High Temperature 1200C Split Tube Furnace for CVD Research and Vacuum Atmosphere Heat Treatment

Tube Furnace

High Temperature 1200C Split Tube Furnace for CVD Research and Vacuum Atmosphere Heat Treatment

Item Number: TU-GS18

Maximum Temperature: 1200°C Temperature Accuracy: ±1°C Heating Element: Kanthal Resistance Wire
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Product Overview

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This high-performance split tube thermal processing system represents the pinnacle of compact laboratory furnace engineering, specifically designed to meet the rigorous demands of material science research and industrial prototyping. By integrating a sophisticated heating chamber with a high-precision control interface, the equipment provides researchers with an adaptable platform for atmosphere-controlled sintering, vacuum annealing, and chemical vapor deposition (CVD). The system's primary value proposition lies in its ability to achieve exceptional thermal uniformity while maintaining a low external surface temperature, ensuring both experimental accuracy and operator safety within a compact footprint.

Engineered for demanding R&D environments, this equipment is frequently utilized in semiconductor development, technical ceramics testing, and metallurgical studies. It excels in applications requiring rapid thermal cycles; the innovative split-hinge design allows for quick access to the process tube and facilitates accelerated cooling after a run. Whether deployed in a university cleanroom or a corporate material science laboratory, this system delivers the reliability and repeatable results essential for cutting-edge technological advancement and process verification.

As a foundational tool for thermal processing, the unit bridges the gap between theoretical research and industrial production. Its robust construction and premium components guarantee operational longevity, making it an essential investment for facilities focused on high-temperature material transformation. The integration of advanced Japanese insulation materials and high-stability heating elements ensures that this furnace remains a versatile and dependable asset for diverse heat treatment protocols.

Key Features

  • Precision Split-Type Chamber Design: The innovative hinged configuration allows for easy insertion and removal of process tubes and internal components. This design is specifically engineered to enable rapid cooling phases by opening the chamber, which significantly increases experiment throughput and allows for quick cleaning or replacement of the quartz or ceramic tubes.

  • Premium Kanthal Heating Elements: Utilizing genuine Kanthal resistance wire, the system provides exceptionally stable and rapid heating reaching up to 1200°C. These high-grade elements are chosen for their superior oxidation resistance and mechanical stability at high temperatures, ensuring consistent performance over thousands of heating cycles.

  • Advanced Japanese Alumina Fiber Insulation: The chamber is constructed from 98% polycrystalline alumina fiber imported from Japan. This high-purity material offers extremely low thermal mass and superior insulation properties compared to traditional refractory bricks, resulting in faster ramp rates and significantly lower energy consumption.

  • Intelligent PID Control Interface: Equipped with a Japanese-made Shimaden 40-segment digital controller, the furnace allows users to program complex thermal profiles including multiple ramps, soaks, and cooling steps. The controller maintains a tight temperature accuracy of ±1°C, providing the granular control necessary for sensitive material synthesis.

  • Dual-Layer Housing with Active Air Cooling: The furnace features a double-walled steel structure with an integrated cooling fan system. This engineering choice maintains a low external skin temperature, protecting laboratory staff and preventing thermal interference with surrounding sensitive analytical equipment.

  • High-Precision Phase-Shift Triggering: The internal power management system utilizes a phase-shift trigger to provide smooth, continuous power to the heating elements. This eliminates the thermal shock associated with standard on/off switching, thereby extending the lifespan of the Kanthal wire and the alumina fiber chamber.

  • Versatile Atmosphere Management: The unit is designed to facilitate vacuum or inert gas environments, making it ideal for processes that require high-purity conditions or specific chemical reactions. The end-seal assemblies are compatible with various vacuum pumping systems and gas delivery manifolds.

Applications

Application Description Key Benefit
CVD / PECVD Research Synthesis of carbon nanotubes, graphene, and thin films using gas-phase precursors. Excellent thermal uniformity for consistent film growth across the substrate.
Vacuum Annealing Removing internal stresses in metals and alloys within a controlled vacuum environment. Prevents oxidation and contamination of sensitive metallurgical samples.
Atmosphere Sintering Sintering of advanced ceramics or powder metals under inert or reducing gases. Precise atmosphere control ensures optimal density and material properties.
Battery Research Thermal processing of anode and cathode materials for lithium-ion and solid-state batteries. Accurate ramp control for delicate chemical transformations.
Semiconductor Doping Diffusion of dopants into semiconductor wafers at high temperatures. High repeatability ensures consistent electrical characteristics in treated parts.
Materials Testing Determining the thermal stability and phase transformation points of new compounds. Rapid heating and cooling capabilities reduce overall testing duration.
Dental Sintering Firing of high-translucency zirconia and other specialized dental ceramics. Small chamber volume is ideal for precision processing of small batches.

Technical Specifications

Parameter TU-GS18-I TU-GS18-II
Product Item Number TU-GS18-I TU-GS18-II
Chamber Tube Diameter 25mm 50mm
Tube Length 700mm 700mm
Heating Zone Length 205mm 205mm
Max. Temperature 1200℃ 1200℃
Continuous Working Temp 1100℃ 1100℃
Heating Rate ≤30℃/min ≤30℃/min
Recommended Heating Rate ≤15℃/min ≤15℃/min
Temperature Accuracy ±1°C ±1°C
Power Rating 1.5KW 1.5KW
Input Voltage 220V, Single Phase 220V, Single Phase
Thermocouple Type K Type K Type
Heating Element Kanthal Resistance Wire Kanthal Resistance Wire
Chamber Material 98% Alumina Fibre (Japan) 98% Alumina Fibre (Japan)
Temperature Controller Shimaden (Japan), 40 segments Shimaden (Japan), 40 segments
External Dimensions 340 x 290 x 415mm 340 x 290 x 415mm
Trigger System Phase-shift trigger Phase-shift trigger

Why Choose High Temperature Split Tube Furnaces

  • Industrial-Grade Reliability: Engineered with premium Japanese insulation and Swedish heating technology, these furnaces are built for continuous operation in rigorous industrial R&D and academic research environments.
  • Superior Thermal Efficiency: The use of low-thermal-mass polycrystalline alumina fiber ensures that energy is directed into the heating zone rather than the housing, providing some of the fastest heat-up times in the industry.
  • Precision Control for Reproducible Science: With a Japanese Shimaden PID controller at its core, the system guarantees that your heating curves are followed exactly, run after run, which is critical for peer-reviewed research and quality-controlled industrial processes.
  • Compact and Safe Design: The double-layered, air-cooled construction allows this high-temperature furnace to sit safely on a standard laboratory bench without overheating the surrounding workspace.
  • Customizable Configuration: We offer a wide range of vacuum flanges, gas mixing systems, and multi-zone configurations to tailor this system to your specific material synthesis requirements.

Contact the technical sales team at THERMUNITS today to request a formal quotation or to discuss a custom thermal processing solution for your laboratory.

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