Six Zone Split Tube Furnace with Alumina Tube and Vacuum Flanges for 1500C High Temperature Thermal Processing and CVD

Product Overview

This high-performance six-zone split tube furnace represents the pinnacle of thermal engineering for modern materials science and industrial research and development. Designed to operate at temperatures reaching 1500°C, this system provides researchers with unparalleled control over thermal environments, whether the requirement is a perfectly uniform temperature zone or a highly specific thermal gradient. By integrating advanced heating elements with a modular split-chase design, the equipment facilitates rapid sample loading and unloading without compromising the integrity of complex experimental setups or delicate vacuum connections.

Primarily engineered for Chemical Vapor Deposition (CVD), annealing, and sintering applications, this unit serves industries ranging from semiconductor manufacturing to advanced ceramics and aerospace material testing. The versatility of the six-zone configuration allows for the simulation of complex industrial processes on a laboratory scale, providing the data necessary for scaling production. Its ability to maintain tight tolerances under vacuum or controlled atmospheres makes it a foundational tool for laboratories pushing the boundaries of high-temperature material behavior.

Reliability is the hallmark of this thermal processing system. Constructed with heavy-duty components and high-purity alumina refractory materials, the furnace is built for continuous operation in demanding environments. Every aspect, from the robust silicon carbide heating rods to the precision-machined vacuum flanges, is selected to ensure repeatability and long-term durability. Operators can proceed with long-cycle experiments with full confidence in the system's ability to maintain atmospheric purity and thermal stability, session after session.

Key Features

• Independent Six-Zone Thermal Control: The heating chamber is divided into six distinct zones (12" + 8" + 8" + 8" + 8" + 12"), each managed by its own dedicated controller. This configuration enables the creation of tailored thermal gradients up to 100°C/cm or an exceptionally long uniform temperature zone of 800mm, providing flexibility for diverse research projects.
• High-Purity Alumina Processing Tube: Equipped with a professional-grade alumina tube measuring 60mm O.D. and 1800mm in length, the system offers excellent chemical resistance and structural integrity at extreme temperatures, ensuring that samples remain free from contamination during high-heat cycles.
• Precision PID Instrumentation: Each of the six digital temperature controllers features 30 programmable segments. This allows for meticulous management of ramp rates, dwell times, and cooling stages. With an accuracy of ±1°C, the system delivers the exacting precision required for sensitive semiconductor and metallurgical processes.
• Advanced Silicon Carbide Heating Elements: Utilizing 48 high-grade SiC rods, the furnace achieves rapid heating and maintains high-temperature stability. These elements are specifically selected for their longevity and efficiency in oxidative and neutral atmospheres, outperforming standard metallic elements in high-temperature durability.
• Integrated Vacuum and Atmosphere Capability: The system includes vacuum-sealed stainless steel flanges with double high-temperature silicone O-rings. It is capable of achieving vacuum levels of 10^-2 Torr with mechanical pumps and up to 10^-5 Torr with molecular systems, making it ideal for oxygen-sensitive applications.
• Split-Hinge Engineering: The furnace body features a split design that opens lengthwise. This allows for easy access to the processing tube and internal heating chamber, simplifying the process of cleaning, sample placement, and maintenance of the heating elements without dismantling the entire gas delivery system.
• Comprehensive Safety Systems: Built-in overheating and broken thermocouple protection ensure the equipment shuts down safely in the event of a component failure. Visual and audible alarms notify operators of temperature deviations, allowing for unattended operation during long-dwell cycles.
• Expandable Communication Interface: The inclusion of an RS485 communication port allows the furnace to be integrated with PC-based control modules. This enables remote monitoring, data logging, and the management of complex heat treatment recipes through centralized software environments.

Applications

Technical Specifications

For the TU-67 series furnace, please refer to the comprehensive technical data below. These specifications reflect the standard configuration designed for high-performance laboratory environments.

Power and Performance

Heating Zone and Tube Dimensions

Instrumentation and Vacuum

Operation Notes

• For vacuum operation, temperature should not exceed 1300°C.
• Gas flow rates should be maintained below 200 SCCM.
• Use of a two-stage pressure regulator is mandatory for gas cylinder safety.
• Do not use graphite crucibles in direct contact with the alumina tube.

Why Choose TU-67

• Unmatched Thermal Versatility: The six-zone architecture of the TU-67 provides laboratory technicians with the unique ability to customize thermal profiles that single-zone furnaces simply cannot achieve, making it the most flexible tool in its class.
• Heavy-Duty Industrial Build: By utilizing 48 individual SiC rods and high-density alumina insulation, this furnace is designed for longevity and minimal maintenance, even when subjected to repeated 1500°C cycles.
• Precision and Stability: The integration of S-type thermocouples and precision PID logic ensures that your research data is backed by stable, repeatable thermal conditions, reducing variables in complex experiments.
• Advanced Atmospheric Control: Whether your process requires a high vacuum or a specific inert gas environment, the high-quality flange system ensures a leak-free environment for pure chemical reactions.
• Global Safety Standards: With standard CE certification and the option for UL or CSA upgrades, this equipment meets the rigorous safety requirements of top-tier academic and corporate research institutions worldwide.

Invest in a thermal system that grows with your research needs. Contact us today for a custom configuration quote or technical consultation to see how the TU-67 can advance your material processing capabilities.