Tube Furnace
1200C Four Zone Split Tube Furnace with Touch Screen Control and High Purity Quartz Tube and Vacuum Sealing Flanges
Item Number: TU-45
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Product Overview



This sophisticated thermal processing system is engineered to provide unmatched precision in high-temperature material research and industrial production. By utilizing a unique four-zone heating architecture, the equipment allows operators to choose between creating a perfectly uniform constant temperature zone or establishing a tailored thermal gradient. This versatility is essential for advanced material synthesis, where specific temperature profiles are required to drive chemical reactions, facilitate crystal growth, or manage phase transitions with exacting detail. The split-furnace design further enhances operational efficiency, allowing for rapid cooling and easy access to the quartz processing tube, making it an indispensable asset for high-throughput laboratory environments.
Designed for demanding R&D cycles and pilot-scale manufacturing, this unit excels in semiconductor diffusion, ceramic sintering, and specialized annealing processes. Its robust construction and advanced insulation materials ensure it can maintain peak temperatures of 1200°C while protecting sensitive laboratory environments and surrounding electronics from heat dissipation. Industries ranging from aerospace and battery technology to solid-state chemistry rely on this system for its ability to deliver repeatable results under vacuum or controlled atmosphere conditions. The integration of high-purity quartz and precision vacuum seals provides a clean, contaminant-free environment for even the most sensitive analytical samples.
Reliability is the cornerstone of this thermal system's engineering. Every component, from the high-purity fibrous alumina insulation to the heavy-duty cooling fans, is selected to ensure structural integrity and performance longevity under continuous operation. The dual-layer steel housing remains cool to the touch even during peak heating cycles, prioritizing operator safety and equipment durability. By combining state-of-the-art touch screen automation with traditional split-furnace reliability, this system offers a professional-grade solution for researchers who require both the power of high-temperature processing and the finesse of multi-zone thermal management.
Key Features
- Independently Controlled Four-Zone Heating: The system features four distinct heating zones arranged in a 150mm-300mm-300mm-150mm configuration, allowing for the creation of precise thermal gradients or a massive 900mm total heated length for large-batch processing.
- Advanced Touch Screen Interface: A centralized high-resolution touch panel integrates four PID controllers, enabling seamless 30-segment programming for heating rates, dwell times, and cooling curves with an accuracy of ±1°C.
- Split-Furnace Engineering for Efficiency: The hinged split-case design allows for rapid opening of the chamber, facilitating faster sample cooling after processing and simplifying the installation or removal of the quartz tube and internal fixtures.
- High-Performance Vacuum Sealing: Equipped with a professional-grade vacuum-sealed flange system featuring a built-in needle valve, mechanical pressure gauge, and ball valve, the unit supports vacuum levels as deep as 10-4 torr with appropriate pumping systems.
- Superior Thermal Insulation: Utilizing high-purity fibrous alumina insulation, the system minimizes energy consumption and prevents heat bleed, ensuring the outer shell remains at a safe temperature while maintaining internal thermal stability.
- Precision Thermocouple Array: Four K-type thermocouples are strategically embedded within the zones to provide real-time, high-accuracy temperature feedback directly to the PID controllers for instantaneous adjustment of thermal profiles.
- Enhanced Safety Protocols: The equipment includes built-in overheating protection and a broken thermocouple alarm system, which automatically shuts down heating to prevent hardware damage or experimental loss during unattended operation.
- Versatile Tube Compatibility: The system is designed to accommodate multiple quartz tube diameters, ranging from 80mm to 130mm, providing researchers with the flexibility to scale sample sizes without investing in entirely new furnace systems.
- Forced Air Cooling System: An integrated double-layer steel case with energy-efficient cooling fans ensures continuous airflow between the inner and outer shells, significantly extending the lifespan of electronic components.
