Tube Furnace
High Temperature 1200C Split Tube Furnace with Optional Quartz Tube Sizes and Vacuum Sealing Flanges for Material Science Research
Item Number: TU-23
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Product Overview



This high-performance split tube furnace represents a cornerstone in thermal processing for modern material science and industrial R&D. Designed to facilitate precise heat treatment protocols up to 1200°C, the system offers a versatile platform for researchers who require stringent control over their thermal environments. By utilizing a split-hinge architecture, the equipment allows for effortless access to the processing chamber, enabling quick insertion of reaction tubes, complex sensor setups, or pre-assembled experimental components without disturbing delicate sample arrangements.
Primarily utilized in chemical vapor deposition (CVD), sintering, and annealing processes, this system is an essential tool for semiconductor development, battery research, and advanced ceramics engineering. Its ability to operate under varied atmospheric conditions—ranging from high-vacuum states to controlled inert gas flows—makes it ideal for synthesizing high-purity materials that are sensitive to oxidation or environmental contaminants. The robust construction ensures that it meets the rigorous demands of both academic laboratories and industrial pilot lines.
Reliability is at the core of this unit's engineering. With a focus on long-term operational consistency, the furnace incorporates advanced safety features and high-grade insulation materials that protect both the user and the integrity of the thermal cycle. The inclusion of components that meet UL and CSA standards underscores a commitment to quality and regulatory compliance, providing procurement teams and laboratory managers with the confidence that this equipment will perform reliably under demanding, continuous-use conditions in any high-stakes research environment.
Key Features
- Precision PID Temperature Regulation: The integrated digital controller utilizes sophisticated Proportional-Integral-Derivative logic with an auto-tune function, maintaining temperature stability within ±1°C and offering 30 programmable segments for complex ramping and dwelling.
- Advanced Split-Hinge Architecture: The furnace casing features a split-cover design with a built-in safety interlock mechanism, which automatically terminates power to the heating elements when the door is opened to prevent accidental exposure and ensure operator safety.
- Enhanced Thermal Insulation: High-purity fibrous alumina insulation is utilized to minimize heat loss and maximize energy efficiency, while a special refractory coating on the internal liner and heating elements significantly extends the operational lifespan of the unit.
- High-Performance Heating Elements: Mo-doped Fe-Cr-Al alloy heating elements are engineered to provide rapid heating rates up to 20°C/min while resisting deformation under high-temperature cycles in inert atmospheres.
- Double-Layer Safety Casing: A heavy-duty double-layer steel casing incorporates active air cooling to keep the external surface temperature below 60°C, ensuring a safe touch-environment even during peak 1200°C operation.
- Versatile Vacuum and Atmosphere Control: Equipped with stainless steel 304 vacuum sealing flanges featuring needle valves, a mechanical pressure gauge, and a KF-25 port, the system supports vacuum levels down to 10E-5 torr when paired with appropriate pumping systems.
- Flexible Tube Configuration: The system is designed to accommodate multiple quartz tube diameters, ranging from 60mm to 100mm, allowing researchers to scale their experiments or adjust processing volumes without purchasing entirely new furnace units.
- Integrated Data Communication: A standard DB9 PC communication port and included software allow for remote monitoring and data logging of thermal cycles, which is critical for documentation and process optimization in R&D.
