Tube Furnace
Five Zone 1200C High Temperature Split Tube Furnace with Touch Screen Controller and Multiple Quartz Tube Options
Item Number: TU-48
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Product Overview


This high-performance five-zone thermal processing system is engineered for advanced material science research and industrial R&D. By utilizing five independently controlled heating zones, the equipment empowers researchers to create either a highly stable, extended uniform temperature region or a precise, customizable thermal gradient. This versatility is critical for complex processes such as chemical vapor deposition (CVD), crystal growth, and localized phase transitions where temperature precision across a long distance is paramount. The split-furnace design facilitates rapid cooling and easy access to the processing tube, maximizing laboratory throughput and operational efficiency.
Targeted at sectors ranging from semiconductor manufacturing to aerospace metallurgy, this furnace serves as a cornerstone for annealing, diffusing, and sintering applications. Whether operating under high vacuum or specific atmospheric conditions, the unit provides a controlled environment that minimizes contamination and ensures repeatable experimental outcomes. The integration of high-purity fibrous alumina insulation and dual-layer steel casing ensures that while the internal chamber reaches extreme temperatures, the external surface remains safe for operators, reflecting a commitment to both performance and laboratory safety.
Reliability is at the core of this system's architecture. Built with heavy-duty components and a sophisticated tactile control interface, the equipment is designed for continuous operation in demanding environments. B2B procurement teams and laboratory managers can rely on its robust engineering to deliver consistent thermal profiles day after day. With built-in protection mechanisms and standardized safety certifications, this furnace represents a premium investment in long-term research capability, providing the stability needed for sensitive industrial heat treatment processes.
Key Features
- Independently Controlled Five-Zone Heating: The system features five distinct heating zones, each measuring 152 mm in length. This configuration allows for the creation of a 500 mm constant temperature zone with ±2°C accuracy or the establishment of specific thermal gradients required for specialized material synthesis.
- Advanced Touch Screen Interface: An integrated PLC-based touch screen control panel synchronizes all five zones. It supports up to 30 programmable segments for heating, cooling, and dwelling, simplifying complex recipes and ensuring high process reproducibility without the need for manual adjustment.
- Precision PID Temperature Regulation: Utilizing five high-sensitivity K-type thermocouples, the advanced PID controllers maintain a ±1°C accuracy throughout the full 1200°C operating range, compensating for environmental fluctuations and thermal load changes.
- High-Efficiency Vacuum Sealing: The furnace is equipped with a pair of vacuum-sealed stainless steel flanges, including a mechanical pressure gauge and needle valves. This setup achieves vacuum levels down to 10-4 torr when paired with a turbopump, supporting high-purity atmosphere control.
- Energy-Saving Thermal Insulation: The chamber is lined with high-purity fibrous alumina insulation. This low-thermal-mass material reduces heat loss and power consumption while allowing for faster ramp rates and improved external case temperature control.
- Flexible Processing Tube Options: To accommodate various sample sizes and throughput requirements, the system supports interchangeable quartz tubes with outside diameters of 80mm, 100mm, or 130mm, all featuring a standard length of 1400mm for optimal heat distribution.
- Enhanced Safety Protocols: For industrial reliability, the system includes built-in overheating protection and broken thermocouple detection. The dual-layer steel shell with integrated cooling fans ensures the exterior remains cool during prolonged high-temperature cycles.
