual S-type thermocouples and independent controllers, this system eliminates the guesswork by providing real-time data of both the furnace environment and the internal tube conditions.
- High Vacuum and Clean Processing: The stainless steel sealing technology and digital monitoring allow for ultra-clean processing down to 10E-5 torr, essential for high-purity semiconductor and electrolyte research.
- Durable Industrial Construction: Built with chromium-plated steel rails and high-grade SiC elements, this system is designed for longevity and consistent performance in intensive 24/7 R&D environments.
- Versatile Material Compatibility: The inclusion of both high-temperature Mullite and high-purity Quartz tubes ensures the system is ready for a wide range of chemical and thermal requirements out of the box.
Investing in this rapid thermal processing system ensures your laboratory has the speed and precision required for next-generation material development. Contact our technical sales team today for a detailed quote or to discuss a custom configuration tailored to your specific research parameters.
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