- Industrial PC Connectivity: Featuring an RS485 communication port and dedicated software, the system allows for remote monitoring, data logging, and PC-based control of complex thermal cycles for comprehensive audit trails.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| Semiconductor Diffusion | Introducing dopants into silicon wafers using precise thermal gradients across the processing tube. | Ensures uniform junction depths and electrical characteristics across the entire batch. |
| Solid State Battery R&D | Sintering electrolyte materials and electrode coatings under controlled atmospheres or vacuum. | Prevents oxidation and ensures high ionic conductivity in sensitive battery components. |
| CVD / PECVD Processes | Serving as the thermal reactor for Chemical Vapor Deposition of thin films, nanotubes, or nanowires. | Stable multi-zone heating enables precise control over gas phase reactions and film thickness. |
| Annealing of Metal Alloys | Relieving internal stresses in precision-machined aerospace or medical-grade metal components. | Controlled cooling rates and vacuum environment prevent surface decarburization and scaling. |
| Ceramic Co-Firing | High-temperature processing of multi-layer ceramic capacitors or piezoelectric materials. | The 300mm constant temperature zone ensures uniform shrinkage and structural density. |
| Crystal Growth | Utilizing the four-zone gradient capability to promote the Bridgman or Czochralski growth methods. | Tailorable thermal gradients allow for strict control over the solid-liquid interface for high-purity crystals. |
| Atmospheric Sintering | Heating oxide ceramics in nitrogen, argon, or forming gas to reach theoretical density. | High-quality vacuum flanges and needle valves allow for precise gas flow management and purity. |
| Catalyst Testing | Evaluating the performance of industrial catalysts at elevated temperatures under various flow conditions. | Robust quartz tube structure survives corrosive gas environments and rapid thermal cycling. |
Technical Specifications
General System Parameters
| Feature | Specification Details (Model TU-45) |
|---|---|
| Item Number | TU-45 |
| Furnace Structure | Dual-layer steel case with forced air cooling fans |
| Insulation Material | High-purity fibrous alumina insulation (energy saving) |
| Maximum Temperature | 1200 °C (for < 1 hour) |
| Continuous Working Temp | 1100 °C |
| Maximum Heating Rate | ≤ 20 °C / minute |
| Temperature Accuracy | ± 1 °C |
| Thermocouple Type | 4 sets of K-type thermocouples |
Multi-Zone Configuration
| Heated Zone Metrics | Measurement |
|---|---|
| Total Heating Zone Length | 900 mm |
| Zone Individual Lengths | Zone 1: 150mm | Zone 2: 300mm | Zone 3: 300mm | Zone 4: 150mm |
| Constant Temperature Zone | 300 mm within ± 2 °C (all zones at same set point) |
| Control Method | Independent PID control for each zone via touch screen |
Power and Electrical Requirements
| Parameter | Requirement |
|---|---|
| Input Voltage | AC 208-240V Single Phase, 50/60 Hz |
| Maximum Power Consumption | 7 KW |
| Circuit Protection | 50A breaker required |
| Communication Interface | RS485 Port (Software included) |
Processing Tube and Variant Options
| Base Model | Tube Material | Tube Dimensions (OD x ID x Length) | Flange Compatibility |
|---|---|---|---|
| TU-45-80 | High Purity Quartz | 80 mm x 74 mm x 1400 mm | Vacuum-sealed with 1/4" fitting |
| TU-45-100 | High Purity Quartz | 100 mm x 94 mm x 1400 mm | Vacuum-sealed with 1/4" fitting |
| TU-45-130 | High Purity Quartz | 130 mm x 124 mm x 1400 mm | Vacuum-sealed with 1/4" fitting |
Vacuum and Atmospheric Control
| Feature | Specification |
|---|---|
| Vacuum Level (Turbopump) | Up to 10-4 torr |
| Vacuum Level (Mechanical) | Up to 10-2 torr |
| Vacuum Ports | KF25 port available upon request |
| Gas Pressure Limit | < 0.2 bars (Standard operation) |
| Maximum Gas Flow Rate | < 200 SCCM (to protect quartz from thermal shock) |
| Included Accessories | Needle valve, mechanical gauge, ball valve, ceramic tube blocks |
Why Choose Us
- Unmatched Thermal Flexibility: The four-zone configuration provides a level of control that standard single-zone furnaces cannot match, allowing for complex gradient synthesis and superior uniformity over a larger volume.
- Intuitive Touch Control: By consolidating four independent controllers into a single touch screen interface, we reduce operator error and simplify the management of complex 30-segment thermal profiles.
- Professional Vacuum Engineering: Unlike standard laboratory ovens, this system is optimized for high-vacuum integrity, featuring precision-machined flanges and high-quality quartz that meet the standards of industrial semiconductor processing.
- Safety-First Design: The dual-shell construction and intensive air cooling are engineered for safety in high-traffic lab environments, ensuring that the high internal temperatures do not pose a risk to personnel or other equipment.
- Investment-Grade Durability: Built with high-purity alumina insulation and premium heating elements, this system is designed for years of consistent performance in demanding R&D environments, offering a high return on investment through reliability.
This high-performance four-zone thermal system represents the pinnacle of laboratory heat treatment technology. Contact THERMUNITS today to request a quotation or to discuss a customized configuration tailored to your specific material science requirements.
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