Tube Furnace
Six Zone Split Tube Furnace 1.8 Meter Quartz Tube 1200C High Temperature Heating System
Item Number: TU-49
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Product Overview



This six-zone ultra-long split tube furnace represents a pinnacle in thermal processing engineering, specifically designed for high-precision material research and industrial production. By integrating six independently controlled heating zones across a massive 1.8-meter heated length, this system allows operators to establish either an exceptionally long constant temperature zone or complex, multi-step thermal gradients. Its split-hinge design is engineered for rapid access, enabling the easy insertion of process tubes and the assembly of intricate experimental configurations without long downtime or labor-intensive teardowns.
Primary applications for this equipment span across semiconductor wafer processing, chemical vapor deposition (CVD), and advanced ceramic sintering where temperature uniformity and atmosphere control are critical. The system provides a robust platform for target industries including aerospace, energy storage, and metallurgy. Whether utilized for annealing ultra-long wire samples or conducting zone refining, the furnace delivers the consistency and scalability required for transition from laboratory-scale experiments to pilot-plant production environments.
Built with professional-grade components and a double-layer steel housing, the unit is intended for continuous, heavy-duty operation in demanding industrial R&D settings. The separation of the heating chamber from the control electronics ensures long-term reliability and protects sensitive components from thermal stress. This equipment is the preferred choice for facilities prioritizing high-throughput processing, precision thermal profiling, and the ability to maintain high vacuum or specific gas atmospheres under rigorous duty cycles.
Key Features
- Six Independent Heating Zones: Each of the six 300 mm heating zones is driven by its own dedicated control system, allowing for the creation of intricate temperature profiles or a massive 1525 mm constant temperature zone within +/- 2ºC accuracy.
- Precision PID Temperature Control: Six 30-segment programmable digital controllers provide meticulous management of heating rates, cooling rates, and dwell times, ensuring repeatable results for sensitive metallurgical processes.
- Ultra-Long Heating Chamber: With a total heated length of 1800 mm (72"), this system accommodates long process tubes and large-batch samples, significantly increasing throughput compared to standard laboratory furnaces.
- Split-Hinge Design: The furnace body is split lengthwise and supported by gas springs, allowing for easy tube replacement, fast cooling cycles, and visual inspection of the tube setup without disturbing the internal atmosphere.
- High-Purity Alumina Insulation: Advanced fibrous alumina insulation minimizes heat loss and reduces energy consumption, while the double-layer steel case with cooling fans maintains a safe exterior touch temperature during operation.
- Advanced Heating Elements: Utilizing 1300ºC grade Fe-Cr-Al alloy doped with Molybdenum, the system ensures rapid heating times up to 1200ºC and excellent oxidation resistance for a longer service life.
- PC-Link Communication Interface: Equipped with an RS485 communication port and specialized control software, the system enables remote monitoring and control from a PC, facilitating data logging and complex process automation.
- Vacuum and Atmosphere Versatility: The equipment includes high-quality stainless steel vacuum flanges with needle valves and pressure gauges, supporting processing under vacuum levels or controlled gas environments like Nitrogen, Argon, or forming gas.
- Integrated Safety Protections: Built-in safeguards include overheating alarms, broken thermocouple protection, and over-temperature shut-off mechanisms to protect both the equipment and the processed materials.
