Single Zone Tube Furnace 5 Inch Quartz Tube 36 Inch Heating Zone Vacuum Flanges

Product Overview

This high-performance thermal processing system is engineered for advanced material research and industrial heat treatment applications requiring a large-diameter reaction chamber and a long, uniform heating zone. Designed as a split-type single-zone furnace, the equipment allows for easy access to the processing tube, facilitating rapid sample loading and unloading while streamlining maintenance procedures. Its primary value proposition lies in its ability to maintain a highly stable thermal environment up to 1200°C, making it an indispensable tool for labs and production facilities focused on semiconductor processing, metallurgy, and ceramic engineering.

The equipment is specifically optimized for high-purity processes, including vacuum annealing, gas-phase diffusion, and solid-state sintering. By utilizing a 5-inch diameter fused quartz tube, this system accommodates larger substrates or higher volumes of small samples compared to standard laboratory furnaces. It is particularly well-suited for processing 4-inch wafers, providing the necessary thermal uniformity and atmosphere control required for delicate oxidation and doping procedures in the electronics industry.

Reliability is at the core of this unit's design. Built with industrial-grade components and a heavy-duty double-layer steel casing, the system is capable of continuous operation in demanding environments. The integration of advanced air-cooling technology ensures that the exterior shell remains safe to touch even during high-temperature cycles, protecting both the operator and the surrounding laboratory infrastructure. This unit represents a robust investment for organizations prioritizing technical precision and long-term operational consistency.

Key Features

• Precision Temperature Management: The system utilizes a MET-certified digital controller offering 30 programmable segments. This allows for meticulous control over heating rates, cooling rates, and dwell times, ensuring repeatable results across complex thermal cycles.
• High-Capacity Quartz Processing Chamber: Featuring a 130 mm outer diameter fused quartz tube, the unit provides a spacious environment for large-scale experiments. The high-quality quartz offers exceptional thermal shock resistance and chemical inertness for high-purity atmosphere control.
• Advanced Thermal Insulation: High-purity fibrous alumina insulation is employed to maximize energy efficiency. This high-grade refractory material minimizes heat loss, allowing the system to reach and maintain peak temperatures with lower power consumption.
• Robust Vacuum Sealing System: The equipment includes a pair of stainless steel 304 vacuum flanges equipped with double high-temperature silicone O-rings. This assembly ensures a hermetic seal capable of achieving vacuum levels down to 10^-5 torr when paired with a molecular pump.
• Heavy-Duty Heating Elements: The furnace is powered by Fe-Cr-Al alloy heating elements doped with Molybdenum. These elements are designed for longevity and consistent heat radiation, even when subjected to frequent high-temperature cycling.
• Integrated Safety and Monitoring: A built-in PID auto-tune function, coupled with over-temperature protection and broken thermocouple alarms, allows for safe, unattended operation. An integrated pressure gauge provides real-time monitoring of the internal tube environment.
• Split-Furnace Engineering: The split-hinge design of the casing allows the upper half of the furnace to open, providing immediate access to the heating zone and the quartz tube. This feature is critical for rapid cooling or for the precise positioning of internal components.
• Scalable Communication Port: Equipped with an RS485 communications port, the system can be integrated into laboratory networks for remote monitoring and data logging, supporting modern industry 4.0 standards for digital traceability.
• Efficient External Cooling: A double-layer steel casing with active air cooling keeps the external surface temperature below 60°C, ensuring a comfortable working environment and protecting internal electronics from heat fatigue.
• Customizable Processing Environment: The unit supports various gas inlets and outlets via needle valves on the flanges, allowing researchers to introduce protective or reactive gases such as Nitrogen, Argon, or forming gas during the heating process.

Applications

Technical Specifications

Why Choose TU-26

• Proven Thermal Stability: This system is engineered to deliver a highly consistent constant temperature zone of 240 mm, ensuring that your samples experience uniform thermal conditions throughout the entire processing cycle.
• Premium Build Quality: From the high-purity alumina insulation to the stainless steel 304 vacuum flanges, every component is selected for its ability to withstand the rigors of high-temperature industrial R&D.
• Versatile Integration: With options for sliding flanges, advanced Eurotherm controllers (±0.1°C accuracy), and specialized vacuum pump kits, this equipment can be customized to meet the specific requirements of any material science laboratory.
• Safety-First Engineering: The double-layer steel casing and advanced alarm systems provide peace of mind, allowing for long-duration processing without constant supervision, increasing your facility's operational throughput.
• Scalable for Industry: The combination of a large 5-inch quartz tube and robust power delivery makes this furnace suitable for both initial academic research and small-batch industrial production.

For more information on the TU-26 or to request a customized quote for your specific thermal processing needs, please contact our technical sales team today.