1200C Sliding Internal Crucible Tube Furnace for Controlled Atmosphere Thin Film Deposition and Material Sublimation Research

RTP Furnace

1200C Sliding Internal Crucible Tube Furnace for Controlled Atmosphere Thin Film Deposition and Material Sublimation Research

Item Number: TU-RT15

Maximum Temperature: 1200°C Positioning Mechanism: Magnetic-driven internal crucible sliding system Temperature Accuracy: ±1°C
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Product Overview

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This high-performance thermal processing system is engineered for advanced material science applications requiring precise sample movement within a controlled atmosphere. By integrating a sophisticated internal sliding mechanism, the equipment allows researchers to transition samples or sublimation sources through specific temperature gradients without breaking vacuum or atmosphere seals. This capability is fundamental for achieving high-quality Physical Vapor Deposition (PVD) and Dual Vapor Deposition (DVD) results, where the relationship between temperature and position is critical to film morphology and growth rates.

Designed for rigorous industrial R&D environments, the unit facilitates complex heat treatment cycles that demand both high-temperature stability and mechanical versatility. The system serves as a cornerstone for laboratories focused on semiconductor development, nanotechnology, and metallurgical phase studies. Its robust construction ensures that sensitive experiments can be conducted under vacuum or inert gas conditions with repeatable precision, providing the reliability necessary for long-duration experimental protocols.

Built with premium thermal components and a focus on user safety, the equipment delivers consistent performance even under demanding continuous operation. The fusion of advanced PID control and a magnetic drive positioning system allows for non-invasive manipulation of the internal crucible, ensuring that the integrity of the internal environment is never compromised. This unit represents a significant leap in thermal processing flexibility, offering a consolidated solution for evaporation, deposition, and precise thermal profiling.

Key Features

  • Integrated Magnetic Sliding Mechanism: This system utilizes a unique dual-magnet drive system where an external magnet controls an internal magnetic block, allowing the sample holder to be moved precisely along the length of the quartz tube. This design enables the user to find the optimal temperature position for evaporation or deposition without manual intervention or vacuum loss.
  • Advanced NIST-Certified Monitoring: Each unit is equipped with a NIST-certified precision temperature monitor connected directly to the sample holder via a high-vacuum feedthrough. This ensures that the temperature reported is the actual temperature at the sample site, not just the furnace ambient, providing unparalleled data accuracy for critical thin-film growth.
  • Precision PID Temperature Control: The equipment features a 30-segment programmable controller that utilizes proportional-integral-derivative logic to maintain a temperature accuracy of ±1°C. This high level of control is essential for managing the ramp rates and soak times required in delicate material synthesis.
  • High-Performance Heating Elements: The furnace utilizes Fe-Cr-Al alloy heating elements doped with Molybdenum (Mo). This specific metallurgical composition offers superior resistance to oxidation and thermal fatigue, ensuring a long service life and rapid heating capabilities up to 1200°C.
  • Versatile Atmosphere and Vacuum Control: Equipped with KF25 vacuum ports and 1/4" barb fittings, the system can achieve vacuum levels down to 10-2 Torr with a mechanical pump. This allows for processing under inert gases or specific vacuum pressures, which is vital for preventing oxidation during high-temperature cycles.
  • Specialized Thermal Insulation: The tube furnace incorporates two fibrous ceramic tube blocks that effectively block heat radiation from the chamber ends. This engineering choice protects the vacuum flanges and ensures a stable, uniform constant temperature zone at the center of the tube.
  • Robust Quartz Componentry: The system includes high-purity quartz tubes and crucibles that offer excellent thermal shock resistance and chemical purity, ensuring that no contaminants are introduced to the sample during processing at temperatures up to 1200°C.
  • Comprehensive Safety Systems: Built-in protection modules for over-temperature conditions and thermocouple failure are standard. These features prevent equipment damage and ensure lab safety by automatically cutting power if parameters deviate from the programmed safety envelope.

Applications

Application Description Key Benefit
Physical Vapor Deposition (PVD) Controlled sublimation of materials onto a substrate within a vacuum environment. Precise positioning of the source material relative to the heat zone ensures uniform vapor pressure.
Semiconductor Doping Diffusion of dopants into silicon wafers at high temperatures under controlled gas flow. High-accuracy PID control maintains uniform dopant distribution across the wafer surface.
Material Sublimation Studies Analyzing the phase change of specialized alloys and compounds as they transition to gas. Real-time monitoring of sample temperature via the NIST-certified feedthrough provides empirical data.
Thin Film Growth (DVD) Using the internal sliding mechanism to manage dual-source vapor deposition protocols. Allows for the creation of multi-layered or gradient thin films by moving the substrate through the thermal field.
Annealing of Advanced Ceramics High-temperature stress relief and grain structure refinement of ceramic components. The 30-segment programmable controller allows for complex cooling curves to prevent cracking.
Catalyst Synthesis Thermal treatment of catalytic powders under inert or reducing atmospheres. Air-tight flanges and gas delivery ports allow for precise control over the chemical environment.
Metallurgical Phase Research Studying the transition points of metals during rapid quenching or controlled cooling. The ability to move the sample quickly out of the hot zone facilitates quenching experiments.

Technical Specifications

Parameter Specification Details for TU-RT15
Model Number TU-RT15
Maximum Temperature 1200°C (< 1 hour)
Continuous Working Temperature 1100°C
Heating Zone Length 8" (200mm) single zone
Constant Temperature Zone 2.3" (60mm) [±1°C @ 1000°C]
Temperature Accuracy ±1°C
Heating Rate ≤ 20°C / minute
Heating Elements Fe-Cr-Al Alloy doped by Mo
Temperature Controller PID automatic control, 30-step programmable, NIST-certified monitor
Tube Dimensions 50mm O.D x 44mm I.D x 1000mm L (Quartz)
Vacuum Level 10-2 Torr (with mechanical pump)
Vacuum Flanges 2" Flange with KF25 port and 1/4" barb fittings
Sample Holder Alumina flat sample holder (2" L x 1" W) with K-type thermocouple
Input Voltage 110VAC or 208-240VAC, 50/60Hz
Total Power 1.5 KW
Compliance CE Certified (NRTL/CSA optional)

Why Choose Us

  • Engineered for Precision Deposition: The magnetic sliding mechanism is a specialized tool that eliminates the guesswork in thin-film research, allowing for the exact replication of thermal environments across multiple experimental runs.
  • Uncompromising Build Quality: Every component, from the Mo-doped heating elements to the high-purity alumina sample holders, is selected for its ability to withstand the rigors of industrial research without degradation.
  • Verified Data Integrity: With NIST-certified monitoring included as standard, this system provides the traceable data accuracy required for peer-reviewed research and industrial quality control.
  • Modular and Customizable: The system is designed to grow with your research needs, supporting PC-based control modules, multi-channel gas delivery systems, and various vacuum configurations.
  • Superior Thermal Efficiency: The high-thermal-conductivity alumina and fibrous ceramic insulation minimize energy loss and ensure that the heat is focused exactly where it is needed, protecting sensitive external components.

Our engineering team is ready to assist you in configuring the ideal thermal solution for your specific deposition or sublimation requirements. Contact us today for a technical consultation or a formal quotation on this advanced sliding tube furnace system.

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