Applications
| Application | Description | Key Benefit |
|---|---|---|
| CVD / PECVD Systems | Growth of thin films, carbon nanotubes, and 2D materials like graphene under controlled gas environments. | Precise gas flow and temperature uniformity ensure high-quality, repeatable film growth. |
| Semiconductor Annealing | Heat treatment of silicon wafers or compound semiconductors to modify electrical properties or repair crystal defects. | Rapid heating and cooling capabilities with high-purity quartz environments prevent contamination. |
| Battery Material Synthesis | Calcination and sintering of cathode/anode powders under inert nitrogen or argon atmospheres. | Maintains strict chemical stoichiometry by preventing oxidation during the thermal cycle. |
| Ceramic Sintering | Consolidation of technical ceramic powders into dense components at high temperatures. | High-purity alumina insulation prevents cross-contamination and ensures material integrity. |
| Catalyst Characterization | Testing of catalytic materials under varying temperature and gas flow rates to determine efficiency and lifespan. | Dual-needle valve flanges allow for precise control of reactive gas precursors. |
| Vacuum Metallurgy | Melting or heat-treating specialty alloys in a low-pressure environment to remove dissolved gases. | High-vacuum capability (10E-5 torr) ensures ultra-clean processing for aerospace and medical alloys. |
Technical Specifications
| Parameter | Technical Detail for TU-23 |
|---|---|
| Model Identifier | TU-23 Series (UL/CSA Configuration Available) |
| Input Voltage | 208 - 240VAC Single Phase, 50/60Hz |
| Power Rating | 3KW (Circuit breaker: 20A) |
| Maximum Heating Temperature | 1200°C (Requires inert gas inside tube) |
| Vacuum Heating Limit | 1000°C (Under vacuum conditions) |
| Recommended Heating Rate | ≤ 20°C / min |
| Temperature Accuracy | +/- 1 ºC |
| Heating Zone Length | Total: 440mm; Constant Zone: 150mm (+/- 2°C) |
| Thermal Uniformity | +/- 10°C @ 1000°C (center 320mm); +/- 5°C @ 1000°C (center 220mm) |
| Temperature Controller | 30 programmable segments; PID control; Auto-tune; Built-in alarms |
| Optional Controller | Eurotherm 3004 (±0.1°C accuracy) with RS485-USB communication |
| Thermocouple Type | K-type (6" length, 3mm OD, Ceramic Sheath) |
| Quartz Tube Option 1 (TU-23-60) | 60mm O.D x 55mm I.D x 1000mm L |
| Quartz Tube Option 2 (TU-23-75) | 76mm O.D x 70mm I.D x 1000mm L |
| Quartz Tube Option 3 (TU-23-80) | 80mm O.D x 74mm I.D x 1000mm L |
| Quartz Tube Option 4 (TU-23-100) | 101mm O.D x 92mm I.D x 1000mm L |
| Vacuum Flanges | Dual SS 304; 1/4" Feedthrough; KF-25 Port; Needle Valves; Barb Fittings |
| Vacuum Pressure Capability | 10E-2 torr (Mechanical Pump); 10E-5 torr (Turbopump) |
| Standard Thermal Insulation | Fibrous ceramic blocks included (Quartz blocks optional) |
| Product Dimensions | 600mm(L) × 440mm(W) × 550mm(H) |
| Net Weight | 40 kg |
| Compliance | CE Certified; NRTL or CSA available upon request |
Why Choose This High-Temperature Split Tube Furnace
- Uncompromising Safety Standards: This equipment is built to meet or exceed international safety certifications, featuring interlock protection and advanced cooling casings that make it suitable for high-traffic academic and industrial laboratories.
- Scalable Processing Environments: Unlike fixed-diameter furnaces, the modularity of this system allows for the integration of various quartz tube sizes, providing researchers with the flexibility to adapt to changing project requirements without significant capital expenditure.
- Superior Thermal Management: Through the use of Mo-doped elements and high-grade alumina insulation, the unit delivers exceptional temperature uniformity and energy efficiency, resulting in consistent material properties across every batch.
- Precision Engineering and Support: Each unit is backed by a one-year limited warranty and lifetime technical support, ensuring that your investment is protected by experts who understand the nuances of high-temperature thermal processing.
- Customizable Control Options: From standard high-precision PID controllers to ultra-accurate Eurotherm upgrades, the system can be tailored to meet the specific resolution requirements of your most sensitive material synthesis protocols.
Contact our technical sales team today for a formal quote or to discuss how this equipment can be customized to meet your specific research objectives.
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