1500°C Split Tube Furnace with Alumina Tube and Vacuum Sealing Flanges for Material Research

Tube Furnace

1500°C Split Tube Furnace with Alumina Tube and Vacuum Sealing Flanges for Material Research

Item Number: TU-63

Maximum Temperature: 1500°C Temperature Control Accuracy: +/- 1°C Continuous Heating Temperature: 1400°C
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Product Overview

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This high-temperature split tube furnace represents a pinnacle of precision engineering for advanced material science and industrial R&D. Designed to operate at temperatures up to 1500°C, the equipment features a unique split-able alumina tube chamber that allows for rapid sample access and easy integration of complex experimental setups. By combining high-performance Silicon Carbide (SiC) heating elements with a versatile tube configuration, this system delivers the stable thermal environment necessary for critical processes such as sintering, annealing, and chemical vapor deposition.

The primary value of this equipment lies in its adaptability for both vacuum and controlled atmosphere conditions. Equipped with high-quality stainless steel vacuum sealing flanges and high-purity alumina tubes, the unit supports rigorous thermal processing across various industries, including semiconductor manufacturing, aerospace material development, and catalytic research. The split design is particularly advantageous for researchers who require frequent insertion and removal of process tubes without disturbing the surrounding sample setup or gas connections.

Engineered for heavy-duty industrial and laboratory use, the furnace is built within a double-layer steel casing that utilizes air-cooling technology to maintain a safe exterior temperature. Every component, from the fibrous alumina insulation to the advanced PID controller, is selected to ensure long-term reliability and consistency. This system provides procurement teams and laboratory managers with a robust, high-availability solution for demanding heat treatment protocols where precision and safety are non-negotiable.

Key Features

  • Split-able Chamber Architecture: The lengthwise split design provides unparalleled accessibility to the processing zone. This allows operators to easily install or remove the alumina tube, manage internal thermocouples, or adjust sample positioning without dismantling the entire assembly, significantly reducing downtime between experimental runs.
  • Advanced Silicon Carbide (SiC) Heating Elements: High-grade 1500-grade SiC rods provide efficient and uniform radiant heat. These elements are specifically configured to handle rapid thermal cycles and maintain high-temperature stability, ensuring the equipment can reach its maximum rated temperature reliably for critical industrial processes.
  • Precision PID Temperature Moderation: The integrated digital controller features Proportional-Integral-Derivative logic and an auto-tune function. With 30 programmable segments for ramping, cooling, and dwelling, the system delivers +/- 1°C accuracy, providing the repeatable thermal cycles required for sensitive material synthesis.
  • Integrated Safety Interlock Protection: To ensure personnel safety in busy laboratory environments, the system features a built-in interlock mechanism. This safety feature automatically cuts power to the heating elements whenever the furnace cover is opened, preventing accidental exposure to high voltage or extreme thermal radiation.
  • High-Performance Vacuum Sealing Flanges: Each unit includes a pair of smart stainless steel vacuum flanges equipped with valves and gauges. This configuration allows for seamless transition between high-vacuum environments and pressurized gas flow conditions, supporting a wide range of atmospheric control needs.
  • Dual-Layered Air-Cooled Steel Casing: The furnace housing is designed with an internal air-cooling fan system. This double-wall construction ensures that while the internal chamber reaches 1500°C, the outer surface remains below 60°C, protecting operators and surrounding sensitive laboratory equipment.
  • Industrial-Grade Thermal Insulation: Utilizing high-purity fibrous alumina insulation, the furnace minimizes heat loss and maximizes energy efficiency. The special refractory coating on the inner surface further extends the operational life of the insulation by resisting degradation over repeated high-temperature cycles.
  • Versatile Atmosphere Control: The equipment is optimized for diverse gas environments. With the ability to maintain vacuum levels down to 10^-5 torr (with a turbomolecular pump) or accommodate inert gas flows, it is an ideal platform for graphitization, carbonization, and specialized oxidation studies.

