High Temperature Seven Zone Split Tube Furnace with 1200C Maximum Operation and Large Diameter Quartz Tube

Product Overview

This high-performance thermal processing system is engineered for industrial-scale research and pilot production environments where precision temperature gradients and expansive heating volumes are critical. By utilizing a unique seven-zone heating architecture, the equipment allows for the creation of an exceptionally long and stable uniform temperature zone, making it ideal for large-batch material synthesis, semiconductor processing, and complex chemical vapor deposition (CVD) applications. The split-able design provides unparalleled access to the processing chamber, facilitating the easy setup of heavy or delicate samples within the high-purity environment.

The system is designed for versatility, supporting vacuum levels from 10-2 to 10-5 torr and various gas atmospheres. It serves as a cornerstone for advanced material science laboratories, metallurgy departments, and high-tech manufacturing facilities that require consistent, repeatable results across large processing areas. Whether used for annealing, sintering, or coating processes, this unit delivers the thermal stability required by modern material engineering standards.

Reliability is at the core of this furnace’s construction. Featuring a double-layered steel case with active fan cooling and high-purity fibrous alumina insulation, the equipment maintains low exterior temperatures while ensuring maximum energy efficiency. The inclusion of electric cylinder-driven top covers ensures smooth, safe operation even in high-throughput industrial settings, giving operators the confidence to manage demanding thermal cycles without compromising safety or performance integrity.

Key Features

• Seven-Zone Independent Temperature Control: This system utilizes seven separate heating zones, each controlled by its own dedicated digital PID controller, allowing for the precise management of thermal gradients or the maintenance of a massive 1350 mm uniform temperature zone within ±2ºC.
• Electric Cylinder Split Design: The top split cover is actuated by heavy-duty electric cylinders, providing smooth and automated opening and closing. This design enables rapid cooling, easy tube replacement, and simplified sample loading without the need for manual lifting.
• Precision Heating Elements: High-performance thermal elements are strategically positioned across all seven zones to provide rapid heating rates up to 10°C/min and a maximum operating temperature of 1200°C for short-term processes.
• Advanced Atmospheric Control: Equipped with a large 8-inch internal diameter quartz tube and stainless steel vacuum flanges featuring double high-temperature silicone O-rings, the system ensures a tight seal for vacuum or inert gas processing.
• Integrated Water Cooling Jacket: The vacuum flanges include a built-in water cooling jacket to protect the sealing O-rings and instrumentation from high-temperature exposure, ensuring long-term seal integrity during continuous operation.
• Superior Thermal Insulation: Utilizing energy-saving high-purity fibrous alumina insulation, the furnace minimizes heat loss and improves temperature ramp-up times while keeping the external case temperature below 70°C.
• Comprehensive Safety Systems: Built-in overheating and broken thermocouple protection, along with an over-temperature alarm, allow for safe, unattended operation during long-duration thermal cycles.
• Dual Cooling Fan Architecture: A double-layer steel case structure combined with two high-velocity cooling fans ensures efficient heat dissipation, extending the lifespan of internal electronic components.
• Digital Communication and Software: Integrated RS485 communication ports allow for PC-based control and monitoring, enabling the user to save, load, and analyze complex 30-segment heating profiles remotely.
• Versatile Material Compatibility: The large diameter quartz tube and included buffer types of thermal blocks are optimized for a wide variety of crucibles, wafer boats, and material transport systems.

Applications

Technical Specifications

Why Choose High Temperature Seven Zone Split Tube Furnace

• Unmatched Thermal Uniformity: The seven-zone architecture provides the longest stable heating area in its class, ensuring that large-scale industrial samples experience identical thermal conditions from end to end.
• Industrial Grade Robustness: Designed for continuous operation, this system features premium steel construction, advanced cooling, and high-quality PID electronics certified to international standards.
• Precision Vacuum Integrity: Our specialized stainless steel flanges and high-purity quartz tubes allow researchers to maintain ultra-clean environments, essential for sensitive semiconductor and aerospace applications.
• Advanced Process Automation: With 30-segment programming and optional software integration, complex thermal cycles are easily automated, reducing operator error and increasing throughput.
• Flexible Customization: From Eurotherm controller upgrades to customized gas delivery systems, we provide the flexibility to tailor this furnace to your specific research or production requirements.

Our engineering team is ready to assist you in configuring the ideal thermal solution for your laboratory or production line. Contact us today for a technical consultation or to request a formal quotation.