Compact Split Tube Furnace with Integrated Vacuum System and Precision Temperature Calibrator

Product Overview

This high-temperature processing system is a specialized thermal solution designed for precision-driven material science and industrial research. By combining a split-tube architecture with an integrated vacuum environment, the equipment allows for rapid sample loading and unloading without compromising the integrity of complex experimental setups. The system is engineered to facilitate uniform heating up to 1200°C, providing a stable platform for annealing, sintering, and chemical vapor deposition processes where atmospheric control is critical to the final material properties.

Targeted at advanced research laboratories and industrial R&D facilities, this unit provides the flexibility needed for multi-disciplinary studies. Whether used for semiconductor wafer processing or new battery chemistry development, the system offers a reliable and repeatable thermal environment. The inclusion of a dedicated temperature calibration assembly ensures that the user can verify real-time internal tube temperatures, bridging the gap between set-point parameters and actual sample exposure conditions.

Built for durability and long-term operational consistency, the equipment features a heavy-duty steel casing and high-purity alumina fibrous insulation. This combination not only ensures superior energy efficiency but also maintains a low external skin temperature during high-temp cycles. The robust engineering reflects a commitment to safety and precision, making it an essential asset for procurement teams seeking a reliable, high-performance thermal processing unit that meets the rigorous standards of modern material research and industrial heat treatment.

Key Features

• Precision Split-Tube Design: The lengthwise split-opening chamber allows for easy access to the process tube, facilitating the rapid insertion of samples or pre-assembled experimental rigs without requiring full disassembly of the vacuum flanges or gas lines.
• Advanced PID Temperature Control: This system utilizes a high-precision PID controller with 30 programmable segments, ensuring tight thermal accuracy of ±1°C and allowing for complex ramp and soak profiles tailored to specific material requirements.
• Integrated High-Vacuum System: Equipped with a 156 L/m double-step rotary vane vacuum pump and exhaust filtration, the unit can achieve vacuum levels as low as 1E-2 Torr, enabling contamination-free processing in controlled environments.
• Real-Time Temperature Calibration: An integrated NIST-standard OMEGA K-type thermocouple and digital calibrator allow operators to measure internal sample temperatures directly, providing a high level of confidence in experimental data and process repeatability.
• Superior Thermal Insulation: The chamber is lined with energy-efficient Al2O3 fibrous thermal insulation, which reduces heat loss and power consumption while ensuring rapid heating rates up to 10°C/min for increased laboratory throughput.
• Dual-Side Atmospheric Control: Featuring stainless steel vacuum flanges with a 1/4" barb gas inlet and KF25 gas outlet, the system supports both vacuum operation and flowing gas atmospheres for versatile chemical and physical vapor deposition processes.
• Mo-Doped High-Performance Heating Elements: The Fe-Cr-Al alloy heating elements, enhanced with Molybdenum doping, are designed for longevity and consistent performance at temperatures up to 1200°C, resisting oxidation and thermal fatigue.
• Modular Vacuum Flange Assembly: The heavy-duty SS flanges include integrated vacuum gauges and high-temperature seals, designed for quick assembly and reliable sealing during extended high-vacuum operations at elevated temperatures.
• Integrated Safety and Monitoring: The system includes internal safety blocks to prevent radiation heat loss and can be integrated with optional monitoring software for real-time data logging and remote recipe management via PC.

Applications

Technical Specifications

Why Choose This Furnace System

• Unmatched Measurement Precision: The integration of a dedicated, NIST-traceable temperature calibrator directly into the vacuum chamber allows for verification of sample temperatures that standard wall-mounted sensors cannot match.
• Engineered for Reliability: Utilizing industrial-grade Mo-doped heating elements and high-density alumina insulation, this system is built to withstand continuous use in demanding R&D environments without performance degradation.
• Complete Ready-to-Operate Package: Unlike systems that require separate procurement of vacuum components, this unit arrives with a high-capacity 156 L/m mechanical pump, all necessary flanges, and a quartz tube included.
• Flexible and Scalable Architecture: The split-tube design and modular flange system allow users to upgrade to larger tubes or turbomolecular pumps (achieving 10E-6 Torr) as research requirements evolve.
• Superior Build Quality: Every component, from the heavy-duty steel chassis to the precision PID electronics, is manufactured to meet the highest standards of industrial durability and user safety.

Please contact our technical sales team today for a formal quotation or to discuss a custom configuration tailored to your specific material processing requirements.