Applications

Application Description Key Benefit
Catalytic Graphitization Processing phenolic resin carbon and catalysts at ultra-high temperatures to transform amorphous carbon into graphite structures. Ensures Ni-Zn-B catalytic efficiency through superior thermal field uniformity.
Chemical Vapor Deposition (CVD) Growth of high-quality thin films and 3C-SiC films on silicon substrates for semiconductor applications. Precise control over gas flow and temperature gradients for consistent film thickness.
Ceramics Sintering High-temperature consolidation of ceramic powders into dense, high-performance structural components. Minimal thermal fluctuation prevents cracking and improves material density.
Battery Material R&D Thermal processing of electrode materials under controlled inert atmospheres to enhance electrochemical properties. Prevent oxidation of sensitive powders through high-integrity vacuum sealing.
Semiconductor Annealing Modifying the physical and electrical properties of silicon wafers and other substrates through controlled heating. Rapid cooling capabilities allow for precise control over dopant diffusion profiles.
Aerospace Composites Heat treatment of advanced alloys and composite materials requiring strict adherence to 1500°C thermal profiles. Robust SiC elements provide the high-wattage output needed for large sample loads.

Technical Specifications

Parameter TU-63-2 (2" Variant) TU-63-3 (3" Variant)
Model Identifier TU-63-2 TU-63-3
Standard Alumina Tube Size 50mm OD x 40mm ID x 1000mm L 76mm OD x 67mm ID x 1000mm L
Heating Element Type 16 pcs SiC Rods (1500 Grade) 16 pcs SiC Rods (1500 Grade)
Maximum Temperature 1500°C (< 1 hour) 1500°C (< 1 hour)
Continuous Operating Temp 1400°C 1400°C
Heating Rate Max 10°C/min (Tube dependent) Max 10°C/min (Tube dependent)
Cooling Rate < 5°C/min (Alumina specific) < 5°C/min (Alumina specific)
Temperature Accuracy +/- 1°C +/- 1°C
Total Heating Zone Length 390 mm 390 mm
Constant Temperature Zone 150 mm (+/- 2°C) 150 mm (+/- 2°C)
Voltage Requirement 208 - 240VAC Single Phase 208 - 240VAC Single Phase
Power Consumption 6.0 KW 6.0 KW
Thermocouple Type S-Type S-Type
Vacuum Level Capability 10^-2 torr (Mechanical) / 10^-5 torr (Turbo) 10^-2 torr (Mechanical) / 10^-5 torr (Turbo)
Leak Rate < 5 mtorr / min < 5 mtorr / min
Pressure Monitoring Mechanical Gauge (-0.1 to 0.15Mpa) Mechanical Gauge (-0.1 to 0.15Mpa)
Compliances CE Certified (UL/CSA available) CE Certified (UL/CSA available)

Why Choose This Split Tube Furnace

  • Proven Long-Term Reliability: Engineered with 1500-grade SiC heating elements and vertical rod installation, this system is designed to withstand the rigors of continuous industrial use without performance degradation.
  • Enhanced Operational Safety: From the integrated interlock system that protects users from thermal hazards to the double-layer cooling casing, every design choice prioritizes a safe working environment for researchers.
  • Precision Manufacturing Standards: The use of high-purity fibrous alumina and specialized refractory coatings ensures that the furnace maintains its thermal integrity, reducing the frequency of maintenance and the total cost of ownership.
  • Versatile Flange Engineering: The smart stainless steel flange system is designed for high-vacuum integrity and ease of use, allowing for rapid conversion between different atmospheric processing modes.
  • Customizable Control Options: Beyond the standard 30-segment PID control, this system can be upgraded with computerized data logging and PC communication ports to meet the specific documentation requirements of modern R&D laboratories.

Our technical engineering team is available to assist you in configuring the ideal thermal solution for your unique high-temperature processing requirements. Contact us today for a technical consultation or a formal quotation.

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