- Digital Communication Readiness: Equipped with an RS485 communication port and compatible software, the system allows for remote PC connection, data logging, and real-time monitoring of thermal profiles, which is essential for audit trails in R&D environments.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| Semiconductor Dopant Diffusion | Utilizing the multi-zone control to drive dopants into silicon wafers or substrates under a controlled atmosphere. | Highly uniform diffusion depth across the entire sample batch. |
| Chemical Vapor Deposition (CVD) | Creating thermal gradients to control the travel and deposition of precursors onto substrates in a vacuum. | Precise control over film thickness and crystal orientation. |
| Material Sintering | Consolidating powder materials into solid forms at temperatures up to 1200°C under inert or reducing gases. | Improved structural density and mechanical properties of ceramics. |
| Annealing of Alloys | Relieving internal stresses in metal alloys through controlled heating and specific cooling rates. | Enhanced ductility and toughness for aerospace or automotive parts. |
| Crystal Growth | Maintaining a precise temperature gradient to facilitate the slow growth of single crystals from a melt or vapor. | Superior crystal quality with reduced defect density and high purity. |
| Battery Material Research | Heat treating cathode or anode materials in nitrogen or argon environments to optimize ion conductivity. | Consistent electrochemical performance across different material batches. |
| Gradient Heat Treatment | Testing the effects of different temperatures on a single sample by placing it across multiple heating zones. | Accelerated data collection for phase transition studies. |
Technical Specifications
| Parameter Group | Specification Detail | TU-48 Base Value |
|---|---|---|
| Power Requirements | Voltage / Frequency | AC 208-240V Single Phase, 50/60 Hz |
| Max Power Consumption | 8 KW | |
| Circuit Protection | 50A Breaker required | |
| Thermal Performance | Maximum Temperature | 1200 °C (< 1 hr) |
| Continuous Operating Temperature | 1100 °C | |
| Maximum Heating Rate | ≤ 20 °C / min | |
| Temperature Accuracy | ± 1 °C | |
| Heating Zone Specs | Number of Zones | 5 Zones (each 152 mm) |
| Total Heating Zone Length | 870 mm | |
| Constant Temp Zone Length | ~500 mm (within ± 2 °C) | |
| Thermocouples | 5 x K-type (one per zone) | |
| Tube Variants | TU-48-80 | OD 80 x ID 74 x L 1400 mm |
| TU-48-100 | OD 100 x ID 94 x L 1400 mm | |
| TU-48-130 | OD 130 x ID 124 x L 1400 mm | |
| Vacuum System | Vacuum Level (Mechanical Pump) | 10-2 torr |
| Vacuum Level (Turbopump) | 10-4 torr | |
| Flange Components | Needle valve (1/4"), mechanical gauge, KF25 port available | |
| Control Interface | Control System | PLC Touch Screen (integrated 5-zone control) |
| Programming Segments | 30 segments (Rate, Dwell, Cool) | |
| Connectivity | RS485 Communication Port | |
| Compliance | Standards | CE Certified (NRTL or CSA available on request) |
| Patent Reference | ZL-2011-2-0355777.1 |
Why Choose This Furnace
- Superior Thermal Versatility: Unlike single-zone models, this system provides absolute control over the thermal profile length. Whether you need a short, intense gradient or a massive 500mm uniform zone, the five-zone architecture delivers performance that grows with your research needs.
- Premium Engineering and Safety: Constructed with industrial-grade split-furnace hardware and advanced alumina fiber insulation, the unit is built for durability and thermal efficiency. The inclusion of overheating and thermocouple failure protection ensures the safety of your laboratory and your samples.
- Intuitive Automation: The touch screen PLC eliminates the complexity of managing five separate controllers. This integrated approach allows for seamless synchronization of heating rates and cooling phases, reducing the risk of operator error in complex 30-segment recipes.
- Validated High-Vacuum Performance: With vacuum sealing flanges and high-quality quartz tubes included as standard, this system is ready for high-vacuum and controlled atmosphere operations right out of the box, facilitating oxygen-sensitive reactions with ease.
- Future-Proof Compliance: The system is CE certified and can be upgraded to NRTL or CSA standards, making it suitable for high-compliance industrial environments and academic institutions worldwide.
Our technical team is ready to help you configure the ideal furnace for your specific atmospheric and thermal requirements. Contact THERMUNITS today to request a quotation or to discuss customization options for your high-temperature research or production facility.
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