- Customizable Tube Diameters: While provided with a 4" OD quartz tube, the flexible design can accommodate various processing tubes from 1" to 4" O.D., allowing the furnace to adapt to evolving research requirements.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| CVD/PECVD Processes | Used as the primary heating source for chemical vapor deposition of thin films and nanomaterials. | Excellent uniformity over large areas for scalable film growth. |
| Zone Refining | Establishing thermal gradients to purify materials by moving molten zones through a solid ingot. | High-resolution gradient control via six independent zones. |
| Semiconductor Doping | Diffusion of dopants into semiconductor wafers within a controlled, high-purity atmosphere. | Clean quartz environment and precise dwell time management. |
| Calibration of Sensors | Utilizing the long constant temperature zone to calibrate various thermal sensors and thermocouples. | Industry-leading 60" constant temperature capability. |
| Wire and Fiber Annealing | Continuous heat treatment of metallic wires or ceramic fibers as they pass through the long tube. | Stable thermal profile prevents structural defects in long samples. |
| Solid-State Synthesis | High-temperature reactions of powder precursors to form new ceramic or composite compounds. | Reliable atmosphere control prevents oxidation of sensitive powders. |
| Gradient Thermal Cycling | Subjecting materials to different temperatures simultaneously to study phase transitions. | Eliminates the need for multiple separate furnace runs. |
| Battery Material Testing | Calcination and sintering of cathode/anode materials under specific gas flow conditions. | Large chamber volume allows for high-capacity batch processing. |
Technical Specifications
| Parameter Group | Specification Detail | Value |
|---|---|---|
| Model Identification | Product Item Number | TU-49 |
| Temperature Metrics | Maximum Operating Temperature | 1200 °C (< 1 hour) |
| Continuous Operating Temperature | 1100 °C | |
| Maximum Heating Rate | ≤ 20 °C / min | |
| Temperature Accuracy | +/- 1 ºC | |
| Heating Zones | Number of Zones | 6 Independent Zones |
| Length per Zone | 300 mm (11.8") | |
| Total Heated Length | 1800 mm (72") | |
| Constant Temperature Zone | 1525 mm (60") with all zones set same | |
| Dimensions & Material | Furnace Structure | Double-layer steel case with energy-saving insulation |
| Tube Size | 101.6 mm OD x 92 mm ID x 2540 mm L (4" x 3.6" x 100") | |
| Heating Chamber Size | 1828 mm L x 140 mm Dia (72" x 5.5") | |
| Insulation Material | High-purity fibrous alumina | |
| Control System | Controller Type | Six 30-segment PID digital controllers |
| Thermocouple Type | Six K-type (one per zone) | |
| Remote Control | RS485 Port with PC Software compatibility | |
| Electrical Data | Voltage / Phase | AC 208-240V, Three Phase, 50/60 Hz |
| Total Power | 13 KW Maximum | |
| Power per Zone | 2 KW per heating zone | |
| Vacuum & Atmosphere | Standard Flange Set | Stainless steel vacuum flanges with KF25 port |
| Gas Inlet | 1/4" Pipe port with needle valve | |
| Pressure Monitoring | Integrated mechanical pressure gauge | |
| Max Vacuum Level | Limited by pump (Standard <0.2 bar for safety) | |
| Compliance | Certification | CE Certified (NRTL/CSA available upon request) |
Why Choose TU-49
- Superior Thermal Versatility: The unique six-zone architecture allows for the most complex thermal profiling available in a tube furnace, enabling researchers to achieve results that are impossible with single or dual-zone units.
- Industrial-Grade Construction: Engineered with high-density alumina fiber and a robust split-case design, this system is built to withstand the rigors of continuous high-temperature operation without compromising structural integrity.
- Precision at Scale: Maintaining a +/- 2ºC uniformity over a 1.5-meter span ensures that large-scale samples or multi-wafer batches receive identical thermal treatment, a critical factor for industrial quality control.
- Future-Proof Expandability: Whether you need to integrate mass flow controllers, advanced vacuum pumps, or move to PC-based automated control, this system is designed to grow with your laboratory's needs.
- Reliable Technical Support: Backed by THERMUNITS' deep expertise in high-temperature systems, every unit comes with the assurance of responsive technical assistance and high-quality replacement parts.
Investing in this ultra-long furnace system ensures your facility is equipped with a high-performance tool capable of meeting the most stringent thermal processing demands. Contact our engineering team today to request a quote or to discuss a customized configuration for your specific application.
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